Curing a shaped film using multiple images of a spatial light modulator

Patent metadata

Field	Value
Publication number	US-11747731-B2
Application number	US-202017100477-A
Country	US
Kind code	B2
Filing date	Nov 20, 2020
Priority date	Nov 20, 2020
Publication date	Sep 5, 2023
Grant date	Sep 5, 2023

Abstract

A shaping system and method of shaping with the shaping system. The shaping system may include a spatial light modulator. The shaping system may include a radiation source to illuminate the spatial light modulator with actinic radiation. The shaping system may include a beam splitter configured to receive actinic radiation from the spatial light modulator and emit a first image of the spatial light modulator and a second image of the spatial light modulator. The shaping system may include a beam combiner configured to receive the first image and the second image and emit a combined image. The combined image may include the first image; and the second image offset from the first image. The shaping system may include a projection system configured to receive the combined image and illuminate formable material between a template and a substrate with a projected image at a plane of the formable material.

First claim

What is claimed is:

1. A shaping system comprising:
a spatial light modulator;
a radiation source configured to illuminate the spatial light modulator with actinic radiation;
a beam splitter configured to receive actinic radiation from the spatial light modulator and emit a first image of the spatial light modulator and a second image of the spatial light modulator, wherein the first image is a part of the actinic radiation received from the spatial light modulator, and the second image is another part of the actinic radiation received from the spatial light modulator;
a beam combiner configured to receive the first image and the second image and emit a combined image that includes:
the first image; and
the second image, wherein the second image is offset from and overlapping with the first image; and

a projection system configured to receive the combined image and illuminate formable material between a template and a substrate with a projected image at a plane of the formable material.

2. The shaping system according to claim 1 , wherein:
the spatial light modulator has a plurality of modulation elements;
a modulation element pitch is a shortest distance between neighboring modulation elements among the plurality of modulation elements;
the projected image includes:
a first projected image of the spatial light modulator having a first pitch that is shortest distance between images of neighboring modulation elements in the first projected image at the plane of the formable material;
a second projected image of the spatial light modulator having a second pitch that is shortest distance between images of neighboring modulation elements in the second projected image at the plane of the formable material;
wherein the first projected image is offset from the second projected image by half of the first pitch.

3. The shaping system according to claim 2 , wherein a percent difference between the first pitch and the second pitch is less than 3%.

4. The shaping system according to claim 1 , further comprises:
a tilted window that controls the offset of the second image relative to the first image, wherein the tilted window is in an optical path between the beam splitter and the beam combiner.

5. The shaping system according to claim 1 , further comprises:
one or more mirrors arranged to guide the second image to the beam combiner such that the second image is offset from and overlapping with the first image at the beam combiner.

6. The shaping system according to claim 1 , wherein the spatial light modulator is: a digital micromirror device (DMD); a liquid crystal on silicon (LCoS) device; or a liquid crystal display (LCD).

7. The shaping system according to claim 1 , wherein:
the beam splitter is a first surface of an optical component; and
the beam combiner is a second surface of the optical component.

8. The shaping system according to claim 7 , wherein the optical component includes a plurality of surfaces which guide the second image to the second surface such that the second image is offset from the first surface at the second surface.

9. The shaping system according to claim 1 , wherein:
the beam splitter is a polarizing beam splitter; and
the beam combiner is a polarization beam combiner.

10. The shaping system according to claim 1 , wherein the beam splitter is a cube beam splitter or a plate beam splitter.

11. The shaping system according to claim 1 , further comprising:
a thermal radiation source configured to illuminate the spatial light modulator with thermal radiation;
wherein the first image travels along a first path between the beam splitter and the beam combiner;
wherein the beam splitter is further configured to receive thermal radiation from the spatial light modulator and emit a third image of the spatial light modulator along the first path towards the beam splitter;
wherein a first ratio is an intensity of the actinic radiation in the first image emitted by the beam splitter divided by an intensity of actinic radiation received by the beam splitter;
wherein a second ratio is an intensity of the thermal radiation in the third image emitted by the beam splitter divided by an intensity of thermal radiation received by the beam splitter; and
wherein the second ratio is at least 30% greater than the first ratio.

12. The shaping system according to claim 1 , further comprising:
a template chuck configured to hold the template;
a substrate chuck configured to hold the substrate;
a dispensing system configured to dispense the formable material onto the substrate;
a positioning system configured to bring the template into contact with formable material;
a second actinic radiation source configured to supply additional actinic radiation to the formable material between the template and the substrate to cure the formable material.

13. The shaping system according to claim 1 , further comprising:
one or more optical components between the beam splitter and the beam combiner; and
wherein the one or more optical components adjust a first set of optical properties at the plane of the formable material of the first image to be different than a second set of optical properties at the plane of the formable material of the second image.

14. The shaping system according to claim 13 , wherein:
the first set of the optical properties includes a first distance between a focal plane of the first image and the plane of the formable material;
the second set of the optical properties includes a second distance between a focal plane of the second image and the plane of the formable material; and
first distance is different from the second distance.

15. The shaping system according to claim 13 , wherein:
the first set of the optical properties includes a first position of the first image at the plane of the formable material;
the second set of the optical properties includes a second position of the second image at the plane of the formable material; and
a difference between the first position and the second position is a projected lateral beam displacement is less than a projected modulation element pitch of the spatial light modulator.

16. The shaping system according to claim 13 , wherein:
the first set of the optical properties includes a first projected pitch between the images of modulation elements in the first image at the plane of the formable material;
the second set of the optical properties includes a second projected pitch between the images of modulation elements in the second image at the plane of the formable material; and
a percent difference between the first projected pitch and the second projected pitch is less than 3%.

17. The shaping system according to claim 13 , wherein:
the first set of the optical properties includes:
a first average distance of a focal plane of the first image from the plane of the formable material; and
a first size of the first image at the plane of the formable material;

the second set of the optical properties includes:
a second average distance of a focal plane of the second image from the plane of the formable material; and
a second size of the second image at the plane of the formable material;

the first average distance is greater than the second average distance; and
the first size is less than the second size.

18. The shaping system according to claim 13 , wherein the one or more optical components includes an aperture which reduces a size of the first image.

19. A shaping method comprising:
illuminating a spatial

Assignees

• Canon Kk
• Canon Kabishiki Kaisha

Inventors

• Irving James W
• Fletcher Edward Brian
• Roy Nilabh Kumar

Classifications

• G03F7/2004 Primary

  characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light · CPC title

• G02B27/12

  operating by refraction only · CPC title

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• H04N9/312

  Driving therefor (driving of electronic spatial light modulators in displays other than projection devices G09G3/34, G09G3/36; control of liquid crystal elements G02F1/133; control of micromechanical modulators G02B26/08) · CPC title

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title