Method of coating an object

Patent metadata

Field	Value
Publication number	US-11738366-B2
Application number	US-201916549490-A
Country	US
Kind code	B2
Filing date	Aug 23, 2019
Priority date	Jan 25, 2019
Publication date	Aug 29, 2023
Grant date	Aug 29, 2023

Abstract

Disclosed is a method of coating an object made of a first material and a second material that is different from the first material. The method includes dispensing a polymer solution onto the object, wherein the polymer solution has a property that wets one of the first material and the second material and dewets the other one of the first material and the second material.

First claim

What is claimed is:

1. A method of coating comprising:
providing an object made of a metal and a dielectric, wherein the metal has a line-space pattern with a predetermined half-pitch dimension P;
providing a polymer solution that forms dewetted droplets with an average diameter D when spin coated onto a homogeneous surface from which it dewets, wherein a polymer comprising the polymer solution causes D to be less than P;
dispensing the polymer solution onto the object; and
spinning the object at a predetermined number of revolutions per minute (RPM) no more than 30 seconds after dispensing the polymer solution onto the object.

2. The method of coating of claim 1 wherein the metal is copper and the dielectric is silicon dioxide.

3. The method of claim 1 wherein the polymer solution comprises a solvent and a polymer.

4. The method of claim 3 wherein the polymer comprises a poly(acrylate) containing at least one semi-fluorinated pendant group.

5. The method of claim 3 wherein the solvent is trifluoroethanol.

6. The method of claim 3 wherein the polymer is an oligomer.

7. The method of claim 6 wherein the oligomer is 8F 7 : poly(1H,1H,5H-octafluoropentyl acrylate).

8. The method of claim 6 wherein the oligomer is 8F 15 : poly(1H,1H,5H-octafluoropentyl acrylate).

9. The method of claim 6 wherein the oligomer is 8F 30 : poly(1H,1H,5H-octafluoropentyl acrylate).

10. The method of claim 6 wherein the oligomer is 0F 7 : poly(methyl acrylate).

11. The method of claim 6 wherein the oligomer is 3F 7 : poly(2,2,2-trifluoroethyl acrylate).

12. The method of claim 6 wherein the oligomer is 4F 7 : poly(2,2,3,3-tetrafluoropropyl acrylate).

13. The method of claim 6 wherein the oligomer is 13F 7 : poly(1H,1H,2H,2H-perfluorooctyl acrylate).

14. The method of claim 6 wherein the oligomer is 4F 200 : poly(2,2,3,3-tetrafluoropropyl acrylate).

15. The method of claim 1 wherein the predetermined RPM is between 1000 RPM and 10,000 RPM.

16. The method of claim 1 wherein a D/P ratio is between 0.40 and 0.65.

Assignees

• Univ California

Inventors

• Bates Christopher
• Zhang Yuanyi

Classifications

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• B05D1/32 Primary

  using means for protecting parts of a surface not to be coated, e.g. using stencils, resists · CPC title

• B05D1/002

  the substrate being rotated · CPC title

• B05D1/005

  Spin coating · CPC title

• C08F293/005

  using free radical "living" or "controlled" polymerisation, e.g. using a complexing agent · CPC title