Vision system for an automated test system

Patent metadata

Field	Value
Publication number	US-11867749-B2
Application number	US-202017077827-A
Country	US
Kind code	B2
Filing date	Oct 22, 2020
Priority date	Oct 22, 2020
Publication date	Jan 9, 2024
Grant date	Jan 9, 2024

Abstract

An example test system includes test sites that include sockets for testing devices under test (DUTs), pickers for picking DUTs from the sockets or placing the DUTs in the sockets, and a gantry on which the pickers are mounted. The gantry is configured to move the pickers relative to the test sites to position the pickers for picking the DUTs from the sockets or placing the DUTs into the sockets. The test system also includes one or more LASER range finders mounted on the gantry for movement over the DUTs in the sockets and in conjunction with movement of the pickers. A LASER range finder among the one or more LASER rangefinders mounted on the gantry is configured to detect a distance to a DUT placed into a socket.

First claim

What is claimed is:

1. A test system comprising:
test sites comprising sockets for testing devices under test (DUTs);
pickers for picking DUTs from the sockets or placing the DUTs in the sockets;
a gantry on which the pickers are mounted, the gantry being configured to move the pickers relative to the test sites to position the pickers for picking the DUTs from the sockets or placing the DUTs into the sockets;
a camera configured for positioning over a socket and controlled using servo control to capture an image of the socket or of a DUT in the socket; and
a control system to implement the servo control of the camera and to use the image to control placing the DUT in the socket or picking the DUT from the socket;
wherein the camera is a three-dimensional (3D) camera to capture 3D image data representing at least the socket.

2. The test system of claim 1 , further comprising:
one or more LASER range finders mounted on the gantry for movement over DUTs in the sockets and in conjunction with movement of the pickers, a LASER range finder being configured to detect a distance to the DUT placed in the socket.

3. The test system of claim 2 , wherein the LASER range finder comprises a one-dimensional (1D) LASER range finder.

4. The test system of claim 2 , wherein the one or more LASER range finders comprise multiple LASER range finders, and wherein each LASER range finder is mounted on a respective picker.

5. The test system of claim 2 , wherein the LASER range finder is configured to detect distances to the DUT placed in the socket in parallel with movement of the gantry following placement of the DUT into the socket.

6. The test system of claim 2 , wherein the control system is configured to determine a plane of the DUT placed in the socket based on multiple distances detected by the LASER range finder, and to determine whether the DUT has been placed properly in the socket based on the plane of the DUT.

7. The test system of claim 6 , wherein the control system is configured to determine whether or not to place a lid over the socket based on whether the DUT has been placed properly into the socket.

8. The test system of claim 7 , wherein the control system is configured to control movement of the lid to be placed over the socket when the DUT has been placed properly in the socket.

9. The test system of claim 7 , wherein the control system is configured to control the lid not to be placed over the socket when the DUT has been placed improperly in the socket.

10. The test system of claim 1 , further comprising:
a scanner configured to face the sockets and to move over the sockets, the scanner being configured to capture three-dimensional data (3D) representing a structure of at least part of the socket.

11. The test system of claim 10 , wherein the control system is configured to determine a location and an orientation of the socket based on the 3D data.

12. The test system of claim 11 , wherein the control system is configured to determine a plane of the socket, a roll and pitch of the plane, and a height of the plane relative to a base holding the sockets.

13. The test system of claim 12 , wherein the control system is configured to determine Cartesian X, Y, and Z coordinates of the plane and a yaw of the plane.

14. The test system of claim 13 , wherein the control system is configured to determine the Cartesian X, Y, and Z coordinates of the plane and the yaw of the plane based on features associated with the socket.

15. The test system of claim 11 , wherein the control system is configured to control a picker to place the DUT in the socket based on the location and orientation of the socket.

16. The test system of claim 15 , wherein the control system is configured to control the picker to place the DUT in the socket at a precision measured in single-digit microns.

17. The test system of claim 10 , wherein the 3D data comprises a 3D point cloud.

18. The test system of claim 1 , further comprising:
trays comprising cells for holding DUTs to be tested or DUTs that have been tested;
wherein the pickers are configured for picking the DUTs to be tested from the trays and for placing the DUTs that have been tested into the trays;
wherein the gantry is configured to move the pickers relative to the cells to position the pickers for picking the DUTs to be tested or for placing the DUTs that have been tested;
a scanner configured for movement over the trays, the scanner being configured to capture three-dimensional data (3D) representing structures of the trays and presence or absence of DUTs in at least some of the cells; and
wherein the control system is configured to determine, based on the 3D data, which of the cells contains DUTs and whether DUTs in the cells are placed properly.

19. The test system of claim 18 , wherein, for a tray among the trays, the control system is configured to perform a comparison based on 3D data for the tray and a predefined model of the model of the tray.

20. The test system of claim 18 , wherein, for a tray among the trays, the control system is configured to compare a representation of the tray based on the 3D data to a predefined model of the tray.

21. The test system of claim 18 , wherein determining whether a DUT in a cell is placed properly comprises determining whether the DUT in the cell is at a prescribed orientation or with an acceptable tolerance of the prescribed orientation.

22. The test system of claim 18 , wherein the 3D data comprises a 3D point cloud.

23. The test system of claim 18 , the scanner comprises a 3D scanner mounted on a linear motorized axis over the trays.

24. The test system of claim 1 , further comprising:
a scanner configured to face towards the DUT held by a picker controlled to place the DUT in the socket, the scanner being configured to capture three-dimensional data (3D) representing the picker holding the DUT prior to placement of the DUT in the socket; and
wherein the control system is configured to determine, based on the 3D data, whether the DUT is properly oriented for placement in the socket.

25. The test system of claim 24 , wherein the scanner comprises a 3D scanner that is oriented to face upwards toward a bottom of the DUT.

26. The test system of claim 24 , wherein the scanner is a first scanner and the 3D data is first 3D data;
wherein the test system further comprises a second scanner configured for movement over the sockets, the second scanner being configured to capture second 3D data representing a structure of at least part of the socket; and
wherein the control system is configured to control the picker to place the DUT into the socket based on the first 3D data and the second 3D data.

27. The test system of claim 26 , wherein the control system is configured to control the picker to place the DUT into the socket at a precision measured in single-digit microns.

28. The test system of claim 24 , wherein the 3D data comprises Cartesian X, Y, and Z coordinates for the DUT being held by the picker prior to placement in the socket.

29. The test system of claim 28 , wherein the 3D data comprises pitch, yaw, and roll information for the DUT being held by the picker prior to placement in the socket.

30. The test system of claim 24 , wherein the scanner is fixed in place.

31. A test system comprising:
a strobe

Assignees

• Teradyne Inc

Inventors

• Pei Jianfa
• Khalid Adnan
• Campbell Philip Luke
• Bruno Christopher James
• Jones Christopher Croft

Classifications

• G01R31/2863 Primary

  Contacting devices, e.g. sockets, burn-in boards or mounting fixtures (in general G01R1/04) · CPC title

• G01R31/31905

  Interface with the device under test [DUT], e.g. arrangements between the test head and the DUT, mechanical aspects, fixture · CPC title

• G01R31/318307

  computer-aided, e.g. automatic test program generator [ATPG], program translations, test program debugging · CPC title

• G01R31/2867 Primary

  Handlers or transport devices, e.g. loaders, carriers, trays · CPC title

• G01R31/2893

  Handling, conveying or loading, e.g. belts, boats, vacuum fingers (G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H10P72/00) · CPC title