Systems and methods for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures

Patent metadata

Field	Value
Publication number	US-11854792-B2
Application number	US-201816757732-A
Country	US
Kind code	B2
Filing date	Oct 11, 2018
Priority date	Oct 23, 2017
Publication date	Dec 26, 2023
Grant date	Dec 26, 2023

Abstract

A method for treating high aspect ratio (HAR) structures arranged on a surface of a substrate includes a) spin rinsing the surface of the substrate using a first rinsing liquid; b) spinning off the first rinsing liquid from the surface of the substrate; and c) directing a gas mixture containing hydrogen fluoride onto the surface of the substrate after the first rinsing liquid is dispensed.

First claim

What is claimed is:

1. A chamber for treating high aspect ratio (HAR) structures arranged on a surface of a substrate, comprising:
a rotary chuck arranged in the chamber, wherein the chamber is open during processing;
a first nozzle; and
a second nozzle;
a source of a gas mixture containing hydrogen fluoride;
a source of ammonia; and
a controller configured to:
control rotation of the rotary chuck to rotate the substrate;
control the first nozzle to dispense a first rinsing liquid to rinse the surface of the substrate in the chamber as the rotary chuck rotates the substrate while the interior of the chamber is at or near atmospheric pressure; and
control the second nozzle to dispense the gas mixture containing hydrogen fluoride from the source and to direct the gas mixture onto the surface of the substrate in the chamber after the first rinsing liquid is dispensed while interior of the chamber is at or near atmospheric pressure; and
add ammonia to the gas mixture in response to a processing temperature being greater than a predetermined temperature to inhibit formation of ammonium fluoride.

2. The chamber of claim 1 , further comprising
a first liquid dispenser connected to a first rinsing liquid source;
a vapor supply to supply a second reactive component; and
a gas dispenser connected to a gas source and the vapor supply to dispense the gas mixture onto the surface of the substrate.

3. The chamber of claim 2 , further comprising a mixing manifold for mixing the gas mixture containing hydrogen fluoride and the second reactive component.

4. The chamber of claim 1 , wherein the chamber is partially closed during the processing.

5. The chamber of claim 1 , further comprising a vapor supply to supply a solvent vapor, wherein the gas mixture further contains the solvent vapor.

6. The chamber of claim 5 , wherein the solvent vapor is selected from a group consisting of water vapor and alcohol vapor.

7. The chamber of claim 1 , wherein the second nozzle directs the gas mixture containing hydrogen fluoride onto the surface of the substrate after the first rinsing liquid is spun off the substrate.

8. The chamber of claim 1 , wherein the controller is configured to control the second nozzle to direct the gas mixture containing hydrogen fluoride onto the surface of the substrate within 60 seconds after the first rinsing liquid is dispensed.

9. The chamber of claim 1 , further comprising a heater to heat the substrate to a temperature in a range from 20° C. to 400° C.

10. The chamber of claim 1 , further comprising a heater to heat the substrate to a temperature in a range from 50° C. to 150° C.

11. The chamber of claim 1 , wherein the substrate is maintained at a predetermined pressure in a range from 900 hPa to 1100 hPa.

12. The chamber of claim 1 , further comprising a heater to heat the substrate to a temperature greater than 100° C.

13. The chamber of claim 1 , wherein the second nozzle is located in a range from 1 mm to 40 mm from the surface of the substrate.

14. The chamber of claim 1 , wherein the gas mixture is delivered from the second nozzle at a dispense velocity in a range from 1 to 50 m/s.

15. The chamber of claim 1 , wherein the gas mixture is delivered from the second nozzle at a flow rate of 1 to 20 slm.

16. The chamber of claim 1 , wherein a cross-sectional area of an orifice of the second nozzle is in a range from 3 to 30 mm 2 .

17. The chamber of claim 1 , wherein the first and second nozzles comprise first and second scanning nozzles, respectively, the chamber further comprising:
first and second motors coupled to the first and second scanning nozzles, respectively,
wherein the controller is configured to:
control rotation of the rotary chuck to rotate the substrate;
control the first motor to dispense the first rinsing liquid from the first scanning nozzle to rinse the surface of the substrate in the chamber with the interior of the chamber being at or near atmospheric pressure as the rotary chuck rotates the substrate; and
control the second motor to dispense the gas mixture containing hydrogen fluoride from the second scanning nozzle and to direct the gas mixture onto the surface of the substrate in the chamber with the interior of the chamber being at or near atmospheric pressure after the first rinsing liquid is dispensed.

18. The chamber of claim 1 , wherein the predetermined temperature is 100 degrees Celsius.

Assignees

• Lam Res Ag

Inventors

• Dictus Dries
• Lo Ta-Yu

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0436

  mainly by radiation · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0411

  for wet cleaning or washing · CPC title

• H10P70/20 Primary

  Cleaning during device manufacture · CPC title