Flow cell package and method for making the same

Patent metadata

Field	Value
Publication number	US-11846580-B2
Application number	US-202117191612-A
Country	US
Kind code	B2
Filing date	Mar 3, 2021
Priority date	Dec 22, 2016
Publication date	Dec 19, 2023
Grant date	Dec 19, 2023

Abstract

A flow cell package includes first and second surface-modified patterned wafers and a spacer layer. The first surface-modified patterned wafer includes first depressions separated by first interstitial regions, a first functionalized molecule bound to a first silane or silane derivative in at least some of the first depressions, and a first primer grafted to the first functionalized molecule in the at least some of the first depressions. The second surface-modified patterned wafer includes second depressions separated by second interstitial regions, a second functionalized molecule bound to a second silane or silane derivative in at least some of the second depressions, and a second primer grafted to the second functionalized molecule in the at least some of the second depressions. The spacer layer bonds at least some first interstitial regions to at least some second interstitial regions, and at least partially defines respective fluidic chambers of the flow cell package.

First claim

What is claimed is:

1. A flow cell package, comprising:
a first surface-modified patterned wafer, consisting of:
first depressions separated by first interstitial regions;
a first functionalized molecule bound to a first silane or a first silane derivative in at least some of the first depressions; and
a first primer grafted to the first functionalized molecule in the at least some of the first depressions;

a second surface-modified patterned wafer, consisting of:
second depressions separated by second interstitial regions;
a second functionalized molecule bound to a second silane or a second silane derivative in at least some of the second depressions; and
a second primer grafted to the second functionalized molecule in the at least some of the second depressions; and

a spacer layer bonding at least some of the first interstitial regions to at least some of the second interstitial regions, wherein the spacer layer at least partially defines respective fluidic chambers of the flow cell package.

2. The flow cell package as defined in claim 1 , wherein:
each one of the respective fluidic chambers includes at least one aligned functionalized depression pair, wherein the at least one aligned functionalized depression pair includes one of the first depressions aligned with one of the second depressions; and
the spacer layer forms longitudinal walls between adjacent fluidic chambers.

3. The flow cell package as defined in claim 1 , wherein at least one of the first and second depressions is:
in a flow channel defined by the two bound surface-modified patterned wafers; or
one of a plurality of wells within the flow channel.

4. The flow cell package as defined in claim 1 , wherein:
each of the first functionalized molecule and the second functionalized molecule includes a recurring unit of Formula (I):

wherein:
R 1 is H or optionally substituted alkyl;
R A is selected from the group consisting of azido, optionally substituted amino, optionally substituted alkenyl, optionally substituted hydrazone, optionally substituted hydrazine, carboxyl, hydroxy, optionally substituted tetrazole, optionally substituted tetrazine, nitrile oxide, nitrone, and thiol;
R 5 is selected from the group consisting of H and optionally substituted alkyl;
each of the —(CH 2 ) p — can be optionally substituted;
p is an integer in the range of 1 to 50;
n is an integer in the range of 1 to 50,000; and
m is an integer in the range of 1 to 100,000.

5. The flow cell package as defined in claim 1 , wherein:
the first functionalized molecule is covalently bound to the first silane or the first silane derivative through a first unsaturated moiety of the first silane or first silane derivative;
the second functionalized molecule is covalently bound to the second silane or the second silane derivative through a second unsaturated moiety of the second silane or second silane derivative; and
the unsaturated moieties are individually selected from the group consisting of norbornene, heteronorbornenes, norbornene derivatives, transcyclooctene, transcyclooctene derivatives, cyclooctyne, bicycloalkynes, optionally substituted variants thereof, and combinations thereof.

6. The flow cell package as defined in claim 1 , wherein the spacer layer comprises a black polyimide.

7. The flow cell package as defined in claim 1 , wherein each of the first surface-modified patterned wafer and the second surface-modified patterned wafer has a diameter ranging from about 200 mm to about 300 mm.

8. The flow cell package as defined in claim 1 , comprising a plurality of flow cells.

9. A flow cell package, comprising:
first and second surface-modified patterned wafers and a spacer layer,
wherein the first surface-modified patterned wafer consists of first depressions separated by first interstitial regions, a first functionalized molecule bound to the first surface-modified patterned wafer in at least some of the first depressions, and a first primer grafted to the first functionalized molecule in the at least some of the first depressions;
the second surface-modified patterned wafer consists of second depressions separated by second interstitial regions, a second functionalized molecule bound to the second surface-modified patterned wafer in at least some of the second depressions, and a second primer grafted to the second functionalized molecule in the at least some of the second depressions; and
the spacer layer bonds at least some first interstitial regions to at least some second interstitial regions, and the spacer layer at least partially defines respective fluidic chambers of the flow cell package.

10. The flow cell package as defined in claim 9 , wherein:
each one of the respective fluidic chambers includes at least one aligned functionalized depression pair, wherein the at least one aligned functionalized depression pair includes one of the first depressions aligned with one of the second depressions; and
the spacer layer forms longitudinal walls between adjacent fluidic chambers.

11. The flow cell package as defined in claim 9 , wherein at least one of the first and second depressions is:
in a flow channel defined by the two bound surface-modified patterned wafers; or
one of a plurality of wells within the flow channel.

12. The flow cell package as defined in claim 9 , wherein:
each of the first functionalized molecule and the second functionalized molecule includes a recurring unit of Formula (I):

wherein:
R 1 is H or optionally substituted alkyl;
R A is selected from the group consisting of azido, optionally substituted amino, optionally substituted alkenyl, optionally substituted hydrazone, optionally substituted hydrazine, carboxyl, hydroxy, optionally substituted tetrazole, optionally substituted tetrazine, nitrile oxide, nitrone, and thiol;
R 5 is selected from the group consisting of H and optionally substituted alkyl;
each of the —(CH 2 ) p — can be optionally substituted;
p is an integer in the range of 1 to 50;
n is an integer in the range of 1 to 50,000; and
m is an integer in the range of 1 to 100,000.

13. The flow cell package as defined in claim 9 , wherein the spacer layer comprises a black polyimide.

14. The flow cell package as defined in claim 9 , wherein each of the first surface-modified patterned wafer and the second surface-modified patterned wafer has a diameter ranging from about 200 mm to about 300 mm.

15. The flow cell package as defined in claim 9 , comprising a plurality of flow cells.

Assignees

• Illumina Inc
• Illumina Cambridge Ltd

Inventors

• Tsay James
• Prabhu Anmiv
• Heiner David
• Li Edwin
• Richez Alexandre
• Beierle John M
• Samiee Kevan
• Munoz Kristina
• Malevanchik Leonid
• Vincent Ludovic
• Zhan Naiqian
• Shieh Peyton
• Yang Robert
• Schmitt Samantha
• Park Sang
• Bailey Scott
• Ramirez Sean M
• Ahn Sunmin
• Uzzell Valerie
• Wei Wei
• Huang Yuxiang
• Dill Tyler Jamison

Classifications

• H10P50/00 Primary

  Etching of wafers, substrates or parts of devices · CPC title

• H10W74/01

  Manufacture or treatment · CPC title

• H10P95/06

  Planarisation of inorganic insulating materials · CPC title

• G01N15/1484

  microstructural devices · CPC title

• C09D133/24

  Homopolymers or copolymers of amides or imides · CPC title