Electrostatic chuck device and method for manufacturing same
US-11817339-B2 · Nov 14, 2023 · US
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Patent family 68062098
This patent family groups 2 related publications across US. Members often share priority claims or equivalent filings in different countries.
| Field | Value |
|---|---|
| Family ID | 68062098 |
| Family type | — |
| Earliest priority | Mar 30, 2018 |
| First filing country | US |
| Member publications | 2 |
| Countries | US |
| Representative publication | US11817339B2 — Electrostatic chuck device and method for manufacturing same |
Representative publication
Best representative member for this family based on priority and filing country.
US11817339B2 — Electrostatic chuck device and method for manufacturing same (published Nov 14, 2023)
Member publications
Related publications in this family.
Electrostatic chuck device and method for manufacturing same
US-2021013082-A1 · Jan 14, 2021 · US