Compositions and methods for post-CMP cleaning of cobalt substrates

Patent metadata

Field	Value
Publication number	US-11845917-B2
Application number	US-201916694426-A
Country	US
Kind code	B2
Filing date	Nov 25, 2019
Priority date	Dec 21, 2018
Publication date	Dec 19, 2023
Grant date	Dec 19, 2023

Abstract

A cleaning composition is disclosed for cleaning residue and/or contaminants from microelectronic devices having same thereon. The composition comprises at least one complexing agent, at least one cleaning additive, at least one pH adjusting agent, water, and at least one oxylamine compound. Advantageously, the compositions show effective cleaning of cobalt-containing substrates and improved cobalt compatibility.

First claim

What is claimed is:

1. A cleaning composition for cleaning residue and contaminants from microelectronic devices having same thereon, the cleaning composition comprising from about 0.1 wt % to about 10 wt % of at least one complexing agent, wherein the complexing agent is monoethanolamine (MEA), cysteine and 1-hydroxyethylidene-1,1-diphosphonic acid (HEDP), from about 0.1 wt % to about 10 wt % of at least one cleaning additive, from about 1 wt % to about 5 wt % of at least one pH adjusting agent, water, and from about 0.1 wt % to about 10 wt % of at least one alkyloxylamine compound or salt thereof,
wherein the composition is an aqueous cleaning composition having a pH of from about 10 to about 14 and comprising at least 50% by weight water, and
wherein the cleaning additive comprises a species selected from the group consisting of 2-pyrrolidinone, 1-(2-hydroxyethyl)-2-pyrrolidinone (HEP), glycerol, tetramethylene sulfone (sulfolane), dimethyl sulfone, tetraglyme, diglyme, methyl isobutyl ketone, methyl ethyl ketone, isopropanol, octanol, ethanol, butanol, methanol, isophorone, 4-methyl-2-pentanone, 2,4-dimethyl-3-pentanone, 5-methyl-3-heptanone, 3-pentanone, 5-hydroxy-2-pentanone, 2,5-hexanedione, 4-hydroxy-4-methyl-2-pentanone, 2-methyl-2-butanone, 3,3-dimethyl-2-butanone, 4-hydroxy-2-butanone, cyclopentanone, 2-pentanone, 3-pentanone, 1-phenylethanone, acetophenone, benzophenone, 2-hexanone, 3-hexanone, 2-heptanone, 3-heptanone, 4-heptanone, 2,6-dimethyl-4-heptanone, 2-octanone, 3-octanone, 4-octanone, dicyclohexyl ketone, 2,6-dimethylcyclohexanone, 2-acetylcyclohexanone, 2,4-pentanedione, menthone, dimethylsulfoxide (DMSO), dimethylformamide (DMF), N-methyl pyrrolidone, N-ethyl pyrrolidone, hydroxypropylcellulose, hydroxyethylcellulose, carboxymethylcellulose, sodium carboxymethylcellulose (NaCMC), sodium dodecylsulfate (SDS), ammonium dodecylsulfate, potassium dodecylsulfate, ammonium carboxymethylcellulose, potassium carboxymethylcellulose, polyvinylpyrrolidone (PVP), polyaminoacids, polyamidohydroxyurethanes, polylactones, polyacrylamide, Xanthan gum, chitosan, polyvinyl alcohol, polyvinyl acetate, polyacrylic acid, polyethyleneimine, sorbitol ester, xylitol, esters of anhydrosorbitols, secondary alcohol ethoxylates, potassium alginate, ammonium alginate, calcium alginate, poly(ethylene glycol methacrylate), and combinations thereof.

2. The cleaning composition of claim 1 , wherein the cleaning composition comprises from about 0.1 wt % to about 5 wt % of the complexing agent.

3. The cleaning composition of claim 1 , wherein the cleaning composition comprises from about 0.5 wt % to about 5 wt % of the cleaning additive.

4. The cleaning composition of claim 1 , wherein the pH adjusting agent comprises a species selected from the group consisting of alkali metal hydroxide, alkaline earth metal hydroxides, ammonium hydroxide, tetramethylammonium hydroxide (TMAH), tetraethylammonium hydroxide (TEAH), tetrapropylammonium hydroxide (TPAH), tetrabutylammonium hydroxide (TB AH), tributylmethylammonium hydroxide (TBMAH), benzyltrimethylammonium hydroxide (BTMAH), choline hydroxide, ethyltrimethylammonium hydroxide, tris(2-hydroxyethyl)methyl ammonium hydroxide, diethyldimethylammonium hydroxide, tetrabutylphosphonium hydroxide (TBPH), tetramethylphosphonium hydroxide, tetraethylphosphonium hydroxide, tetrapropylphosphonium hydroxide, benzyltriphenylphosphonium hydroxide, methyl triphenylphosphonium hydroxide, ethyl triphenylphosphonium hydroxide, N-propyl triphenylphosphonium hydroxide, and combinations thereof.

5. The cleaning composition of claim 1 , wherein the cleaning composition has a pH of from about 12 to about 14.

6. The cleaning composition of claim 1 , wherein the cleaning composition an aqueous cleaning composition comprising at least about 80 wt % water.

