Nozzle apparatus, apparatus and method for treating substrate

Patent metadata

Field	Value
Publication number	US-11845090-B2
Application number	US-202016918341-A
Country	US
Kind code	B2
Filing date	Jul 1, 2020
Priority date	Jul 2, 2019
Publication date	Dec 19, 2023
Grant date	Dec 19, 2023

Abstract

An apparatus for performing liquid treatment for a substrate is provided. The apparatus for performing the liquid treatment for the substrate may include a housing having a treatment space, a substrate support unit to support and rotate the substrate in the treatment space, a liquid feeding unit including a nozzle device including a central exhaust port and multiple first outer exhaust ports, which are provided in a shape of a ring to form a concentric circle with the central exhaust port to feed mutually different treating liquids onto the substrate through respective exhaust ports, and a controller to control the liquid feeding unit.

First claim

What is claimed is:

1. A nozzle apparatus to exhaust a treating liquid to a substrate treatment surface, the nozzle apparatus comprising:
a first nozzle having a central exhaust port and configured to exhaust a first liquid; and
a second nozzle having a first outer exhaust port provided in a shape of ring to form a concentric circle with the central exhaust port and configured to exhaust a second liquid, and
a nozzle controller configured to control the first nozzle and the second nozzle,
wherein the nozzle controller is configured to control the second nozzle to clean a surface of the first nozzle using the second treating liquid, before exhausting the first treating liquid from the first nozzle.

2. The nozzle apparatus of claim 1 , wherein the central exhaust port and the first outer exhaust port are provided to have mutually different exhaust heights.

3. The nozzle apparatus of claim 2 , wherein the central exhaust port is positioned to be provided more closely to the substrate treatment surface than the first outer exhaust port.

4. The nozzle apparatus of claim 3 , further comprising:
a third nozzle having a second outer exhaust port provided in a shape of a ring to form a concentric circle with the central exhaust port,
wherein the third nozzle is provided to surround the second nozzle.

5. The nozzle apparatus of claim 4 , wherein the second outer exhaust port is provided farther away from the substrate treatment surface than the first outer exhaust port.

6. The nozzle apparatus of claim 4 , wherein a third treating liquid exhausted from the third nozzle includes a drying fluid.

7. The nozzle apparatus of claim 1 , wherein a first treating liquid exhausted from the first nozzle is different from a second treating liquid exhausted from the second nozzle.

8. The nozzle apparatus of claim 7 , wherein the first treating liquid includes a photosensitive liquid, and
wherein the second treating liquid includes a solvent.

9. The nozzle apparatus of claim 1 , wherein the nozzle controller is configured to:
control the first nozzle and the second nozzle to exhaust the second treating liquid together with the first treating liquid, such that flowability of the first treating liquid is increased on a substrate surface, when the first treating liquid is exhausted from the first nozzle.

10. The nozzle apparatus of claim 9 , wherein the nozzle controller is configured to:
control the second nozzle such that a start time point of exhausting the second treating liquid is earlier than a start time point of exhausting the first treating liquid, and an end time point of exhausting the second treating liquid is later than an end time point of exhausting the first treating liquid.

11. An apparatus for treating a substrate, the apparatus comprising:
a housing having a treatment space;
a substrate support unit to support and rotate the substrate in the treatment space;
a liquid feeding unit including a nozzle device including a central exhaust port and multiple first outer exhaust ports, which are provided in a shape of a ring to form a concentric circle with the central exhaust port, and configured to feed mutually different treating liquids onto the substrate through respective exhaust ports; and
a controller configured to control the liquid feeding unit,
wherein the controller is configured to control the liquid feeding unit to exhaust a second treating liquid through the first outer exhaust ports such that a peripheral portion of the central exhaust port is cleaned, before exhausting a first treating liquid from the central exhaust port.

12. The apparatus of claim 11 , wherein the central exhaust port and the first outer exhaust ports are provided to have mutually different exhaust heights.

13. The apparatus of claim 12 , wherein the central exhaust port is positioned to be provided more closely to a substrate treatment surface than the first outer exhaust ports.

14. The apparatus of claim 11 , wherein the controller is configured to:
control the liquid feeding unit to exhaust, through the first outer exhaust ports, a second treating liquid together with a first treating liquid, such that flowability of the first treating liquid is increased on a substrate surface, when the first treating liquid is exhausted from the central exhaust port.

15. The apparatus of claim 14 , wherein the controller is configured to:
control the liquid feeding unit such that a start time point of exhausting the second treating liquid is earlier than a start time point of exhausting the first treating liquid, and an end time point of exhausting the first treating liquid is earlier than an end time point of exhausting the second treating liquid.

16. The apparatus of claim 11 , wherein the first treating liquid includes a photosensitive liquid and the second treating liquid includes a solvent.

17. The apparatus of claim 11 , wherein the nozzle device further includes:
a second outer exhaust port provided in a shape of a ring to surround the first outer exhaust ports while forming a concentric circle with the central exhaust port, and
wherein the second outer exhaust port is provided in a stepped form to be farther away from a substrate treatment surface than the first outer exhaust ports.

18. The apparatus of claim 17 , wherein a third treating liquid exhausted from the second outer exhaust port includes a drying fluid.

Assignees

• Semes Co Ltd

Inventors

• Oh Chang Suk
• Jung Woo Sin
• Kang Unkyu

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title

• H10P72/0458 Primary

  vertical arrangement · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title