Evaporation method, evaporation mask assembly, display panel and display device

Patent metadata

Field	Value
Publication number	US-11889743-B2
Application number	US-201916960672-A
Country	US
Kind code	B2
Filing date	Dec 25, 2019
Priority date	Jan 22, 2019
Publication date	Jan 30, 2024
Grant date	Jan 30, 2024

Abstract

The present disclosure discloses an evaporation method, an evaporation mask assembly, a display panel and a display device, which can reduce the complexity of the manufacturing process of the display panel and improve the yield of the display panel. The evaporation method may comprise: performing a first evaporation on a base substrate by using a first mask to form a first evaporation sub-pattern on the base substrate, wherein the first mask has a first opening area; and performing a second evaporation on the base substrate by using a second mask to form a second evaporation sub-pattern on the base substrate, wherein the second mask has a second opening area; wherein the combination of the first and second evaporation sub-patterns forms an evaporation pattern.

First claim

What is claimed is:

1. An evaporation method, comprising:
performing a first evaporation on a base substrate by using a first mask to form a first evaporation sub-pattern on the base substrate, wherein the first mask has a first opening area; and
performing a second evaporation on the base substrate by using a second mask to form a second evaporation sub-pattern on the base substrate, wherein the second mask has a second opening area;
wherein a combination of the first and second evaporation sub-patterns forms an evaporation pattern;
wherein the first and second evaporation sub-patterns constitute complementary patterns; and
wherein the first and second evaporation sub-patterns are able to form an evaporation layer having an isolated hollow pattern.

2. The evaporation method according to claim 1 , wherein the evaporation pattern formed by the combination of the first and second evaporation sub-patterns corresponds to a display region having an isolated hollow pattern.

3. The evaporation method according to claim 1 , wherein a vertical projection of the first mask on the base substrate when the first evaporation is performed and a vertical projection of the second mask on the base substrate when the second evaporation is performed have overlapping portions, the overlapping portions are associated with the first opening area and the second opening area respectively.

4. The evaporation method according to claim 3 , wherein the evaporation pattern formed by the combination of the first and second evaporation sub-patterns has an isolated opening, and at least a part of the isolated opening corresponds to the overlapping portions.

5. The evaporation method according to claim 1 , wherein an evaporation angle of an evaporation source corresponding to the first mask when the first evaporation is performed is different from an evaporation angle of the evaporation source corresponding to the second mask when the second evaporation is performed.

6. The evaporation method of claim 1 , further comprising:
performing a third evaporation on the base substrate with a third mask to form a third evaporation sub-pattern on the base substrate, wherein the third mask has a third opening area;
wherein the combination of the first, second and third evaporation sub-patterns forms the evaporation pattern.

7. A display panel comprising a base substrate and an evaporation film layer formed on the base substrate, wherein the evaporation film layer is formed by adopting the evaporation method according to claim 1 .

8. The display panel according to claim 7 , wherein the evaporation film layer comprises one or more of: a light emitting layer, an electron transport layer, or a hole transport layer.

9. The display panel according to claim 7 , wherein the evaporation film layer has at least one isolated hollow pattern.

10. A display device comprising the display panel according to claim 7 .

11. The display device according to claim 10 , wherein the evaporation film layer comprises one or more of: a light emitting layer, an electron transport layer, or a hole transport layer.

12. The display device according to claim 10 , wherein the evaporation film layer has at least one isolated hollow pattern.

Assignees

• Chengdu Boe Optoelect Tech Co
• Boe Technology Group Co Ltd

Inventors

• Hu Xuwu
• Liu Yangsheng
• Kong Mengxia
• Si Donghui
• Mou Shan
• Cui Yan
• Wang Yu

Classifications

• H10K71/166 Primary

  using selective deposition, e.g. using a mask · CPC title

• C23C14/042 Primary

  using masks · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• H10K71/164

  using vacuum deposition · CPC title