7. The cleaning composition of claim 1 , wherein the cleaning composition comprises from about 0.01 wt % to about 7 wt % of the alkyloxylamine compound or salt thereof.

8. The cleaning composition of claim 1 , wherein the cleaning composition further comprises at least one etchant, wherein the etchant comprises a species selected from the group consisting of morpholine, diglycolamine, 3-butoxypropylamine, propylene glycol monobutyl ether, hydroxyethylmorpholine, hydroxypropylmorpholine, aminoethylmorpholine, aminopropylmorpholine, pentamethyldiethylenetriamine (PMDETA), piperazine, N,N-dimethylpropanolamine, ethanolamine, diethanolamine, diethylamine, ethylenediamine, diethylenetriamine, tetraethylene pentamine, triethylenetetramine, trimethylaminoethylethanolamine, trimethylaminopropylethanolamine, and combinations thereof.

9. The cleaning composition of claim 1 , wherein the cleaning composition further comprises at least one corrosion inhibitor, wherein the corrosion inhibitor comprises a species selected from the group consisting of acetic acid, acetone oxime, acrylic acid, adipic acid, alanine, arginine, asparagine, aspartic acid, betaine, dimethyl glyoxime, formic acid, fumaric acid, gluconic acid, glutamic acid, glutamine, glutaric acid, glyceric acid, glycerol, glycolic acid, glyoxylic acid, histidine, iminodiacetic acid, isophthalic acid, itaconic acid, lactic acid, leucine, lysine, maleic acid, maleic anhydride, malic acid, malonic acid, mandelic acid, 2,4-pentanedione, phenylacetic acid, phenylalanine, phthalic acid, proline, propionic acid, pyrocatecol, pyromellitic acid, quinic acid, serine, sorbitol, succinic acid, tartaric acid, terephthalic acid, trimellitic acid, trimesic acid, tyrosine, valine, xylitol, oxalic acid, tannic acid, picolinic acid, 1,3-cyclopentanedione, catechol, pyrogallol, resorcinol, hydroquinone, cyanuric acid, barbituric acid, 1,2-dimethylbarbituric acid, pyruvic acid, propanethiol, benzohydroxamic acids, 2,5-dicarboxypryidine, 4-(2-hydroxyethyl)morpholine (HEM), N-aminoethylpiperazine (N-AEP), ethylenediaminetetraacetic acid (EDTA), 1,2-cyclohexanediamine-N,N,N′,N′-tetraacetic acid (CDTA), N-(hydroxyethyl)-ethylenediaminetriacetic acid (HEdTA), iminodiacetic acid (IDA), 2-(hydroxyethyl)iminodiacetic acid (HIDA), nitrilotriacetic acid, thiourea, 1,1,3,3-tetramethylurea, urea, urea derivatives, glycine, cysteine, glutamic acid, isoleucine, methionine, piperadine, N-(2-aminoethyl) piperadine, pyrrolidine, threonine, tryptophan, salicylic acid, p-toluenesulfonic acid, salicylhyroxyamic, 5-sulfosalicylic acid, triazole, aminotriazole, dimethylpropargyl alcohol, lauroyl sarcosine, steroyl sarcosine, saccharine, and combinations thereof.

10. The cleaning composition of claim 1 , wherein the cleaning composition further comprises at least one reducing agent, wherein the reducing agent comprises a species selected from the group consisting of ascorbic acid, L(+)-ascorbic acid, isoascorbic acid, ascorbic acid derivatives, sulfurous acid, ammonium sulfite, potassium sulfite, sodium sulfite, dopamine HCl, phosphorous acid, phosphinic acid, potassium metabisulfite, sodium metabisulfite, ammonium metabisulfite, hydroxylamine, potassium pyruvate, sodium pyruvate, ammonium pyruvate, formic acid, sodium formate, potassium formate, ammonium formate, dopamine, sulfur dioxide solution, and combination thereof.

11. The cleaning composition of claim 1 , wherein the cleaning composition is substantially devoid of fluoride-containing sources, abrasive materials, and tetramethylammonium hydroxide.

12. The cleaning composition of claim 1 , wherein the cleaning composition has a pH in a range of from about 13 to about 14.

13. The cleaning composition of claim 1 , wherein the cleaning composition further comprises residue and contaminants, wherein the residue comprises post-CMP residue, post-etch residue, post-as

Assignees

• Entegris Inc

Inventors

• White Daniela
• Frye Donald
• Thomas Elizabeth
• Liu Jun
• White Michael

Classifications

• H10P70/277 Primary

  the processing being a planarisation of conductive layers · CPC title

• H10P70/20

  Cleaning during device manufacture · CPC title

• C11D7/3218 Primary

  Alkanolamines or alkanolimines · CPC title

• B08B3/08

  the liquid having chemical or dissolving effect · CPC title

• C09K13/00

  Etching, surface-brightening or pickling compositions (for glass C03C15/00, {C03C25/66; for mortars, concrete, artificial or natural stone or ceramics C04B41/5338}; for metallic material C23F, C23G1/00, C25F1/00; {for semi-conductors H10P52/40}) · CPC title