Reconstruction algorithms of electron-based holograms

Patent metadata

Field	Value
Publication number	US-11782385-B2
Application number	US-201916717760-A
Country	US
Kind code	B2
Filing date	Dec 17, 2019
Priority date	Dec 17, 2019
Publication date	Oct 10, 2023
Grant date	Oct 10, 2023

Abstract

Apparatuses and methods for improved reconstructions of electron-based holograms are disclosed herein. An example method at least includes forming a hologram of a sample and a known object, forming a reconstruction of the known object using a reconstruction algorithm, comparing the reconstruction of the known object to a reference reconstruction of the known object, and adjusting the reconstruction algorithm based on the comparison of the reconstruction of the known object to the reference reconstruction of the known object. The example method may further include forming a reconstruction of the sample using the adjusted reconstruction algorithm.

First claim

What is claimed is:

1. A method comprising:
forming, with an electron beam, a hologram of a sample and a known object, wherein the known object is of a comparable size of the sample;
forming a reconstruction of the known object using a reconstruction algorithm;
comparing the reconstruction of the known object to a reference reconstruction of the known object; and
adjusting a reconstruction of the sample based on the comparison of the reconstruction of the known object to the reference reconstruction of the known object, wherein the known object is a Bucky Ball, an RNA molecule, or a DNA molecule.

2. The method of claim 1 , wherein the known object is at least the size of the hologram resolution, is of comparable size to the sample, and has a known or determinable size and structure.

3. The method of claim 1 , wherein forming a hologram of a sample and a known object includes:
imaging the sample and the known object with an electron beam.

4. The method of claim 1 , wherein the adjustment of the reconstruction algorithm corrects for system parameters that can vary and affect reconstructions.

5. The method of claim 4 , wherein the system parameters include vibrational noise, hologram magnification, and electron beam coherence.

6. The method of claim 5 , wherein adjusting the reconstruction algorithm for electron beam coherence affects contrast of reconstructions.

7. The method of claim 1 , further including:
depositing the sample on a substrate; and
depositing the known object on the substrate.

8. The method of claim 7 , wherein the sample and known object are deposited together.

9. The method of claim 1 , further including providing an electron beam having an energy in a range from 50 to 500 eV.

10. The method of claim 1 , wherein the known object further has a structure and size that is known or measurable.

11. An apparatus comprising:
an electron emitter coupled to provide an electron beam;
a detector arranged to receive the electron beam after the electron beam interacts with a sample and a fiducial, wherein the fiducial is a Bucky Ball, an RNA molecule, or a DNA molecule; and
a controller coupled at least to the detector to receive holograms of the sample and fiducial acquired by the detector, the controller including code that, when executed, causes the controller to:
form a reconstruction of the fiducial using a reconstruction algorithm;
compare the reconstruction of the fiducial to a known reconstruction of the fiducial; and
adjust a reconstruction of the sample based on the comparison.

12. The apparatus of claim 11 , wherein the fiducial is at least the size of the hologram resolution, is of comparable size to the sample, and has a known or determinable size and structure.

13. The apparatus of claim 11 , wherein the adjustment of the reconstruction of the sample corrects for system parameters that can vary and affect reconstructions.

14. The apparatus of claim 13 , wherein the system parameters include vibrational noise, hologram magnification, and electron beam coherence.

15. The apparatus of claim 13 , wherein adjusting the reconstruction algorithm for electron beam coherence affects contrast of reconstructions.

16. The apparatus of claim 11 , wherein the sample is a biological sample.

17. The apparatus of claim 11 , wherein the electron beam has an energy in a range from 50 to 500 eV.

18. The apparatus of claim 11 , wherein the known object further has a structure and size that is known or measurable.

Assignees

• Fei Co

Inventors

• Liu Kun
• Bahm Alan
• Straw Marcus

Classifications

• G03H1/0866 Primary

  Digital holographic imaging, i.e. synthesizing holobjects from holograms · CPC title

• G03H1/0808

  Methods of numerical synthesis, e.g. coherent ray tracing [CRT], diffraction specific · CPC title

• G03H2001/0072

  for wavefront conjugation wherein the hologram generates a wavefront conjugating a predetermined object, e.g. null testing, positioning, comparative holography · CPC title

• G03H2001/0816

  Iterative algorithms · CPC title

• G03H2001/0883

  Reconstruction aspect, e.g. numerical focusing · CPC title