Ga2O3-BASED SINGLE CRYSTAL SUBSTRATE
US-2015380500-A1 · Dec 31, 2015 · US
US11739438B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11739438-B2 |
| Application number | US-202016863078-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 30, 2020 |
| Priority date | Apr 30, 2019 |
| Publication date | Aug 29, 2023 |
| Grant date | Aug 29, 2023 |
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A method for increasing the conductivity of a metal oxide with crystal structure belonging to the 4/m 3 2/m point group is provided. Single crystal oxides with crystal structure belonging to 4/m 3 2/m point group are contacted with nitrogen gas, with oxygen gas, with nitrogen gas, with oxygen gas, then with nitrogen gas to increase the conductivity of the metal oxide with crystal structure belonging to the 4/m 3 2/m point group.
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We claim: 1. A method for increasing the conductivity of an oxide with crystal structure belonging to the 4/m 3 2/m point group comprising: (a) providing a single crystal metal oxide with crystal structure belonging to 4/m 3 2/m point group, (b) contacting the single crystal metal oxide with crystal structure belonging to 4/m 3 2/m point group with nitrogen gas at a temperature in the range of at least ambient temperature to at most 80° C. thereby providing a first nitrogen contacted metal oxide; (c) contacting the first nitrogen contacted metal oxide with oxygen gas at a temperature in the range of at least ambient temperature to at most 80° C. thereby providing a first oxygen contacted metal oxide; (d) contacting the first oxygen contacted metal oxide with nitrogen gas at a temperature in the range of at least ambient temperature to at most 80° C. thereby providing a second nitrogen contacted metal oxide; (e) contacting the second nitrogen contacted metal oxide with oxygen gas at a temperature in the range of at least 40° C. to at most 80° C. thereby providing a second oxygen contacted metal oxide; and (f) contacting the second oxygen contacted metal oxide with nitrogen gas at a temperature in the range of at least 40° C. to at most 80° C. thereby providing an increased conductivity crystalline metal oxide with a crystal structure belonging to 4/m 3 2/m point group oxide. 2. The method of claim 1 wherein the single crystal metal oxide with crystal structure belonging to 4/m 3 2/m point group have a purity of at least 98%. 3. The method of claim 1 wherein the single crystal metal oxide with crystal structure belonging to 4/m 3 2/m point group contains an element selected from the group consisting of group 1, 2, 3, and 4 elements of the periodic table of elements. 4. The method of claim 2 wherein the single crystal metal oxide with crystal structure belonging to 4/m 3 2/m point group contains an element selected from the group consisting of group 1, 2, 3, and 4 elements of the periodic table of elements. 5. The method of claim 1 wherein in step (b) the nitrogen gas is contacted at a temperature in the range of at least 30° C. to at most 60° C. 6. The method of claim 5 wherein in step (c) the oxygen gas is contacted at a temperature in the range of at least 30° C. to at most 60° C. 7. The method of claim 6 wherein in step (d) the nitrogen gas is contacted at a temperature in the range of at least 40° C. to at most 60° C. 8. The method of claim 1 wherein the single crystal metal oxide with crystal structure belonging to 4/m 3 2/m point group is selected from the group consisting of sodium oxide, hafnium oxide, titanium oxide, nickel oxide, manganese oxide, and all the alkaline earth metal oxides. 9. The method of claim 2 wherein the single crystal metal oxide with crystal structure belonging to 4/m 3 2/m point group have a purity of at least 99%.
Heat treatment (C30B33/04, C30B33/06 take precedence) · CPC title
Magnesia · CPC title
Oxides · CPC title
by unit-cell parameters, atom positions or structure diagrams · CPC title
Electric properties · CPC title
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