Illumination optical system, exposure apparatus and device manufacturing method
US-2019086811-A1 · Mar 21, 2019 · US
US11803275B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11803275-B2 |
| Application number | US-202117234370-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 19, 2021 |
| Priority date | Sep 19, 2018 |
| Publication date | Oct 31, 2023 |
| Grant date | Oct 31, 2023 |
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A touch sensing unit includes a first touch electrode disposed in a touch sensor area. A second touch electrode is disposed in the touch sensor area. A first touch line is disposed in a touch peripheral area. The first touch line is electrically connected to the first touch electrode. The touch peripheral area is disposed on a periphery of the touch sensor area. A second touch line is disposed in the touch peripheral area. The second touch line is electrically connected to the second touch electrode. The touch peripheral area includes first and second regions. In the first region, a width of the first touch line is smaller than a width of the second touch line. In the second region, the width of the first touch line is equal to the width of the second touch line.
Opening claim text (preview).
What is claimed is: 1. A touch sensing unit, comprising: a first row of touch electrodes extending in a first direction; a second row of touch electrodes extending in the first direction; a first column of touch electrodes extending in a second direction perpendicular to the first direction and crossing the first row of touch electrodes; a first touch line connected to a first end of the first row of touch electrodes; a second touch line connected to a first end of the first column of touch electrodes; and a third touch line connected to a first end of the second row of touch electrodes, wherein the first touch line and the second touch line are adjacent to each other, wherein the first row of touch electrodes and the second row of touch electrodes are disposed in the second direction crossing the first direction, wherein the third touch line is longer than the second touch line, wherein the third touch line includes: a first portion overlapping the first row of touch electrodes in the first direction; and a second portion overlapping the second row of touch electrodes in the first direction, wherein a width of the second portion is larger than a width of the first portion, wherein the second portion overlaps a portion of the first touch line in the second direction, wherein the portion of the first touch line overlaps the first row of touch electrodes in the first direction, and wherein a width of the first portion is larger than a width of the portion of the first touch line. 2. The touch sensing unit of claim 1 , further comprising: a guard line between the first touch line and the second touch line. 3. The touch sensing unit of claim 2 , further comprising: a touch driving circuit is configured to supply a driving signal to the first touch line and a ground voltage to the guard line, and sense capacitance between the first row of touch electrodes and the first column of touch electrodes through the second touch line. 4. The touch sensing unit of claim 1 , wherein the first touch line includes a first winding pattern adjacent to the second touch line, and wherein the third touch line has a second winding pattern in the plan view. 5. The touch sensing unit of claim 4 , wherein the second winding pattern is shorter than the first winding pattern. 6. The touch sensing unit of claim 4 , wherein each of the first touch line and the second touch line has a first layer and a second layer disposed on the first layer, and wherein the first winding pattern and the second winding pattern are disposed on the same layer with first layer. 7. The touch sensing unit of claim 4 , further comprising: a third row of touch electrodes extending in the first direction; a fourth row of touch electrodes extending in the first direction; a fourth touch line connected to a first end of the third row of touch electrodes; a fifth touch line connected to a first end of the fourth row of touch electrodes; wherein: the first row of touch electrodes, the second row of touch electrodes, the third row of touch electrodes, and the fourth row of touch electrodes are disposed in the second direction; the fourth touch line is longer than the third touch line; the fifth touch line is longer than the fourth touch line; and each of the fourth touch line and the fifth touch line has a winding pattern in the plan view. 8. The touch sensing unit of claim 7 , wherein the fifth touch line includes: a first portion overlapping the third row of touch electrodes in the first direction; and a second portion overlapping the fourth row of touch electrodes in the first direction, and wherein a width of the first portion is substantially the same as a width of a portion of the fourth touch line which overlaps the third row of touch electrodes in the first direction. 9. The touch sensing unit of claim 8 , wherein a width of the second portion is larger than the width of the first portion. 10. The touch sensing unit of claim 8 , wherein the second portion overlaps a portion of the third touch line in the second direction. 11. The touch sensing unit of claim 8 , wherein each of the first portion and the second portion extends in the second direction, and the fifth touch line further includes a connection portion between the first portion and the second portion. 12. The touch sensing unit of claim 1 , wherein each of the first portion and the second portion extends in the second direction, and the third touch line further includes a connection portion between the first portion and the second portion. 13. A touch sensing unit, comprising: a first row of touch electrodes extending in a first direction; a second row of touch electrodes extending in the first direction; a third row of touch electrodes extending in the first direction; a first column of touch electrodes extending in a second direction perpendicular to the first direction and crossing the first row of touch electrodes, the second row of the touch electrodes, and the third row of the touch electrodes; a first touch line connected to a first end of the first row of touch electrodes; a second touch line connected to a first end of the first column of touch electrodes; a third touch line connected to a first end of the second row of touch electrodes; a fourth touch line connected to a first end of the third row of touch electrodes; and a guard line between the first touch line and the second touch line, wherein the first touch line includes first resistance compensating patterns, and the third touch line includes second resistance compensating patterns, and wherein the first resistance compensating patterns and the second resistance compensating patterns are disposed in a space defined by the guard line and the fourth touch line, wherein the guard line is disposed on a first side of the first resistance compensating patterns, and the second resistance compensating patterns are disposed on a second side of the first resistance compensating patterns, wherein the fourth touch line is disposed on a first side of the second resistance compensating patterns, the first side of the second resistance compensating patterns is opposite to a second side of the second resistance compensating patterns which faces the first resistance compensating patterns, wherein each of the first resistance compensating patterns and the fourth touch line includes at least one metal layer, and wherein a number of the at least one metal layer of the first resistance compensating patterns is smaller than a number of the at least one metal layer of the fourth touch line. 14. The touch sensing unit of claim 13 , wherein the second resistance compensating patterns are shorter than the first resistance compensating patterns. 15. The touch sensing unit of claim 13 , wherein each of the first touch line and the second touch line has a first layer and a second layer disposed on the first layer, and wherein the first resistance compensating patterns and the second resistance compensating patterns are disposed on the same layer with first layer.
Electrode mesh in capacitive digitiser: electrode for touch sensing is formed of a mesh of very fine, normally metallic, interconnected lines that are almost invisible to see. This provides a quite large but transparent electrode surface, without need for ITO or similar transparent conductive material · CPC title
using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes · CPC title
Connections between sensors and controllers, e.g. routing lines between electrodes and connection pads · CPC title
by capacitive means · CPC title
Digitisers structurally integrated in a display · CPC title
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