pH measuring device and pH measuring method

Patent metadata

Field	Value
Publication number	US-11802848-B2
Application number	US-201917295126-A
Country	US
Kind code	B2
Filing date	Nov 11, 2019
Priority date	Nov 22, 2018
Publication date	Oct 31, 2023
Grant date	Oct 31, 2023

Abstract

A pH measuring device configured to measure a pH of a target liquid includes a main body block including a cavity, a supply line communicating with the cavity, a first drain line communicating with the cavity, and a target liquid supply valve configured to adjust a supply of the target liquid into the supply line. The main body block has an integral structure in which a pH sensor is supported such that the pH sensor is in contact with the target liquid within the cavity.

First claim

I claim:

1. A pH measuring device configured to measure a pH of a target liquid, comprising:
a main body block comprising a cavity, a supply line communicating with the cavity, a first drain line communicating with the cavity, and a target liquid supply valve configured to adjust a supply of the target liquid into the supply line,
wherein the main body block has an integral structure in which a pH sensor is supported such that the pH sensor is in contact with a target liquid within the cavity, and
wherein the first drain line is connected to the cavity at a position higher than where the supply line is connected to the cavity.

2. The pH measuring device of claim 1 ,
wherein the main body block comprises a measurement unit and an introduction unit,
the cavity and the first drain line are provided in the measurement unit,
the target liquid supply valve is provided in the introduction unit,
the supply line is provided in the measurement unit and the introduction unit, and
the measurement unit and the introduction unit are adjacent to each other without a seam therebetween.

3. The pH measuring device of claim 1 ,
wherein the main body block comprises:
a cleaning line communicating with the cavity; and
a cleaning liquid supply valve configured to adjust a supply of a cleaning liquid to the cleaning line.

4. The pH measuring device of claim 3 ,
wherein the main body block comprises a connecting line extended from the cavity,
the connecting line forms at least a part of the supply line and at least a part of the cleaning line, and
an entire portion of the connecting line forming the supply line forms a part of the cleaning line.

5. The pH measuring device of claim 1 , further comprising:
an adaptor disposed between the main body block and the pH sensor,
wherein the adaptor is configured to set a relative position of the pH sensor with respect to the main body block such that a volume of the cavity can be adjusted.

6. A pH measuring device configured to measure a pH of a target liquid, comprising:
a main body block comprising a cavity, a supply line communicating with the cavity, a first drain line communicating with the cavity, and a target liquid supply valve configured to adjust a supply of the target liquid into the supply line,
wherein the main body block has an integral structure in which a pH sensor is supported such that the pH sensor is in contact with a target liquid within the cavity,
wherein the main body block comprises:
a cleaning line communicating with the cavity;
a cleaning liquid supply valve configured to adjust a supply of a cleaning liquid to the cleaning line;
a second drain line communicating with the cavity at a position under the first drain line; and
a drain valve configured to adjust a flow of a liquid from the cavity into the second drain line.

7. A pH measuring device configured to measure a pH of a target liquid, comprising:
a main body block comprising a cavity, a supply line communicating with the cavity, a first drain line communicating with the cavity, and a target liquid supply valve configured to adjust a supply of the target liquid into the supply line,
wherein the main body block has an integral structure in which a pH sensor is supported such that the pH sensor is in contact with a target liquid within the cavity,
wherein the pH measuring device further comprises:
a liquid storage container communicating with the cavity through the first drain line; and
a liquid amount detector configured to detect a liquid stored in the liquid storage container,
wherein the liquid storage container is configured such that a liquid introduced into the first drain line by being overflown from the cavity is sent to the liquid storage container.

Assignees

• Tokyo Electron Ltd

Inventors

• Shiokawa Toshiyuki

Classifications

• G01N27/38 Primary

  Cleaning of electrodes · CPC title

• G01N27/416

  Systems (G01N27/27 takes precedence) · CPC title

• G01N27/4167 Primary

  pH (electrodes therefor G01N27/302, G01N27/36) · CPC title

• G01N27/4161 Primary

  measuring the voltage and using a constant current supply, e.g. chronopotentiometry · CPC title

• G01N27/302

  pH sensitive, e.g. quinhydron, antimony or hydrogen electrodes (ion selective electrodes G01N27/333, glass electrodes G01N27/36) · CPC title