Breaking-in and cleaning method and apparatus for wafer-cleaning brush
US-2024066566-A1 · Feb 29, 2024 · US
Process for preparing sorptive substrates, and integrated processing system for substrates
US11779963B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11779963-B2 |
| Application number | US-201815889971-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 6, 2018 |
| Priority date | Aug 1, 2011 |
| Publication date | Oct 10, 2023 |
| Grant date | Oct 10, 2023 |
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- Title
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Abstract
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A sorptive wiper for cleaning is disclosed, the wipe comprising a cleaned and dried sorptive material having fewer than 150 contaminant fibers per square meter that are greater than 100 μm in length.
First claim
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What is claimed is: 1. A sorptive wiper for cleaning, the wiper comprising a cleaned and dried sorptive material having fewer than 150 contaminant fibers per square meter that are greater than 100 μm in length. 2. The sorptive wiper as defined in claim 1 , wherein the wiper has a width between about 4 inches (10.16 cm) and 18 inches (45.72 cm). 3. The sorptive wiper as defined in claim 1 , wherein the sorptive material comprises a synthetic material. 4. The sorptive wiper as defined in claim 3 , wherein the sorptive material comprises polyester. 5. The sorptive wiper as defined in claim 1 , wherein the sorptive material is an absorbent material. 6. The sorptive wiper as defined in claim 5 , wherein the absorbent material has an absorbency of between about 300 mL/m 2 to 650 mL/m 2 . 7. The sorptive wiper as defined in claim 1 , wherein each wiper only has between about (i) 30,000 and 70,000 contaminant fibers per square meter that are between about 5.0 and 100 μm in length, (ii) 0.5×10 6 and 5.0×10 6 contaminant fibers per square meter that are between about 0.5 and 5.0 μm in length, or (iii) both. 8. The sorptive wiper as defined in claim 1 , wherein each wiper has less than about 0.06 ppm potassium, less than about 0.05 ppm chloride, less than about 0.05 ppm magnesium, less than about 0.20 ppm calcium, and less than about 0.30 ppm sodium.
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Frequently asked questions
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- What does patent US11779963B2 cover?
- A sorptive wiper for cleaning is disclosed, the wipe comprising a cleaned and dried sorptive material having fewer than 150 contaminant fibers per square meter that are greater than 100 μm in length.
- Who is the assignee on this patent?
- Illinois Tool Works
- What technology area does this patent fall under?
- Primary CPC classification B08B7/028. Mapped technology areas include Operations & Transport.
- When was this patent published?
- Publication date Tue Oct 10 2023 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).