Apparatus and method for processing substrate

Patent metadata

Field	Value
Publication number	US-11897007-B2
Application number	US-202217832573-A
Country	US
Kind code	B2
Filing date	Jun 4, 2022
Priority date	Oct 8, 2021
Publication date	Feb 13, 2024
Grant date	Feb 13, 2024

Abstract

Provided is an apparatus for processing a substrate. The apparatus for processing a substrate includes a base portion configured to provide a rotational force in a circumferential direction; a holding module located on the base portion and configured to hold the substrate; a nozzle module located above the base portion and configured to jet a chemical liquid onto the substrate on the holding module; and a scattering prevention module located on the base portion at a peripheral portion of the holding module and configured to, when the chemical liquid is scattered after being jetted onto the substrate, guide the scattered chemical liquid to be discharged, wherein the scattering prevention module guides the scattered chemical liquid with a variable movement caused by the rotational force.

First claim

What is claimed:

1. An apparatus for processing a substrate, comprising:
a base portion configured to provide a rotational force in a circumferential direction;
a holding module located on the base portion and configured to hold the substrate;
a nozzle module located above the base portion and configured to jet a chemical liquid onto the substrate; and
a scattering prevention module located on the base portion at a peripheral portion of the holding module and comprising a body portion provided on the peripheral portion of the holding module and a movable portion provided at an upper portion of the body portion and configured to be movable inwardly or outwardly, the scattering prevention module configured to, when the chemical liquid is scattered after being jetted onto the substrate, guide the scattered chemical liquid to be discharged by a variable movement of the movable portion of the scattering prevention module being moved inwardly or outwardly by the rotational force.

2. The apparatus of claim 1 , wherein the scattering prevention module comprises a support portion provided on the base portion and supporting the body portion.

3. The apparatus of claim 2 , wherein the movable portion is configured to perform the variable movement that is based on rotation between the internal side and the outer side of the body portion.

4. The apparatus of claim 3 , wherein the movable portion is configured to guide the chemical liquid scattered from the substrate by performing the variable movement based on the centrifugal force.

5. The apparatus of claim 4 , wherein a degree to which the chemical liquid is scattered from the substrate is increased in response to the rotation speed of the base portion and a degree of the variable movement of the movable portion is increased in response to the rotation speed of the base portion.

6. The apparatus of claim 3 , wherein the movable portion of the scattering prevention module is formed in a shape rounded outwardly.

7. The apparatus of claim 6 , wherein the movable portion comprises a first movable member directly interlocked with the base portion and a second movable member rotatably provided at an upper portion of the first movable member and configured to perform the variable movement based on the centrifugal force.

8. The apparatus of claim 7 , wherein the movable portion comprises a third movable member rotatably provided at an upper portion of the second movable member and configured to perform the variable movement based on the centrifugal force.

9. The apparatus of claim 3 , further comprising a bowl located in the peripheral portion of the base portion and configured to accommodate the chemical liquid scattered from the substrate,
wherein the scattering prevention module is located between the holding module and the bowl.

10. The apparatus of claim 9 , wherein the bowl comprises a first bowl, a second bowl having a first gap with the first bowl, and a third bowl having a second gap with the second bowl, and the scattering prevention module is configured to allow the chemical liquid scattered from the substrate to flow into one of the first gap and the second gap or is configured to guide the chemical liquid to flow to a separate location other than the bowl.

11. The apparatus of claim 2 , wherein the movable portion is provided as a plurality of neighboring members on the body portion.

12. The apparatus of claim 11 , wherein the neighboring members of the movable portion are arranged at least partially overlapping each other and perform the variable movement.

13. The apparatus of claim 2 , wherein the support portion is provided in plurality at a lower portion of the body portion and the chemical liquid guided by the movable portion is discharged to pass through the body portion and the base portion.

14. An apparatus for processing a substrate, comprising:
a base portion capable of horizontal rotation;
a holding module located on the base portion and configured to hold a substrate;
a nozzle module located above the base portion and configured to jet a chemical liquid onto the substrate on the holding module; and
a scattering prevention module located on the base portion at a peripheral portion of the holding module and configured to, when the chemical liquid is scattered after being jetted onto the substrate, guide the scattered chemical liquid to be discharged by a variable movement of the scattering prevention module being moved inwardly or outwardly by a centrifugal force due to the horizontal rotation,
wherein:
the scattering prevention module includes a support portion supported on the base portion, a body portion provided on the peripheral portion of the holding module via the support portion, and a movable portion provided at an upper portion of the body portion and configured to be movable inwardly or outwardly to perform the variable movement,
the movable portion performs the variable movement based on rotation between an internal side and an outer side of the body portion and the centrifugal force, wherein a degree to which the chemical liquid is scattered from the substrate is increased in response to a rotation speed of the base portion,
a degree of the variable movement of the movable portion is increased in response to the rotation speed of the base portion,
the movable portion is formed in a shape rounded outwardly,
the movable portion further includes a first movable member directly interlocked with the base portion and a second movable member rotatably provided at an upper portion of the first movable member and configured to perform the variable movement based on the centrifugal force, and
the movable portion includes a third movable member rotatably provided at an upper portion of the second movable member and configured to perform the variable movement based on the centrifugal force.

15. The apparatus of claim 1 , wherein the movable portion of the scattering prevention module is configured to be movable inwardly or outwardly by the rotational force of the base portion such that a height of the scattering prevention module is changeable depending on the variable movement of the movable portion of the scattering prevention module being moved inwardly or outwardly.

16. The apparatus of claim 14 , wherein the movable portion of the scattering prevention module is configured to be movable inwardly or outwardly by the rotational force of the base portion such that a height of the scattering prevention module is changeable depending on the variable movement of the movable portion of the scattering prevention module being moved inwardly or outwardly.

Assignees

• Semes Co Ltd

Inventors

• Hong Yun Hwa

Classifications

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/7604

  the wafers being placed on a susceptor, stage or support · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/0424 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• B08B3/022 Primary

  Cleaning travelling work (B08B3/042 takes precedence) · CPC title