Semiconductor processing tool

Patent metadata

Field	Value
Publication number	US-11851761-B2
Application number	US-202117301877-A
Country	US
Kind code	B2
Filing date	Apr 16, 2021
Priority date	Apr 16, 2021
Publication date	Dec 26, 2023
Grant date	Dec 26, 2023

Abstract

A chuck vacuum line of a semiconductor processing tool includes a first portion that penetrates a sidewall of a main pumping line of the semiconductor processing tool. The chuck vacuum line includes a second portion that is substantially parallel to the sidewall of the main pumping line and to a direction of flow in the main pumping line. A size of the second portion increases between an inlet end of the second portion and an outlet end of the second portion along the direction of flow in the main pumping line.

First claim

What is claimed is:

1. A method, comprising:
providing a process gas to a process chamber body of a semiconductor processing tool;
applying a vacuum to a chuck provided within the process chamber body, via a chuck vacuum line connected to the chuck, to retain a semiconductor device against the chuck,
wherein the chuck vacuum line comprises:
a first portion that penetrates a sidewall of a main pumping line connected to the process chamber body, and
a second portion that is substantially parallel to the sidewall of the main pumping line and to a direction of flow in the main pumping line,
wherein a size of an outlet end of the second portion is larger than a size of an inlet end of the second portion to prevent buildup of processing byproduct on interior walls of the main pumping line; and

removing the process gas from the process chamber body via the main pumping line and a pump connected to the main pumping line,
wherein the pump and the main pumping line cause the vacuum to be applied to the chuck via the chuck vacuum line.

2. The method of claim 1 , wherein the first portion penetrates the main pumping line at a bend area of the main pumping line, the bend area being an area between an upstream end of a bend in the main pumping line and a location along the main pumping line that is approximately 1.5×R from a downstream end of the bend in the main pumping line, wherein R is a radius of the bend in the main pumping line.

3. The method of claim 1 , wherein the second portion of the chuck vacuum line is substantially centered within the main pumping line.

4. The method of claim 1 , wherein the first portion of the chuck vacuum line penetrates the main pumping line at an angle of approximately 90 degrees.

5. The method of claim 1 , wherein a ratio of the size of the outlet end of the second portion to the size of the inlet end of the second portion is in a range from approximately 1.12 to approximately 1.95.

6. The method of claim 1 , wherein the second portion of the chuck vacuum line has a horn-like shape at the outlet end of the chuck vacuum line.

7. The method of claim 1 , wherein the second portion includes a plurality of openings at or near the outlet end of the second portion.

8. The method of claim 7 , wherein the plurality of openings are symmetrically arranged about a center of a plane corresponding to the outlet end of the second portion.

9. The method of claim 7 , wherein the plurality of openings form at least two concentric rings of openings at or near the outlet end of the second portion.

10. A chuck vacuum line, comprising:
a first portion that penetrates a sidewall of a main pumping line, the chuck vacuum line and the main pumping line being included in a semiconductor processing tool; and
a second portion that is substantially parallel to the sidewall of the main pumping line and to a direction of flow in the main pumping line,
wherein a size of the second portion increases between an inlet end of the second portion and an outlet end of the second portion along the direction of flow in the main pumping line.

11. The chuck vacuum line of claim 10 , wherein the size of the outlet end of the second portion is approximately 1.12 to approximately 1.95 times larger than the size of the inlet end of the second portion.

12. The chuck vacuum line of claim 10 , wherein the second portion of the chuck vacuum line has a horn-like shape at the outlet end of the chuck vacuum line.

13. The chuck vacuum line of claim 10 , wherein the size of the second portion increases in a region at or near the outlet end of the second portion only.

14. The chuck vacuum line of claim 10 , wherein a region at or near the outlet end of the second portion includes a plurality of openings.

15. The semiconductor processing tool of claim 14 , wherein the plurality of openings are distributed around the region at or near the outlet end of the second portion.

16. The semiconductor processing tool of claim 14 , wherein the plurality of openings form at least two rings on sidewalls of the second portion.

17. The chuck vacuum line of claim 10 , wherein the second portion of the chuck vacuum line is arranged at a center of the main pumping line.

18. The chuck vacuum line of claim 10 , wherein the first portion penetrates the main pumping line in an area between an upstream end of a bend in the main pumping line and a location along the main pumping line that is approximately 1.5×R from a downstream end of the bend in the main pumping line, wherein R is a radius of the bend in the main pumping line.

19. A semiconductor processing tool, comprising:
a process chamber body;
a gas inlet line connected to provide a process gas to the process chamber body;
a chuck provided within the process chamber body to support a semiconductor device to be processed by the semiconductor processing tool;
a main pumping line connected to remove the process gas from the process chamber body;
a chuck vacuum line connected to the chuck to apply a vacuum to the chuck to retain the semiconductor device against the chuck, the chuck vacuum line comprising a first portion and a second portion,
wherein the first portion penetrates a sidewall of the main pumping line at a bend area in the main pumping line,
wherein the second portion is substantially parallel to the sidewall of the main pumping line and to a direction of flow in the main pumping line, and
wherein a size of an outlet end of the second portion is larger than a size of an inlet end of the second portion; and

a pump connected to the main pumping line, to cause the process gas to be removed from the process chamber body through the main pumping line, and to cause the vacuum to be applied to the chuck via the chuck vacuum line.

20. The semiconductor processing tool of claim 19 , wherein a region at or near the outlet end of the second portion includes at least two rings of openings to prevent processing byproduct from concentrating at or near the outlet end of the second portion.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Liu Yung-Tsun
• Cheng Kuang-Wei
• Yang Sheng-Chun
• Lee Chih-Tsung
• Ni Chyi-Tsong

Classifications

• H10P72/0462

  characterised by the construction of the processing chambers, e.g. modular processing chambers · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• H10P72/78 Primary

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P72/04

  Apparatus for manufacture or treatment · CPC title

• C23C16/4586 Primary

  Elements in the interior of the support, e.g. electrodes, heating or cooling devices · CPC title