Container, container partition plate, substrate processing system, and substrate transfer method

Patent metadata

Field	Value
Publication number	US-11735448-B2
Application number	US-202016809741-A
Country	US
Kind code	B2
Filing date	Mar 5, 2020
Priority date	Mar 7, 2019
Publication date	Aug 22, 2023
Grant date	Aug 22, 2023

Abstract

A container for consumables includes multiple holding portions, a partition plate and a fixer. The multiple holding portions are configured to respectively accommodate the consumables, each of which is loaded into and unloaded from one direction. The partition plate includes a first portion formed to be disposed between a light emitting part and a light receiving part of a detector, and the partition plate is accommodated in one of the multiple holding portions. The fixer is configured to fix the container so that the consumables are arranged on a transfer path to be loaded into and unloaded from the multiple holding portions.

First claim

The invention claimed is:

1. A container for consumables, comprising:
an inner wall;
multiple holding portions configured to respectively accommodate the consumables, each of which is loaded and unloaded in one direction;
a partition plate including a first portion formed to be disposed between a light emitting part of a detector and a light receiving part of the detector, wherein the partition plate is accommodated in one of the multiple holding portions; and
a fixer configured to fix the container so that the consumables are arranged on a transfer path to be loaded into and unloaded from the multiple holding portions,
wherein the partition plate comprises a sealing portion formed at an outer periphery of the partition plate,
wherein the outer periphery of the partition plate has a vertically extending outwardly facing outer peripheral shape corresponding to a vertically extending inwardly facing inner peripheral shape of the inner wall of the container, and the outer periphery of the partition plate is in contact with the inner wall of the container via the sealing portion along the inner wall of the container, so that the vertically extending outwardly facing outer peripheral shape of the partition plate contacts the vertically extending inwardly facing inner peripheral shape of the inner wall of the container and the partition plate separates an inner space of the container into a first space including a part of the multiple holding portions and a second space including the other part of the multiple holding portions, and
wherein the container defines an enclosure which is configured to enclose the inner space of the container when a lid is closed, and contact the between the partition plate and the inner wall maintains the first space separate from the second space in the enclosure.

2. The container of claim 1 , wherein the partition plate has a thickness greater than a thickness of a substrate.

3. The container of claim 1 , wherein the partition plate has substantially the same thickness as a thickness of the consumables.

4. The container of claim 1 , wherein the first portion is disposed between two notches of the partition plate, the two notches having shapes corresponding to shapes of the light emitting part and the light receiving part, respectively.

5. The container of claim 2 , wherein the partition plate has substantially the same thickness as a thickness of the consumables.

6. The container of claim 2 , wherein the first portion is disposed between two notches of the partition plate, the two notches having shapes corresponding to shapes of the light emitting part and the light receiving part, respectively.

7. The container of claim 5 , wherein the first portion is disposed between two notches of the partition plate, the two notches having shapes corresponding to shapes of the light emitting part and the light receiving part, respectively.

8. The container of claim 3 , wherein the first portion is disposed between two notches of the partition plate, the two notches having shapes corresponding to shapes of the light emitting part and the light receiving part, respectively.

9. The container of claim 1 , wherein the container includes an opening, and the partition plate is accommodated in one of the multiple holding portions in a mounted position, and
wherein the partition plate includes a first notch and a second notch which face toward the opening of the container in the mounted position.

10. The container of claim 9 , wherein the first portion of the partition plate is between the first notch and the second notch, and the first portion includes a curved portion which protrudes toward the opening in the mounted position.

Assignees

• Tokyo Electron Ltd

Inventors

• Toyomaki Toshiaki
• Kaise Seiichi
• Numakura Masahiro
• Takeyama Yuki

Classifications

• H10P72/7602

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/0608

  of substrates stored in a container, a magazine, a carrier, a boat or the like · CPC title

• H10P72/0454

  surrounding a central transfer chamber · CPC title

• H10P72/14 Primary

  Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls · CPC title

• H10P72/3402

  Mechanical parts of transfer devices · CPC title