Processing apparatus

Patent metadata

Field	Value
Publication number	US-11890711-B2
Application number	US-202117453073-A
Country	US
Kind code	B2
Filing date	Nov 1, 2021
Priority date	Nov 19, 2020
Publication date	Feb 6, 2024
Grant date	Feb 6, 2024

Abstract

There is provided a processing apparatus including a holding table having a holding surface for holding thereon a workpiece with a plurality of devices formed in respective areas demarcated on a face side of the workpiece by a plurality of projected dicing lines, a processing unit that processes the workpiece held on the holding table, an image capturing unit that captures an image of the workpiece held on the holding table, a moving unit that moves the holding table relatively to the processing unit and the image capturing unit in horizontal directions along the holding surface, a touch panel that displays thereon the image captured by the image capturing unit, and a control unit. The control unit detects a line in an image positioned within an allowable region based on a contact line traced on the image displayed on the touch panel and registers the detected line.

First claim

What is claimed is:

1. A processing apparatus comprising:
a holding table having a holding surface for holding thereon a workpiece with a plurality of devices formed in respective areas demarcated on a face side of the workpiece by a plurality of projected dicing lines;
a processing unit that processes the workpiece held on the holding table;
an image capturing unit that captures an image of the workpiece held on the holding table;
a moving unit that moves the holding table relatively to the processing unit and the image capturing unit in horizontal directions along the holding surface;
a touch panel that displays thereon the image captured by the image capturing unit, wherein the image captured by the image capturing unit includes a contour corresponding to edges of the image; and
a control unit that detects a line in the image based on whether points on the contour of the image are positioned within a plurality of allowable regions on a contact line traced on the image displayed on the touch panel and registers the detected line, wherein each of the plurality of allowable regions is a region around a position on the contact line;
wherein the line in the image represents one of the projected dicing lines or a processed groove formed in the workpiece by the processing unit in the image displayed on the touch panel, and
wherein the control unit registers the line in the image as an image capturing route along which the image capturing unit that captures an image of the workpiece is to be moved relatively to the holding table.

2. The processing apparatus according to claim 1 , wherein:
the line in the image represents a pattern that indicates one of the devices in the image displayed on the touch panel, and
the control unit registers the pattern corresponding to the detected line, as a key pattern acting as a mark for detecting one of the projected dicing lines.

3. The processing apparatus according to claim 1 , wherein the contact line is a trajectory of a contacting object tracing the image displayed of the touch panel.

4. The processing apparatus according to claim 1 , wherein the control unit calculates a proportion of the points on the contour of the image which are not within one of the plurality of allowable regions, and determines whether the contour is the line on the image based on whether the proportion is greater than a threshold value.

5. The processing apparatus according to claim 1 , wherein the at least one allowable region has a circular shape.

Assignees

• Disco Corp

Inventors

• Omori Takafumi

Classifications

• H10P72/0428 Primary

  Apparatus for mechanical treatment or grinding or cutting · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/53

  using optical controlling means · CPC title

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title