Symmetric flow valve for flow conductance control

Patent metadata

Field	Value
Publication number	US-11835146-B2
Application number	US-202117539372-A
Country	US
Kind code	B2
Filing date	Dec 1, 2021
Priority date	Aug 16, 2019
Publication date	Dec 5, 2023
Grant date	Dec 5, 2023

Abstract

Embodiments of symmetric flow valves for use in a substrate processing chamber are provided herein. In some embodiments, a symmetric flow valve includes a valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein the top plate includes one or more axisymmetrically disposed openings; a poppet disposed in the interior volume, wherein the poppet includes a central opening and a plurality of portions configured to selectively seal the one or more axisymmetrically disposed openings of the top plate when the symmetric flow valve is in a closed position; and a first actuator coupled to the poppet to position the poppet within the interior volume in at least an open position, where the poppet is spaced apart from the top plate to allow flow through the one or more axisymmetrically disposed openings of the top plate, and the closed position.

First claim

The invention claimed is:

1. A symmetric flow valve for use in a substrate processing chamber, comprising:
a valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein the valve body includes a plurality of axisymmetrically disposed openings comprising three or more openings arranged in a non-linear manner, wherein a first opening of the plurality of axisymmetrically disposed openings is configured to interface with a pump port, wherein the top plate includes an opening, and wherein all of the plurality of axisymmetrically disposed openings are disposed radially inward of an outer diameter of the opening of the top plate;
a first poppet coupled to a first actuator to move the first poppet between at least a closed position and an open position to selectively seal the first opening; and
a second poppet coupled to a second actuator to move the second poppet between at least a closed position and an open position to selectively seal a second opening of the plurality of axisymmetrically disposed openings.

2. The symmetric flow valve of claim 1 , further comprising a third poppet coupled to a third actuator to move the third poppet between at least a closed position and an open position to selectively seal a third opening of the plurality of axisymmetrically disposed openings.

3. The symmetric flow valve of claim 1 , wherein the second opening is configured to interface with a second pump port.

4. The symmetric flow valve of claim 1 , wherein at least one of:
the valve body includes a service door on one or more sidewalls to facilitate poppet service, or
wherein the valve body has a rectangular, hexagon, or octagon shape.

5. The symmetric flow valve of claim 1 , wherein the first actuator is coupled to the bottom plate of the valve body or the top plate of the valve body.

6. The symmetric flow valve of claim 1 , wherein the first poppet includes one or more cutouts extending from a bottom surface of the first poppet towards an upper surface of the first poppet.

7. The symmetric flow valve of claim 1 , wherein the pump port is disposed in the bottom plate.

8. The symmetric flow valve of claim 1 , wherein the first opening is coupled to a first pump and the second opening is coupled to a second pump different than the first pump.

9. A symmetric flow valve for use in a substrate processing chamber, comprising:
A valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein the valve body includes a plurality of axisymmetrically disposed openings arranged about an axis that is perpendicular to the bottom plate, wherein an angle between respective centers of the plurality of axisymmetrically disposed openings with respect to the axis is less than 180 degrees, wherein the valve body defines a flow path extending into the interior volume through the top plate and out of the interior volume through the plurality of axisymmetrically disposed openings, and wherein each of the plurality of axisymmetrically disposed openings are configured to interface with a pump port, wherein the top plate includes an opening, and wherein all of the plurality of axisymmetrically disposed openings are disposed radially inward of an outer diameter of the opening of the top plate; and
a plurality of poppets configured to selectively seal corresponding ones of the plurality of axisymmetrically disposed openings by selectively moving between at least a closed position and an open position.

10. The symmetric flow valve of claim 9 , wherein the plurality of axisymmetrically disposed openings comprise three openings disposed in the bottom plate.

11. The symmetric flow valve of claim 9 , wherein the plurality of poppets are made of aluminum or stainless steel.

12. The symmetric flow valve of claim 9 , further comprising a plurality of actuators coupled to respective ones of the plurality of poppets to move the plurality of poppets between the open position and the closed position.

13. The symmetric flow valve of claim 12 , wherein at least one of the plurality of actuators is coupled to a sidewall of the valve body.

14. The symmetric flow valve of claim 9 , wherein the pump port is a common pump port for the plurality of axisymmetrically disposed openings disposed vertically below the plurality of axisymmetrically disposed openings.

15. A substrate processing chamber, comprising:
a chamber body having a floor, wherein the floor includes a plurality of arc shaped openings;
a symmetric flow valve comprising:
a valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein the valve body includes a plurality of axisymmetrically disposed openings arranged about and equidistant to an axis passing perpendicular to the top plate and the bottom plate, and wherein each of the plurality of axisymmetrically disposed openings are configured to interface with a pump port; and
a plurality of poppets configured to selectively seal corresponding ones of the plurality of the axisymmetrically disposed openings by selectively moving between at least a closed position and an open position via a plurality of actuators; and

one or more pumps coupled to the plurality of axisymmetrically disposed openings.

16. The substrate processing chamber of claim 15 , wherein the plurality of axisymmetrically disposed openings are radially outward of a center of the bottom plate.

17. The substrate processing chamber of claim 15 , wherein the substrate processing chamber is configured to pump about 6500 to about 7500 liters per second through the symmetric flow valve.

18. The substrate processing chamber of claim 15 , wherein the plurality of actuators are coupled to the bottom plate of the valve body or the top plate of the valve body.

19. The substrate processing chamber of claim 15 , wherein the plurality of actuators have a stroke length of about 3.0 inches to about 4.0 inches.

Assignees

• Applied Materials Inc

Inventors

• Nguyen Andrew
• Vishwanath Yogananda Sarode
• Chang Xue
• Rayaroth Anilkumar
• Naik Chetan
• Narayan Balachandra Jatak

Classifications

• H10P72/00

  Handling or holding of wafers, substrates or devices during manufacture or treatment thereof · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• F16K1/42 Primary

  Valve seats (for double-seat valves F16K1/44) · CPC title

• F16K1/36 Primary

  Valve members (for double-seat valves F16K1/44 {; for butterfly valves F16K1/222, F16K1/223}) · CPC title

• F16K11/22

  with an actuating member for each valve, e.g. interconnected to form multiple-way valves · CPC title