Methods for transfer of micro-devices

Patent metadata

Field	Value
Publication number	US-11843025-B2
Application number	US-202217670374-A
Country	US
Kind code	B2
Filing date	Feb 11, 2022
Priority date	Jun 29, 2016
Publication date	Dec 12, 2023
Grant date	Dec 12, 2023

Abstract

An apparatus for positioning micro-devices on a substrate includes one or more supports to hold a donor substrate and a destination substrate, an adhesive dispenser to deliver adhesive on micro-devices on the donor substrate, a transfer device including a transfer surface to transfer the micro-devices from the donor substrate to the destination substrate, and a controller. The controller is configured to operate the adhesive dispenser to selectively dispense the adhesive onto selected micro-devices on the donor substrate based on a desired spacing of the selected micro-devices on the destination substrate. The controller is configured to operate the transfer device such that the transfer surface engages the adhesive on the donor substrate to cause the selected micro-devices to adhere to the transfer surface and the transfer surface then transfers the selected micro-devices from the donor substrate to the destination substrate.

First claim

What is claimed is:

1. A method of transferring light emitting diodes from a first body to a second body, comprising:
optically exciting light emitting diodes on the first body and detecting one or more defective light emitting diodes on the first body;
delivering adhesive at locations corresponding to a multiplicity of the light emitting diodes, the multiplicity of the light emitting diodes including light emitting diodes not detected as defective;
moving the first body relative to a second body to bring a second body into contact with light emitting diodes on the first body so that adhesive from a dispenser secures the multiplicity of the light emitting diodes to the second body, and
moving the first body relative to the second body to move a second surface away from the first body so that the second surface removes in parallel the multiplicity of the light emitting diodes while the one or more defective light emitting diodes remain on the first body.

2. The method of claim 1 , wherein the first body comprises a donor substrate and the second surface comprises a transfer surface.

3. The method of claim 1 , wherein delivering the adhesive includes selectively dispensing adhesive onto selected light emitting diodes on the first body.

4. The method of claim 3 , wherein the multiplicity of the light emitting diodes exclude light emitting diodes detected as defective.

5. The method of claim 1 , further comprising selectively neutralizing adhesive below the second surface.

6. The method of claim 5 , wherein selectively neutralizing comprises irradiating the adhesive.

7. The method of claim 1 , transferring at least one of the multiplicity of the light emitting diodes from the second surface to a third surface on a third body.

8. The method of claim 1 , comprising transferring at least one light emitting diode to the second surface or a third surface at a spot corresponding to a defective micro-device.

9. The method of claim 8 , wherein transferring the at least one light emitting diode to the second surface or the third surface is performed with a single light emitting diode at a time.

10. The method of claim 1 , wherein the second body comprises a stretchable film.

11. The method of claim 1 , wherein the second body comprises a roller.

12. The method of claim 1 , wherein the second surface comprises a planar surface.

13. The method of claim 1 , further comprising emitting a pattern of radiation to cure the adhesive before bringing the second body into contact with light emitting diodes on the first body.

Assignees

• Applied Materials Inc

Inventors

• Zhu Mingwei
• Ganapathiappan Sivapackia
• Fu Boyi
• Ng Hou T
• Patibandla Nag B

Classifications

• H10W90/00 Primary

  Package configurations · CPC title

• H10W72/0198

  batch processes · CPC title

• H10W72/0711

  Apparatus therefor · CPC title

• H10P74/23

  characterised by multiple measurements, corrections, marking or sorting processes · CPC title

• H10P72/7434

  used in a transfer process involving at least two transfer steps, i.e. including an intermediate handle substrate · CPC title