MEMS electrostatic capacitor type acceleration sensor

Patent metadata

Field	Value
Publication number	US-11169174-B2
Application number	US-201916551206-A
Country	US
Kind code	B2
Filing date	Aug 26, 2019
Priority date	Aug 29, 2018
Publication date	Nov 9, 2021
Grant date	Nov 9, 2021

Abstract

In a MEMS electrostatic capacitor type acceleration sensor, the manufacturing costs of MEMS elements are reduced, and at the same time, the variations of the electrical and mechanical characteristics of the MEMS elements are reduced. A detection circuit generates a voltage signal corresponding to the product of a difference between the two capacitance values of a pair of MEMS capacitors and a servo signal. A modulation circuit outputs a signal corresponding to the difference between the capacitance values using the servo signal. The control circuit outputs the servo signal on the basis of a signal corresponding to the difference between the capacitance values.

First claim

What is claimed is:

1. A MEMS electrostatic capacitor type accelerator sensor comprising:
a pair of MEMS capacitors including a movable electrode, a first fixed electrode, and a second fixed electrode;
a detection circuit connected to the movable electrode;
a demodulation circuit connected to the detection circuit;
a control circuit that is connected to the demodulation circuit and outputs a binary servo signal; and
a delay device connected to the demodulation circuit,
wherein a voltage signal based on the servo signal output by the control circuit is applied to the first fixed electrode, a voltage signal based on a signal obtained by logically reversing the servo signal is applied to the second fixed electrode, and an electrostatic force, which balances with an inertial force generated on the movable electrode by applying an acceleration signal and the direction of which is opposite to a direction of the inertial force, is generated on the movable electrode,
the detection circuit generates a voltage signal corresponding to the product of a difference between two capacitance values of the pair of the MEMS capacitors and the servo signal,
the demodulation circuit outputs a signal corresponding to the difference between the capacitance values using the servo signal,
the control circuit outputs the servo signal on the basis of a signal corresponding to the difference between the capacitance values,
the servo signal is delayed by the delay device by a time, and
the time is equal to a delay time, the delay time being when a charge signal is sent from the pair of MEMS capacitors to the detection circuit.

2. The MEMS electrostatic capacitor type acceleration sensor according to claim 1 , wherein the demodulation circuit executes multiplication.

3. The MEMS electrostatic capacitor type acceleration sensor according to claim 1 , wherein the demodulation circuit executes correlation calculation.

4. The MEMS electrostatic capacitor type acceleration sensor according to claim 1 ,
wherein the delay device provided between the control circuit and the demodulation circuit, and
wherein the servo signal output by the control circuit is applied to the demodulation circuit via the delay device.

5. The MEMS electrostatic capacitor type acceleration sensor according to claim 1 ,
wherein the control circuit includes a PID control circuit and a 1-bit quantizer connected to the PID control circuit, and
the 1-bit quantizer outputs the servo signal.

6. The MEMS electrostatic capacitor type acceleration sensor according to claim 1 , wherein the control circuit includes a PID control circuit and a delta-sigma modulator connected to the PID control circuit, and the delta-sigma modulator outputs the servo signal.

7. The MEMS electrostatic capacitor type acceleration sensor according to claim 6 , further comprising an adder provided between the demodulation circuit and the PID control circuit.

8. The MEMS electrostatic capacitor type acceleration sensor according to claim 1 ,
wherein the detection circuit includes:
a C/V conversion amplifier composed of an operational amplifier, a capacitance element, and a resistance element;
a lowpass filter connected to an output of the C/V conversion amplifier; and
an A/D converter connected to an output of the lowpass filter.

9. The MEMS electrostatic capacitor type acceleration sensor according to claim 1 ,
wherein the detection circuit includes:
a C/V conversion amplifier composed of an operational amplifier, a capacitance element, and a resistance element;
a highpass filter connected to an output of the C/V conversion amplifier; and
an A/D converter connected to an output of the highpass filter.

10. The MEMS electrostatic capacitor type acceleration sensor according to claim 1 , further comprising a highpass filter connected to the control circuit,
wherein the demodulation circuit outputs a signal corresponding to the difference between the two capacitance values using a signal obtained by processing the servo signal by means of the highpass filter.

11. The MEMS electrostatic capacitor type acceleration sensor according to claim 1 , further comprising a third fixed electrode and a fourth fixed electrode,
wherein a first DC potential is applied to the third fixed electrode and a second DC potential is applied to the fourth fixed electrode, so that an electrostatic force, a direction of which is opposite to a direction of a gravitational force exerted on the movable electrode, is generated on the movable electrode.

12. The MEMS electrostatic capacitor type acceleration sensor according to claim 1 ,
wherein, on a condition that a gravitational force is not applied to the movable electrode, a first distance between the first fixed electrode and the movable electrode and a second distance between the second fixed electrode and the movable electrode are different from each other.

13. The MEMS electrostatic capacitor type acceleration sensor according to claim 1 ,
wherein a first area of the first fixed electrode and a second area of the second fixed electrode are different from each other.

14. A MEMS electrostatic capacitor type accelerator sensor comprising:
a first pair of MEMS capacitors including a movable electrode, a first fixed electrode, and a second fixed electrode;
a second pair of MEMS capacitors including the movable electrode, a third fixed electrode, and a fourth electrode;
a detection circuit connected to the movable electrode;
a first demodulation circuit connected to the detection circuit;
a second demodulation circuit connected to the detection circuit;
a first control circuit that is connected to the first demodulation circuit and outputs a first binary servo signal;
a second control circuit that is connected to the second demodulation circuit and outputs a second binary servo signal; and
a delay device connected to the demodulation circuit,
wherein a voltage signal based on the first servo signal output by the first control circuit is applied to the first fixed electrode, a voltage signal based on a signal obtained by logically reversing the first servo signal is applied to the second fixed electrode, and an electrostatic force, which balances with an inertial force generated on the movable electrode by applying an acceleration signal in a first axis direction and a direction of which is opposite to a direction of the inertial force, is generated on the movable electrode,
a voltage signal based on the second servo signal output by the second control circuit is applied to the third fixed electrode, a voltage signal based on a signal obtained by logically reversing the second servo signal is applied to the fourth fixed electrode, an electrostatic force, which balances with an inertial force generated on the movable electrode by applying an acceleration signal in a second axis direction, which is different from the first axis direction, and the direction of which is opposite to the direction of the inertial force, is generated on the movable electrode,
the detection circuit generates a first voltage signal corresponding to the product of a difference between two first capacitance values of the first pair of the MEMS capacitors and the first servo signal, and a second voltage signal corresponding to the product of a difference between two second capacitance values of the second pair of the MEMS capacitors and the second servo signal,
the first demodulation circuit outputs a signal corresponding to the difference between the two first capacitance values of the first pair of MEMS capacitors using the first servo signal,
the second demodulation circuit outputs a

Assignees

• Hitachi Ltd

Inventors

• Oshima Takashi
• Furubayashi Yuki

Classifications

• G01P15/125 Primary

  by capacitive pick-up · CPC title

• G01P2015/0865

  using integrated signal processing circuitry · CPC title

• G01P15/13

  by measuring the force required to restore a proofmass subjected to inertial forces to a null position · CPC title

• G01P15/131

  with electrostatic counterbalancing means · CPC title