Composite sintered body, semiconductor manufacturing apparatus member, and method of manufacturing composite sintered body

Patent metadata

Field	Value
Publication number	US-11845697-B2
Application number	US-202017022492-A
Country	US
Kind code	B2
Filing date	Sep 16, 2020
Priority date	Mar 28, 2018
Publication date	Dec 19, 2023
Grant date	Dec 19, 2023

Abstract

The composite sintered body includes Al 2 O 3 , and MgAl 2 O 4 . The content of Al 2 O 3 in the composite sintered body is not less than 95.5% by weight. The average sintered grain size of Al 2 O 3 in the composite sintered body is not less than 2 μm and not greater than 4 μm. The standard deviation of sintered grain size distribution of Al 2 O 3 in the composite sintered body is not greater than 0.35. The bulk density of the composite sintered body is not less than 3.94 g/cm 3 and not greater than 3.98 g/cm 3 . In the composite sintered body, the ratio of amount of crystal phase of MgAl 2 O 4 to that of Al 2 O 3 is not less than 0.003 and not greater than 0.01.

First claim

The invention claimed is:

1. A composite sintered body, comprising:
aluminum oxide; and
magnesium aluminate spinel, wherein
a content of said aluminum oxide is not less than 95.5% by weight,
an average sintered grain size of said aluminum oxide is not less than 2 μm and not greater than 4 μm,
a standard deviation of sintered grain size distribution of said aluminum oxide is not greater than 0.35,
a bulk density of said composite sintered body is not less than 3.94 g/cm 3 and not greater than 3.98 g/cm 3 , and
a ratio of amount of crystal phase of said magnesium aluminate spinel to that of said aluminum oxide is not less than 0.003 and not greater than 0.01.

2. The composite sintered body according to claim 1 , further comprising
silicon carbide, wherein
a content of said silicon carbide is not less than 0.01% by weight and not greater than 4% by weight.

3. The composite sintered body according to claim 1 , wherein
a content of magnesium is not greater than 0.35% by weight.

4. The composite sintered body according to claim 1 , wherein
a withstand voltage is not less than 100 kV/mm.

5. The composite sintered body according to claim 1 , wherein
a volume resistivity at 250° C. is not less than 1.0×10 15 Ω·cm.

6. The composite sintered body according to claim 1 , wherein
a four-point bending strength is not less than 450 MPa.

7. A semiconductor manufacturing apparatus member used in a semiconductor manufacturing apparatus, being formed by using the composite sintered body according to claim 1 .

8. The semiconductor manufacturing apparatus member according to claim 7 , comprising:
a plate-like main body formed by using said composite sintered body, having an upper surface on which a semiconductor substrate is to be placed; and
an internal electrode located inside said main body.

9. A method of manufacturing a composite sintered body, comprising:
a) molding mixed powder in which aluminum oxide and magnesium oxide are mixed, into a green body having a predetermined shape; and
b) generating a composite sintered body by sintering said green body, wherein
a content of said aluminum oxide in said mixed powder in said operation a) is not less than 95.5% by weight,
an average sintered grain size of said aluminum oxide after completion of said operation b) is not less than 2 μm and not greater than 4 μm,
a standard deviation of sintered grain size distribution of said aluminum oxide after completion of said operation b) is not greater than 0.35,
a bulk density of said composite sintered body is not less than 3.94 g/cm 3 and not greater than 3.98 g/cm 3 ,
said composite sintered body comprises magnesium aluminate spinel, and
a ratio of amount of crystal phase of said magnesium aluminate spinel to that of said aluminum oxide is not less than 0.003 and not greater than 0.01.

10. The method of manufacturing a composite sintered body according to claim 9 , wherein
said mixed powder contains silicon carbide in said operation a), and
a content of said silicon carbide in said mixed powder is not less than 0.01% by weight and not greater than 4% by weight.

11. The method of manufacturing a composite sintered body according to claim 9 , wherein
a content of said magnesium oxide in said mixed powder in said operation a) is not greater than 0.5% by weight.

12. The method of manufacturing a composite sintered body according to claim 9 , wherein
a sintering temperature in said operation b) is not lower than 1550° C. and not higher than 1700° C.

Assignees

• Ngk Insulators Ltd

Inventors

• Atsuji Kyohei
• Nishimura Noboru
• NAGAI Asumi
• Katsuda Yuji

Classifications

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P72/70

  for supporting or gripping · CPC title

• C04B35/117 Primary

  Composites · CPC title

• C04B35/64

  Burning or sintering processes (C04B33/32 takes precedence {; powder metallurgy B22F}) · CPC title