Electrostatic chuck device and method for manufacturing same

Patent metadata

Field	Value
Publication number	US-11817339-B2
Application number	US-201917041935-A
Country	US
Kind code	B2
Filing date	Mar 26, 2019
Priority date	Mar 30, 2018
Publication date	Nov 14, 2023
Grant date	Nov 14, 2023

Abstract

This electrostatic chuck device (1) includes a base (11) having one main surface serving as a mounting surface (19) on which a plate-shaped sample is mounted, and an electrode for electrostatic attraction (13) provided on the side opposite to the mounting surface (19) in the base (11), in which the base (11) consists of a ceramic material as a forming material, and the ceramic material contains aluminum oxide and silicon carbide as main components thereof, and has a layered graphene present at a grain boundary of the aluminum oxide.

First claim

The invention claimed is:

1. An electrostatic chuck device comprising:
a base having one main surface serving as a mounting surface on which a plate-shaped sample is mounted; and
an electrode for electrostatic attraction provided on a side opposite to the mounting surface in the base,
wherein the base consists of a ceramic material, and
the ceramic material is a sintered body containing aluminum oxide and silicon carbide as main components thereof and having a layered graphene present at a grain boundary of the aluminum oxide.

2. The electrostatic chuck device according to claim 1 ,
wherein the sintered body further contains β-SiC type silicon carbide.

3. The electrostatic chuck device according to claim 1 ,
wherein a relative dielectric constant of the ceramic material at a frequency of 10 Hz is 12.3 or more, and a relative dielectric constant of the ceramic material at a frequency of 1 MHz is 12.5 or less.

4. A method for manufacturing the electrostatic chuck device according to claim 1 , the method comprising:
a step of heating a formed body obtained by forming granules composed of mixed particles of aluminum oxide particles and silicon carbide particles, at a temperature of 500° C. or lower with a rate of temperature rise of 0.3° C./min or more; and
a step of sintering the formed body, which has been treated in the step of heating, to form a sintered body containing aluminum oxide and silicon carbide as main components thereof and having a layered graphene present at a grain boundary of the aluminum oxide.

5. The electrostatic chuck device according to claim 2 ,
wherein the sintered body contains 4% by volume or more and 15% by volume or less of the β-SiC type silicon carbide based on that of the sintered body.

6. The electrostatic chuck device according to claim 1 , wherein the electrode for electrostatic attraction uses conductive ceramics as a forming material.

7. The electrostatic chuck device according to claim 1 ,
wherein the base is made of only the ceramic material, and
the silicon carbide is composed of only β-SiC type silicon carbide.

8. The electrostatic chuck device according to claim 1 ,
wherein in the ceramic material, an average crystal grain size of crystal grains of the aluminum oxide is 2 μm or less, and an average crystal grain size of crystal grains of the silicon carbide is 0.2 μm or less, and
a thickness of the layered graphene is 5 nm or more and 1000 nm or less.

9. The method for manufacturing the electrostatic chuck device according to claim 4 ,
wherein the step of sintering the formed body contains a sub-step of heating the formed body at a temperature of 1600° C. or lower in a vacuum atmosphere, before sintering in an inert gas atmosphere.

10. The method for manufacturing the electrostatic chuck device according to claim 4 ,
wherein the step of heat-treating is performed at normal pressure in an inert gas atmosphere.

Assignees

• Sumitomo Osaka Cement Co Ltd

Inventors

• Hidaka Nobuhiro
• Kimura Naoto

Classifications

• H10P72/722 Primary

  Details of electrostatic chucks · CPC title

• H10P72/7616

  characterised by a coating, a hardness or a material · CPC title

• H10P50/242

  of Group IV materials · CPC title

• H10P72/0421

  for drying etching · CPC title

• H01L21/6833 Primary

  Electricity · mapped topic