Controllable diamond waveguide tuner

Patent metadata

Field	Value
Publication number	US-10976493-B2
Application number	US-201415119824-A
Country	US
Kind code	B2
Filing date	Apr 30, 2014
Priority date	Apr 30, 2014
Publication date	Apr 13, 2021
Grant date	Apr 13, 2021

Abstract

An example device in accordance with an aspect of the present disclosure includes a diamond waveguide disposed on a substrate. The substrate includes a dielectric material. A tuner is to extend from the substrate, and is disposed at least in part over the waveguide. The tuner includes a tuner electrode to control a variable distance between the tuner and the waveguide to vary an effective refractive index of the waveguide.

First claim

What is claimed is:

1. A device comprising:
a diamond waveguide disposed on a substrate comprised of a dielectric material;
a tuner extending from the substrate such that a portion of the tuner is attached to the substrate, the tuner being disposed at least in part over the waveguide; and
a first tuner electrode and a second tuner electrode disposed on the tuner such that at least a portion of the tuner is sandwiched between the first and second tuner electrodes and configured to control a variable distance between the tuner and the waveguide to vary an effective refractive index of the waveguide based on a first voltage/charge polarity applied to the first tuner electrode and a second voltage/charge polarity applied to the second tuner electrode, wherein both the first tuner electrode and second turner electrode are spaced from the substrate.

2. The device of claim 1 , wherein the tuner is a cantilever arm that includes a non-biased position toward the waveguide, and the tuner is movable away from the waveguide based on the second tuner electrode.

3. The device of claim 1 , wherein the tuner is a cantilever arm that includes a non-biased position away from the waveguide, and the tuner is movable toward the waveguide based on the first tuner electrode.

4. The device of claim 1 , wherein the tuner is movable based on the second tuner electrode in a direction opposing movement caused by the first tuner electrode.

5. The device of claim 4 , further comprising a substrate electrode disposed on the substrate corresponding to the first tuner electrode, and a second substrate electrode disposed on the substrate corresponding to the second tuner electrode.

6. The device of claim 1 , wherein the first tuner electrode is disposed on a surface of the tuner facing toward the waveguide.

7. The device of claim 1 , wherein the second tuner electrode is disposed on a surface of the tuner facing away from the waveguide.

8. The device of claim 1 , wherein the first or second tuner electrodes are disposed at a tuner electrode layer within the tuner.

9. The device of claim 8 , wherein the tuner includes another material having a substantially higher refractive index than the diamond waveguide, to provide a wide range of tuning for the effective refractive index of the waveguide.

10. The device of claim 1 , wherein the waveguide comprises a microring disposed between two waveguides to form an add/drop filter.

11. The device of claim 1 , wherein the waveguide comprises at least one of a first arm and a second arm of a Mach-Zehnder modulator.

Assignees

• Hewlett Packard Entpr Dev Lp

Inventors

• Huang Zhihong
• Santori Charles M
• Liang Di
• Vo Sonny

Classifications

• G02F1/212

  Mach-Zehnder type · CPC title

• G02F1/2255

  controlled by a high-frequency electromagnetic component in an electric waveguide structure · CPC title

• G02B6/122

  Basic optical elements, e.g. light-guiding paths · CPC title

• G02B6/12007

  forming wavelength selective elements, e.g. multiplexer, demultiplexer · CPC title

• G02B6/29382

  including at least adding or dropping a signal, i.e. passing the majority of signals · CPC title