Stable landing above RF conductor in MEMS device

Patent metadata

Field	Value
Publication number	US-11746002-B2
Application number	US-202016907129-A
Country	US
Kind code	B2
Filing date	Jun 19, 2020
Priority date	Jun 22, 2019
Publication date	Sep 5, 2023
Grant date	Sep 5, 2023

Abstract

A method of forming a microelectromechanical device wherein a beam of the microelectromechanical device may deviate from a resting to an engaged or disengaged position through electrical biasing. The microelectromechanical device comprises a beam disposed above a first RF conductor and a second RF conductors. The microelectromechanical device further comprises at least a center stack, a first RF stack, a second RF stack, a first stack formed on a first base layer, and a second stack formed on a second base layer, each stack disposed between the beam and the first and second RF conductors. The beam is configured to deflect downward to first contact the first stack formed on the first base layer and the second stack formed on the second base layer simultaneously or the center stack, before contacting the first RF stack and the second RF stack simultaneously.

First claim

What is claimed is:

1. A microelectromechanical device, comprising:
a backplane comprising at least two RF conductors;
a plurality of bottom electrodes disposed on the backplane;
a top electrode disposed above and spaced from the backplane;
a beam disposed between the plurality of bottom electrodes and the top electrode, the beam movable between the at least two RF conductors and the top electrode;
a first base layer and a second base layer disposed on the backplane and spaced from the beam;
a first stack disposed on the first base layer; and
a second stack disposed on the second base layer, wherein the first and second stacks are unaligned with the at least two RF conductors.

2. The microelectromechanical device of claim 1 , further comprising at least one additional stack disposed on the backplane and spaced from the beam, wherein the at least one additional stack has a height less than a height of the first and second stacks.

3. The microelectromechanical device of claim 2 , wherein the at least one additional stack comprises a first RF stack, a second RF stack, and a center stack.

4. The microelectromechanical device of claim 3 , wherein the beam is configured to contact the center stack prior to contacting the first RF stack and the second RF stack.

5. The microelectromechanical device of claim 4 , wherein the beam is configured to contact the first and second stacks prior to contacting the first RF stack and the second RF stack.

6. The microelectromechanical device of claim 1 , wherein the first and second stacks each comprise at least one layer of ruthenium.

7. The microelectromechanical device of claim 1 , wherein the first and second stacks, the beam, and the top electrode are enclosed in a sealed cavity.

8. The microelectromechanical device of claim 1 , wherein the beam comprises at least two beam contact layers disposed above the at least two conductors.

9. The microelectromechanical device of claim 1 , wherein the beam comprises a bottom beam layer and a top beam layer coupled together by a plurality of via links.

10. The microelectromechanical device of claim 9 , further comprising a plurality of bumps disposed on the top beam layer.

11. A method of forming a microelectromechanical device, comprising:
depositing and patterning a first layer on a backplane comprising at least two RF conductors;
depositing a bottom dielectric layer over the first layer;
etching one or more openings in the bottom dielectric layer, wherein the one or more openings are unaligned with the at least two RF conductors;
depositing and patterning a base layer over the bottom dielectric layer and the one or more openings to form a first base layer and a second base layer in the one or more openings;
depositing a first stack on the first base layer and a second stack on the second base layer;
forming a beam above the bottom dielectric layer and the first and second stacks, wherein the beam is spaced from the bottom dielectric layer and first and second stacks;
depositing a partial cavity layer above the beam, wherein a portion of the partial cavity layer forms a top electrode; and
depositing a seal layer above the beam and the partial cavity layer to enclose the beam in a cavity.

12. The method of claim 11 , further comprising etching one or more portions of the bottom dielectric layer.

13. The method of claim 12 , further comprising:
depositing at least two RF stacks above the at least two RF conductors onto two etched portions of etched one or more second portions; and
depositing a center stack onto an etched portion of the etched one or more second portions, wherein the center stack is disposed between the at least two RF stacks.

14. The method of claim 13 , wherein the at least two RF stacks and the center stack each have a height less than a height of the first and second stacks.

15. The method of claim 11 , wherein forming the beam comprises:
depositing a bottom beam layer;
depositing a spun layer on the bottom beam layer;
forming a plurality of via links in the spun layer;
depositing a top beam layer on the spun layer; and
removing the spun layer.

Assignees

• Qorvo Us Inc

Inventors

• Van Kampen Robertus Petrus
• Barron Lance
• Knipe Richard L

Classifications

• B81B3/0067 Primary

  Mechanical properties · CPC title

• B81C1/00349

  Creating layers of material on a substrate · CPC title

• B81C1/00444

  Surface micromachining, i.e. structuring layers on the substrate · CPC title

• B81B2207/11

  Structural features, others than packages, for protecting a device against environmental influences · CPC title

• B81C1/00158

  Diaphragms, membranes (manufacture process for semi-permeable inorganic membranes B01D67/0039) · CPC title