Charged particle beam device

Patent metadata

Field	Value
Publication number	US-11869745-B2
Application number	US-201917435479-A
Country	US
Kind code	B2
Filing date	Mar 27, 2019
Priority date	Mar 27, 2019
Publication date	Jan 9, 2024
Grant date	Jan 9, 2024

Abstract

An object of the invention is to provide a charged particle beam device capable of increasing the contrast of an observation image of a sample as much as possible in accordance with light absorption characteristics that change for each optical parameter. The charged particle beam device according to the invention changes an optical parameter such as a polarization plane of light emitted to the sample, and generates the observation image having a contrast corresponding to the changed optical parameter. An optical parameter that maximizes a light absorption coefficient of the sample is specified according to a feature amount of a shape pattern of the sample (refer to FIG. 5 ).

First claim

The invention claimed is:

1. A charged particle beam device configured to irradiate a sample with a charged particle beam, the charged particle beam device comprising:
a charged particle source configured to irradiate the sample with primary charged particles;
a light source configured to emit light to be emitted to the sample;
a detector configured to detect secondary charged particles generated from the sample by irradiating the sample with the primary charged particles;
an image processing unit configured to generate an observation image of the sample by using the secondary charged particles detected by the detector; and
a light control unit configured to control one or more optical parameters each representing a physical property of the light, wherein
the one or more optical parameters comprises a polarization plane of the light, and
the light control unit causes the image processing unit to generate the observation image having a contrast corresponding to a changed polarization plane obtained by changing the polarization plane of the light.

2. The charged particle beam device according to claim 1 , wherein
the light control unit controls the polarization plane of the light to a first polarization plane to make the sample have a first light absorption coefficient corresponding to the first polarization plane, thereby causing the image processing unit to generate the observation image, and
the light control unit controls the polarization plane of the light to a second polarization plane which is different from the first polarization plane to make the sample have a second light absorption coefficient corresponding to the second polarization plane, thereby causing the image processing unit to generate the observation image.

3. The charged particle beam device according to claim 1 , wherein
the one or more optical parameters further comprises at least one of
an angle formed between the light and a coordinate axis on a horizontal plane when the light is projected on the horizontal plane;
an angle formed between the light and a coordinate axis on a vertical plane when the light is projected on the vertical plane;
a wavelength of the light;
an irradiation cycle of the light; and
an irradiation amount of the light per unit time.

4. The charged particle beam device according to claim 1 , wherein
the image processing unit generates a first observation image of the sample when the light control unit adjusts the changed polarization plane according to a first parameter and generates a second observation image of the sample when the light control unit adjusts the changed polarization plane according to a second parameter,
the image processing unit generates a difference image by obtaining a difference between the first observation image and the second observation image, and
the charged particle beam device further includes a display unit configured to display the difference image.

5. The charged particle beam device according to claim 1 , wherein
the light control unit acquires a histogram of luminance values or a brightness values of respective pixels included in the observation image or a histogram of luminance differences or brightness differences of respective pixel included in the observation image, and
the light control unit adjusts the one or more optical parameters such that a frequency peak interval on the histogram is maximized.

6. The charged particle beam device according to claim 5 , wherein
the light control unit is configured to control a first parameter and a second parameter of one of the one or more optical parameters,
the light control unit acquires, as the histogram, a first histogram when the optical parameter is the first parameter and acquires a second histogram when the optical parameter is the second parameter, and
the light control unit controls the first parameter such that a frequency peak interval on the first histogram is maximized, and controls the second parameter such that a frequency peak interval on the second histogram is maximized.

7. The charged particle beam device according to claim 1 , wherein
the light control unit irradiates the sample with the light at every second time interval that is shorter than a first time interval at which the sample is irradiated with the primary charged particles, and
the light control unit is further configured to control an irradiation amount of the light per unit time by controlling at least one of an average intensity of the light, an irradiation time width of the light, an irradiation cycle of the light, the second time interval, and an irradiation number of the light per unit time.

Assignees

• Hitachi High Tech Corp

Inventors

• SHOUJI Minami
• Tsuno Natsuki
• Ohta Hiroya
• Bizen Daisuke

Classifications

• H01J37/28 Primary

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/222 Primary

  Image processing arrangements associated with the tube · CPC title

• H01J37/224

  Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen · CPC title

• H01J37/226

  Optical arrangements for illuminating the object; optical arrangements for collecting light from the object · CPC title

• H01J37/244

  Detectors; Associated components or circuits therefor · CPC title