Methods and apparatus for common excitation of frequency generators

Patent metadata

Field	Value
Publication number	US-11749504-B2
Application number	US-201815908065-A
Country	US
Kind code	B2
Filing date	Feb 28, 2018
Priority date	Feb 28, 2018
Publication date	Sep 5, 2023
Grant date	Sep 5, 2023

Abstract

Methods and apparatus for supplying radio frequency (RF) power to a process chamber. An RF generator is configured with a capability to operate with an RF power output independent of a reference frequency or synchronize the RF output power to the reference frequency. A clock ramp is used to change an RF power output frequency of the RF output power to match the reference frequency when the frequencies are in an unlocked state. When the RF power output frequency reaches the reference frequency, the RF power output can be locked to the reference frequency.

First claim

The invention claimed is:

1. A method of supplying radio frequency (RF) power to a process chamber, comprising:
generating a reference frequency in a first RF generator that is configured to be output by the first RF generator for use as a reference by multiple RF generators;
generating a second frequency in the first RF generator as a first RF power output frequency of a first RF out to a first match network connected to the first RF generator; and
decoupling the first RF power output frequency of the first RF out of the first RF generator from the reference frequency before the first RF power output frequency of the first RF out is adjusted independent of the reference frequency, wherein a frequency value of the reference frequency is maintained for the multiple RF generators by the first RF generator while the first RF power output frequency of the first RF out is adjusted.

2. The method of claim 1 , further comprising:
coupling the first RF power output frequency to the reference frequency; and
adjusting the first RF power output frequency and the reference frequency to a new reference frequency using a first clock ramp.

3. The method of claim 1 , further comprising:
adjusting the first RF power output frequency to the reference frequency using a second clock ramp to couple the first RF power output frequency to the reference frequency; and
coupling the first RF power output frequency to the reference frequency when the first RF power output frequency reaches the reference frequency.

4. The method of claim 3 , further comprising:
adjusting the first RF power output frequency to the reference frequency using a plurality of second clock ramps when the reference frequency is varying over time.

5. The method of claim 4 , further comprising:
changing to another one of the plurality of second clock ramps based on the reference frequency at a time of the change.

6. The method of claim 1 , further comprising:
receiving, by a second RF generator, the reference frequency from the first RF generator, wherein the second RF generator is configured to generate a third frequency as a second RF power output frequency of a second RF out to a second match network connected to the second RF generator; and
automatically decoupling the second RF power output frequency of the second RF generator from the reference frequency before the second RF power output frequency is adjusted independent of the reference frequency.

7. The method of claim 6 , further comprising:
outputting, by the second RF generator, the reference frequency to at least a third RF generator independent of the second RF power output frequency of the second RF out.

8. The method of claim 6 , further comprising:
adjusting the second RF power output frequency to the reference frequency using a second clock ramp to couple the second RF power output frequency to the reference frequency; and
automatically coupling the second RF power output frequency to the reference frequency when the second RF power output frequency reaches the reference frequency.

9. A method of supplying radio frequency (RF) power to at least one process chamber with at least one set of RF generators, comprising:
generating a reference frequency in a master RF generator;
transmitting the reference frequency from the master RF generator to a slave RF generator;
configuring the slave RF generator to transmit the reference frequency independent of a slave RF power output frequency to other linked slave frequency generators, wherein the slave RF generator is configured to generate the slave RF power output frequency as a slave RF power output to a slave match network connected to the slave RF generator;
generating a master RF power output frequency for a master RF power output of the master RF generator, wherein the master RF power output frequency is output to a master match network connected to the master RF generator;
decoupling the master RF power output frequency of the master RF generator from the reference frequency generated by the RF master generator before the master RF power output frequency is adjusted independent of the reference frequency while maintaining a frequency value of the reference frequency for the slave RF generator as the master RF power output frequency is adjusted; and
automatically decoupling the slave RF power output frequency of the slave RF generator from the reference frequency before the slave RF power output frequency is adjusted independent of the reference frequency.

10. The method of claim 9 , further comprising:
coupling the master RF power output frequency to the reference frequency; and
adjusting the master RF power output frequency and the reference frequency to a new reference frequency using a first clock ramp.

11. The method of claim 9 , further comprising:
adjusting the master RF power output frequency to the reference frequency using a second clock ramp to couple the master RF power output frequency to the reference frequency and
coupling the master RF power output frequency to the reference frequency when the master RF power output frequency reaches the reference frequency.

12. The method of claim 9 , further comprising:
adjusting the slave RF power output frequency to the reference frequency using a third clock ramp to couple the slave RF power output frequency to the reference frequency; and
automatically coupling the slave RF power output frequency to the reference frequency when the slave RF power output frequency reaches the reference frequency.

13. An apparatus for supplying radio frequency (RF) power to a process chamber, comprising:
an RF power generator with an RF power output configured to adjust an RF power output frequency of the RF power output independent of a reference frequency and to lock the RF power output frequency to the reference frequency using a first clock ramp to change the RF power output frequency of the RF power output to match the reference frequency when the RF power output frequency is unlocked from the reference frequency, wherein the RF power generator generates the RF power output frequency of the RF power output and the reference frequency and maintains a frequency value of the reference frequency as the RF power output is adjusted.

14. The apparatus of claim 13 , wherein the RF power generator has a first frequency generator to generate the reference frequency and a second frequency generator to generate the RF power output frequency.

15. The apparatus of claim 13 , wherein the RF power generator decouples the RF power output frequency from the reference frequency when the RF power output frequency is frequency tuning or ramping.

16. The apparatus of claim 13 , wherein the RF power generator adjusts the RF power output frequency with the reference frequency when the reference frequency changes using a second clock ramp to change the RF power output frequency and the reference frequency when the RF power output frequency is locked to the reference frequency.

17. The apparatus of claim 13 , wherein the RF power generator determines a frequency rate of change for a varying reference frequency and periodically adjusts a clock ramp used to converge the RF power output frequency to the varying reference frequency.

18. The apparatus of claim 13 , wherein the RF power generator receives the reference frequency and outputs the reference frequency independent of the RF power output frequency.

19. The apparatus of claim 13 , wherein the RF power generator is configured to operate without an enable/disable common exci

Assignees

• Applied Materials Inc

Inventors

• Leray Gary

Classifications

• H01J37/32183 Primary

  Matching circuits · CPC title

• H01J37/32155 Primary

  Frequency modulation · CPC title

• H01J2237/334

  Etching · CPC title

• H01J37/32174 Primary

  Circuits specially adapted for controlling the RF discharge · CPC title

• H01J37/32165

  Plural frequencies · CPC title