Optoelectromechanical switch and programming an optical network

Patent metadata

Field	Value
Publication number	US-11874504-B2
Application number	US-202117490841-A
Country	US
Kind code	B2
Filing date	Sep 30, 2021
Priority date	Jul 30, 2020
Publication date	Jan 16, 2024
Grant date	Jan 16, 2024

Abstract

Disclosed is an optoelectromechanical switch that includes: an optical feedline disposed on an isolation substrate that receives resonator light that is subject to optical communication to a resonator when a cavity length of the resonator supports an electromagnetic mode at the wavelength of the resonator light; a resonator including: a low refractive index optical layer and receives substrate electrical counter potential; a non-conductive spacer; the electrically conductive membrane and that receives a membrane electrical potential and deflects toward and away from the electrically conductive high-index optical waveguide based on a difference in potential between the membrane electrical potential and the substrate electrical counter potential; the cavity length that is variable and under electromechanical control.

First claim

What is claimed is:

1. An optoelectromechanical switch for programming an optical network, the optoelectromechanical switch comprising:
an isolation substrate;
an optical feedline disposed on the isolation substrate in optical communication with an electrically conductive high-index optical waveguide and that receives resonator light that is subject to optical communication to a resonator when a cavity length of the resonator supports an electromagnetic mode at the wavelength of the resonator light;
a resonator comprising:
a low refractive index optical layer disposed on the isolation substrate, comprising an electrically conductive high-index optical waveguide that:
receives the resonator light from optical feedline when the cavity length of the resonator supports an electromagnetic mode at the wavelength of the resonator light,
does not receive the resonator light from optical feedline when the cavity length of the resonator does not support an electromagnetic mode at the wavelength of the resonator light, and
receives substrate electrical counter potential to be electrically biased at the substrate electrical counter potential;

a non-conductive spacer disposed on the low refractive index optical layer and that spaces apart the electrically conductive high-index optical waveguide from an electrically conductive membrane to provide a cavity length of the resonator;
the electrically conductive membrane disposed on the non-conductive spacer, such that that non-conductive spacer is interposed between the low refractive index optical layer and the electrically conductive membrane, such that the electrically conductive membrane:
receives a membrane electrical potential to be electrically biased at the membrane electrical potential, and
deflects toward and away from the electrically conductive high-index optical waveguide based on a difference in potential between the membrane electrical potential and the substrate electrical counter potential;

the cavity length that is variable and under electromechanical control of the deflection of the electrically conductive membrane based on the difference between the membrane electrical potential and the substrate electrical counter potential.

2. The optoelectromechanical switch of claim 1 , further comprising a power source in communication with the low refractive index optical layer and the electrically conductive membrane and that provides the membrane electrical potential to the electrically conductive membrane and the substrate electrical counter potential to the low refractive index optical layer.

3. The optoelectromechanical switch of claim 2 , further comprising a counter electrode disposed on the isolation substrate and in electrical communication with the low refractive index optical layer and that receives the substrate electrical counter potential and communicates the substrate electrical counter potential to the low refractive index optical layer.

4. The optoelectromechanical switch of claim 1 , wherein the electrically conductive membrane comprises a plasmonic metal.

5. The optoelectromechanical switch of claim 4 , wherein the plasmonic metal comprises gold, copper, silicon, aluminum, or tin.

6. The optoelectromechanical switch of claim 1 , wherein the low refractive index optical layer comprises silicon.

7. The optoelectromechanical switch of claim 1 , wherein the resonator is configured as a ring resonator, linear resonator, or a phase shifter.

8. The optoelectromechanical switch of claim 1 , wherein the optical feedline comprises a high-k dielectric.

9. The optoelectromechanical switch of claim 1 , further comprising a conductive two-dimensional electrode disposed on the low refractive index optical layer and that receives the substrate electrical counter potential and capacitively couples to the electrically conductive membrane.

10. The optoelectromechanical switch of claim 9 , further comprising a high-k member disposed on the conductive two-dimensional electrode and interposed between the conductive two-dimensional electrode and the electrically conductive membrane.

11. A process for programming an optical network with the optoelectromechanical switch of claim 1 , the process comprising:
receiving, by the optical feedline, resonator light;
electrically biasing the low refractive index optical layer at the substrate electrical counter potential;
electrically biasing the electrically conductive membrane at the membrane electrical potential;
changing the cavity length based on the potential difference between the membrane electrical potential of the electrically conductive membrane and the substrate electrical counter potential of the low refractive index optical layer; and
optically communicating the resonator light from the optical feedline to the resonator when the cavity length of the resonator supports an electromagnetic mode at the wavelength of the resonator light.

Assignees

• Government Of The Us Secretary Of Commerce

Inventors

• Aksyuk Vladimir Anatolyevich
• Haffner Christian
• Lezec Henri J
• Joerg Andreas
• Mazur Mikael
• Chelladurai Daniel
• Leuthold Jueg

Classifications

• H04J14/0212

  using optical switches or wavelength selective switches [WSS] · CPC title

• G02B6/3536 Primary

  involving evanescent coupling variation, e.g. by a moving element such as a membrane which changes the effective refractive index (mode converters G02B6/14; adjustable lateral coupling between waveguides G02B6/283; electro- optical refractive index variations G02F1/0118) · CPC title

• G02B6/29341

  Loop resonators operating in a whispering gallery mode evanescently coupled to a light guide, e.g. sphere or disk or cylinder (evanescent coupling for sensing fluorescence G01N21/648) · CPC title

• G02B6/357

  Electrostatic force (electrostatic forces controlling reflecting elements in general G02B26/0841) · CPC title

• G02F1/295 Primary

  {Analog deflection from or} in an optical waveguide structure] · CPC title