Bulk-acoustic wave resonator

Patent metadata

Field	Value
Publication number	US-11843365-B2
Application number	US-202117144602-A
Country	US
Kind code	B2
Filing date	Jan 8, 2021
Priority date	Jul 28, 2020
Publication date	Dec 12, 2023
Grant date	Dec 12, 2023

Abstract

A bulk-acoustic wave resonator includes a resonator including a central portion in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on a substrate, and an extension portion disposed along a periphery of the central portion; and an insertion layer disposed between the piezoelectric layer and the substrate in the extension portion to raise the piezoelectric layer. The insertion layer includes a first insertion layer having a first inclined surface formed along a side surface facing the central portion and a second inclined surface disposed between the first insertion layer and the piezoelectric layer and having a second inclined surface spaced apart from the first inclined surface with respect to a surface direction of the first electrode. The first insertion layer is thinner than the second insertion layer.

First claim

What is claimed is:

1. A bulk-acoustic wave resonator, comprising:
a resonator including a central portion in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on a substrate, and an extension portion disposed along a periphery of the central portion; and
an insertion layer disposed between the piezoelectric layer and the substrate in the extension portion,
wherein the insertion layer comprises a first insertion layer having a first inclined surface formed along a side surface facing the central portion and a second insertion layer disposed between the first insertion layer and the piezoelectric layer and having a second inclined surface spaced apart from the first inclined surface with respect to a surface direction of the first electrode, and
wherein the first insertion layer is thinner than the second insertion layer.

2. The bulk-acoustic wave resonator of claim 1 , wherein
a ratio of a width of the first insertion layer to a thickness of the first insertion layer is greater than or equal to 6,
where the width of the first insertion layer is a distance between a terminal end of the first inclined surface of the first insertion layer and a terminal end of the second inclined surface of the second insertion layer.

3. The bulk-acoustic wave resonator of claim 1 , wherein the first inclined surface and the second inclined surface have different angles of inclination.

4. The bulk-acoustic wave resonator of claim 3 , wherein an angle of inclination of the second inclined surface is narrower than an angle of inclination of the first inclined surface.

5. The bulk-acoustic wave resonator of claim 3 , wherein an angle of inclination of the first inclined surface is within a range of 30° or higher to 70° or lower, and an angle of inclination of the second inclined surface is within a range of 5° or higher to 70° or lower.

6. The bulk-acoustic wave resonator of claim 4 , wherein the second insertion layer has a thickness of 2000 Å or more, and the first insertion layer has a thickness of 2000 Å or less.

7. The bulk-acoustic wave resonator of claim 1 , wherein the first insertion layer is formed of a material having a larger acoustic impedance than an acoustic impedance of the second insertion layer.

8. The bulk-acoustic wave resonator of claim 7 , wherein the first insertion layer is formed of silicon oxide (SiO 2 ).

9. The bulk-acoustic wave resonator of claim 8 , wherein the second insertion layer is formed of any one of alumina (Al 2 O 3 ), aluminum nitride (AlN), silicon carbide (SiC), and silicon nitride (Si 3 N 4 ).

10. The bulk-acoustic wave resonator of claim 1 , wherein the piezoelectric layer comprises a first inclined portion defined by the first inclined surface and a second inclined portion defined by the second inclined surface, and
the first inclined portion and the second inclined portion are spaced apart with respect to the surface direction of the first electrode.

11. The bulk-acoustic wave resonator of claim 10 , wherein an end of the second electrode is disposed on the second inclined portion.

12. The bulk-acoustic wave resonator of claim 1 , wherein the first insertion layer is disposed between the first electrode and the substrate, and
at least a portion of the second insertion layer is disposed between the first electrode and the piezoelectric layer.

13. A bulk-acoustic wave resonator, comprising:
a resonator including a central portion in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on a substrate, and an extension portion disposed along a periphery of the central portion; and
an insertion layer disposed between the piezoelectric layer and the substrate in the extension portion,
wherein the insertion layer comprises a first insertion layer having a first inclined surface formed along a side surface facing the central portion and a second insertion layer disposed between the first insertion layer and the piezoelectric layer and having a second inclined surface spaced apart from the first inclined surface with respect to a surface direction of the first electrode,
wherein an angle of inclination of the second inclined surface is narrower than an angle of inclination of the first inclined surface.

14. The bulk-acoustic wave resonator of claim 13 , wherein the angle of inclination of the first inclined surface is within a range of 30° or higher to 70° or lower, and the angle of inclination of the second inclined surface is within a range of 5° or higher to 40° or lower.

15. The bulk-acoustic wave resonator of claim 14 , wherein the second inclined surface has a wider area than the first inclined surface.

16. The bulk-acoustic wave resonator of claim 13 , wherein the first insertion layer and second insertion layer have different thicknesses.

Assignees

• Samsung Electro Mech

Inventors

• Lee Tae Kyung
• Han Won
• Lee Moon Chul
• Son Sang Uk
• Lee Hwa Sun

Classifications

• H03H9/173 Primary

  Air-gaps · CPC title

• H03H9/02118 Primary

  of lateral leakage between adjacent resonators · CPC title

• H03H9/02 Primary

  Details · CPC title

• H03H9/02015 Primary

  Characteristics of piezoelectric layers, e.g. cutting angles · CPC title

• H03H9/05

  Holders or supports · CPC title