Inspection device and substrate processing apparatus
US-2016314575-A1 · Oct 27, 2016 · US
US11747323B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11747323-B2 |
| Application number | US-202217962163-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 7, 2022 |
| Priority date | Nov 17, 2017 |
| Publication date | Sep 5, 2023 |
| Grant date | Sep 5, 2023 |
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Provided are systems and methods for analyte detection and analysis. A system can comprise an open substrate configured to rotate. The open substrate can comprise an array of immobilized analytes. A solution comprising a plurality of probes may be directed, via centrifugal force, across the array during rotation of the substrate, to couple at least one of the plurality of probes with at least one of the analytes to form a bound probe. A detector can be configured to detect a signal from the bound probe via continuous rotational area scanning of the substrate.
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What is claimed is: 1. A method for analyte detection or analysis, comprising: (a) rotating a substrate about a rotational axis, the substrate comprising a plurality of analytes immobilized thereon; and (b) using a detector comprising one or more sensors to image the substrate during the rotating to detect a plurality of signals from the plurality of analytes, wherein an imaging field of view comprises at least a first region and a second region which are disposed at different radial distances with respect to the rotational axis, wherein the one or more sensors comprises a plurality of segments, wherein a first segment and a second segment of the plurality of segments (i) image the first region and the second region, respectively, and (ii) are clocked independently with respect to each other based at least in part on different tangential velocities of the first region and the second region, respectively, at the different radial distances. 2. The method of claim 1 , wherein the imaging field of view comprises a plurality of regions which are disposed at different radial distances with respect to the rotational axis, wherein the plurality of regions comprises the first region and the second region, and wherein each segment of the plurality of segments (i) images a different region of the plurality of regions, and (ii) is clocked independently with respect to other segments of the plurality of segments based at least in part on a respective tangential velocity of the different region. 3. The method of claim 1 , wherein the detector comprises a time delay and integration (TDI), pseudo-TDI rapid frame rate, charge coupled device (CCD), or complementary metal oxide semiconductor (CMOS) detector. 4. The method of claim 1 , wherein the detector comprises a continuous area scanning detector that continuously images the substrate during the rotating. 5. The method of claim 1 , wherein the first segment and the second segment are clocked at different rates. 6. The method of claim 1 , wherein the plurality of segments is arranged linearly. 7. The method of claim 1 , wherein the detector comprises an immersion objective lens, wherein during (b) the immersion objective lens is in contact with a fluid that is in contact with the substrate. 8. The method of claim 7 , wherein the fluid is in a container, and wherein an electric field is used to regulate a hydrophobicity of one or more surfaces of the container to retain at least a portion of the fluid contacting the immersion objective lens and the substrate. 9. The method of claim 1 , wherein the plurality of analytes comprises nucleic acid molecules. 10. The method of claim 9 , wherein the plurality of signals comprises signals detected from at least a fluorescently labeled nucleotide. 11. The method of claim 9 , further comprising sequencing the nucleic acid molecules based at least in part on the plurality of signals. 12. The method of claim 1 , wherein the imaging field of view is segmented into at least 4 regions. 13. The method of claim 1 , wherein one or more controllers process the plurality of signals collected by the one or more sensors. 14. The method of claim 1 , wherein the substrate is substantially planar. 15. The method of claim 1 , wherein the substrate is patterned or textured. 16. The method of claim 1 , wherein the substrate is an open substrate. 17. The method of claim 1 , wherein the substrate comprises a plurality of individually addressable locations, and wherein the plurality of analytes is immobilized at the plurality of individually addressable locations. 18. The method of claim 17 , wherein the substrate comprises at least 1,000,000,000 individually addressable locations. 19. A system for analyte detection or analysis, comprising: a chamber configured to receive a substrate comprising a plurality of analytes immobilized thereon; a rotational unit configured to rotate the substrate about a rotational axis; and a detector comprising one or more sensors configured to image the substrate during rotation of the substrate to detect a plurality of signals from the plurality of analytes, wherein the one or more sensors comprise a plurality of segments, wherein, during imaging, (i) an imaging field of view comprises at least a first region and a second region which are disposed at different radial distances with respect to the rotational axis, and (ii) the detector is configured to use a first segment and a second segment of the plurality of segments to image the first region and the second region, respectively, by independently clocking the first segment and the second segment with respect to each other based at least in part on different tangential velocities of the first region and the second region, respectively, at the different radial distances. 20. The system of claim 19 , wherein, during imaging, the imaging field of view comprises at least 4 regions.
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