Inertial sensor sensing of vibration frequency

Patent metadata

Field	Value
Publication number	US-11879906-B2
Application number	US-202117530125-A
Country	US
Kind code	B2
Filing date	Nov 18, 2021
Priority date	Nov 18, 2021
Publication date	Jan 23, 2024
Grant date	Jan 23, 2024

Abstract

A modified version of a MEMS self-test procedure is presented that can be used to detect the amplitude and frequency of an external vibration from an ambient environment. The method implements processing circuitry that correlates an output sense signal, s(t), with a plurality of periodic signal portions and a plurality of shifted periodic signal portions to generate a plurality of correlation values. A frequency associated with the external vibration is determined based on the plurality of correlation values.

First claim

What is claimed is:

1. A method for identifying a frequency of an external vibration by a microelectromechanical system (MEMS) inertial sensor, comprising:
generating, by processing circuitry of the MEMS inertial sensor, a frequency scan signal pattern comprising a plurality of periodic signal portions each having a test frequency;
sensing, by one or more sense electrodes of the inertial sensor, a movement of a proof mass of the inertial sensor over a period of time;
generating, by the processing circuitry of the inertial sensor, a sense signal based on the sensed movement of the proof mass over the period of time;
correlating, by the processing circuitry, the sense signal with the frequency scan signal pattern;
generating, by the processing circuitry, a plurality of correlation values based on the correlating, wherein each of the plurality of correlation values is based on a correlation of the sense signal with one of the plurality of periodic signal portions; and
identifying, by the processing circuitry, a frequency associated with the sense signal based on one or more of the generated plurality of correlation values.

2. The method of claim 1 , further comprising providing the frequency scan signal pattern to one or more self-test drive electrodes of the inertial sensor, wherein the one or more self-test drive electrodes drive the proof mass of the inertial sensor in accordance with the frequency scan signal pattern, and wherein the sensed movement of the proof mass is based at least in part on the movement of the proof mass due to the frequency scan signal pattern.

3. The method of claim 2 , wherein, in the absence of the external vibration, the generated correlation values are approximately equal, and wherein in the presence of the external vibration at the frequency, one or more generated correlation values associated with the frequency exceed the other correlation values by at least a threshold.

4. The method of claim 2 , further comprising delaying the frequency scan signal pattern before the correlation, and wherein the delay corresponds to a propagation time from providing the frequency scan signal pattern to the self-test drive electrodes to the generation of the sense signal.

5. The method of claim 1 , wherein the frequency scan signal pattern comprises a first frequency scan signal pattern and wherein the generated plurality of correlation values comprise a first plurality of correlation values, further comprising:
generating a second frequency scan signal pattern comprising a 90 degree phase shifted version of the first frequency scan signal pattern;
correlating the sense signal with the second frequency scan signal pattern;
generating a second plurality of correlation values based on the correlating with the second frequency scan signal pattern, wherein each of the plurality of correlation values is based on a correlation of the sense signal with the second frequency scan signal pattern; and
identifying the frequency associated with the sense signal based on the first plurality of correlation values and the second plurality of correlation values.

6. The method of claim 5 , wherein the identifying comprises:
averaging the first plurality of correlation values and the second plurality of correlation values to create an averaged plurality of correlation values; and
determining the frequency associated with the sense signal based on the averaged plurality of correlation values.

7. The method of claim 6 , wherein the averaging comprises:
squaring each of the first plurality of correlation values;
squaring each of the second plurality of correlation values;
adding associated squares of the first plurality of correlation values and the second plurality of correlation values; and
taking the square root of each of the added associated squares.

8. The method of claim 1 , wherein the frequency scan signal pattern comprises a plurality of signal amplitudes.

9. The method of claim 8 , wherein the plurality of signal amplitudes approximates a waveform.

10. The method of claim 9 , wherein the waveform is a sinusoid.

11. The method of claim 1 , wherein the identifying comprises identifying a plurality of odd harmonics and selecting a base frequency associated with the odd harmonics as the frequency.

12. The method of claim 1 , wherein the identifying comprises identifying a plurality of generated correlation values that exceed a threshold and interpolating the frequency based on the plurality of correlation values that exceed the threshold.

13. The method of claim 1 , wherein the inertial sensor is a gyroscope and the frequency is the frequency of a rotational force.

14. The method of claim 1 , wherein the inertial sensor is an accelerometer and the frequency is the frequency of a linear acceleration.

15. The method of claim 1 , wherein the plurality of periodic signal portions comprises square pulse trains.

16. The method of claim 1 , wherein the plurality of periodic signal portions comprises approximately sinusoidal pulse trains.

17. A microelectromechanical system (MEMS) inertial sensor, comprising:
a frequency scan generator that generates a frequency scan signal pattern, wherein the frequency scan signal pattern comprises a plurality of periodic signal portions each having a test frequency;
a proof mass that responds to an inertial force;
one or more sense electrodes that sense a movement of the proof mass;
sense circuitry coupled to the proof mass, wherein the sense circuitry is configured to generate a sense signal based on the sensed movement of the proof mass detected by the one or more sense electrodes; and
processing circuitry coupled to the sense circuitry; wherein the processing circuitry is configured to receive the sense signal generated by the sense circuitry, correlate the sense signal with the plurality of periodic signal portions to determine a plurality of correlation values, and identify a frequency associated with the sense signal based on one or more of the generated plurality of correlation values.

18. The inertial sensor of claim 17 , further comprising one or more self-test drive electrodes, wherein the one or more self-test drive electrodes receive the frequency scan signal pattern and drive the proof mass of the inertial sensor in accordance with the frequency scan signal pattern, and wherein the sensed movement of the proof mass is based at least in part on the movement of the proof mass due to the frequency scan signal pattern.

19. The inertial sensor of claim 18 , wherein, in the absence of an external vibration, the generated correlation values are approximately equal, and wherein in the presence of the external vibration at the frequency, one or more generated correlation values associated with the frequency exceed the other correlation values by at least a threshold.

20. The inertial sensor of claim 18 , further comprising a delay element configured to delay the frequency scan signal pattern before the correlation, and wherein the delay corresponds to a propagation time from providing the frequency scan signal pattern to the self-test drive electrodes to the generation of the sense signal.

21. A method for monitoring a suspended spring-mass system and identifying a frequency of an external vibration by a microelectromechanical system (MEMS) inertial sensor, comprising:
generating, by processing circuitry of the MEMS inertial sensor, a frequency scan signal pattern comprising a plurality of periodic signal portions each having a test frequency;

Assignees

• Invensense Inc

Inventors

• Pellegrini Aurelio

Classifications

• G01P15/125 Primary

  by capacitive pick-up · CPC title

• G01C19/5712

  the devices involving a micromechanical structure · CPC title

• G01P1/00

  Details of instruments · CPC title

• G01D1/02

  giving mean values, e.g. root means square values (measuring root mean square values of currents or voltages G01R19/02) · CPC title

• G01D1/08

  over fixed periods of time · CPC title