Paddle, processing apparatus having the paddle, and method of producing the paddle

Patent metadata

Field	Value
Publication number	US-11891715-B2
Application number	US-202117177500-A
Country	US
Kind code	B2
Filing date	Feb 17, 2021
Priority date	Feb 20, 2020
Publication date	Feb 6, 2024
Grant date	Feb 6, 2024

Abstract

A paddle capable of reducing an influence of blocking the electric field and capable of improving its mechanical strength is disclosed. The paddle, which is configured to agitate a processing liquid in a processing tank by moving in the processing tank, includes a plurality of agitating beams that form a honeycomb structure. The honeycomb structure has a plurality of hexagonal through-holes formed by the plurality of agitating beams.

First claim

What is claimed is:

1. A paddle for agitating an electroplating liquid in an electroplating tank, comprising:
a frame comprising a top portion configured to be reciprocated in the electroplating liquid by a reciprocating mechanism;
a plurality of agitating beams coupled to the frame, the plurality of agitating beams forming a honeycomb structure, the honeycomb structure having a plurality of hexagonal through-holes formed by the plurality of agitating beams, an arrangement direction of the plurality of hexagonal through-holes being inclined with respect to a longitudinal direction of the frame, wherein the agitating beams of the paddle cause the agitation of the electroplating liquid when moved in the electroplating tank by the reciprocating mechanism.

2. The paddle according to claim 1 , wherein each of the plurality of agitating beams is inclined with respect to a direction of movement of the paddle or perpendicular to the direction of movement of the paddle when the frame is moved in the electroplating tank by the reciprocating mechanism.

3. The paddle according to claim 1 , wherein the plurality of hexagonal through-holes comprise a plurality of regular hexagonal through-holes.

4. The paddle according to claim 1 , wherein a percentage of a width of the plurality of agitating beams to an arrangement pitch of the plurality of hexagonal through-holes is less than 10%.

5. The paddle according to claim 1 , wherein a width of the plurality of agitating beams is in a range of 0.5 mm to 3.0 mm.

6. The paddle according to claim 1 , wherein an arrangement pitch of the plurality of hexagonal through-holes is in a range of 5 mm to 23 mm.

7. The paddle according to claim 1 , wherein the arrangement direction of the plurality of hexagonal through-holes is inclined with respect to a direction of movement of the paddle when the frame is moved in the electroplating tank by the reciprocating mechanism.

8. The paddle according to claim 7 , wherein:
the movement of the paddle is a reciprocating motion of the paddle; and
tan θ is equal to n(H/2)/T, where θ represents an angle of the arrangement direction of the hexagonal through-holes with respect to the direction of the reciprocating motion of the paddle, T represents a length of one stroke of the reciprocating motion of the paddle, H represents a height of each hexagonal through-hole, and n represents a natural number.

9. The paddle according to claim 1 wherein the agitating beams of the paddle are configured to cause the agitation of the electroplating liquid when the frame is moved in a direction parallel to a face of the frame in the electroplating tank by the reciprocating mechanism.

10. The paddle according to claim 1 , wherein the paddle has a rectangular shape, and the frame forms an upper side of the rectangular shape.

11. The paddle according to claim 1 , wherein an angle of the arrangement direction of the hexagonal through-holes with respect to the longitudinal direction of the flame is less than 90 degrees.

12. The paddle according to claim 1 , wherein the frame extends horizontally.

13. The paddle according to claim 1 , wherein:
the movement of the paddle is a reciprocating motion of the paddle; and
tan θ is equal to n(H/2)/T, where θ represents an angle of the arrangement direction of the hexagonal through-holes with respect to the longitudinal direction of the flame, T represents a length of one stroke of the reciprocating motion of the paddle, H represents a height of each hexagonal through-hole, and n represents a natural number.

Assignees

• Ebara Corp

Inventors

• Masuda Yasuyuki
• Chang Shao Hua
• Mukaiyama Yoshitaka
• Shimoyama Masashi
• Fujikata Jumpei

Classifications

• C25D21/10 Primary

  Agitating of electrolytes; Moving of racks · CPC title

• B33Y10/00

  Processes of additive manufacturing · CPC title

• B33Y50/02

  for controlling or regulating additive manufacturing processes · CPC title

• B33Y80/00 Primary

  Products made by additive manufacturing · CPC title

• C25D17/02

  Tanks; Installations therefor · CPC title