US11735397B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11735397-B2 |
| Application number | US-202117222937-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 5, 2021 |
| Priority date | Feb 19, 2021 |
| Publication date | Aug 22, 2023 |
| Grant date | Aug 22, 2023 |
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Disclosed herein is a device for measuring a plasma ion density, which includes a transceiver antenna configured to apply and receive a microwave, of which a frequency is varied, to and from plasma, and a frequency analyzer configured to analyze a frequency of the microwave received from the transceiver antenna and measure a cut-off frequency, wherein the frequency of the microwave applied to the plasma is varied in the range of 100 kHz to 500 MHz.
Opening claim text (preview).
What is claimed is: 1. A device for measuring a plasma ion density, comprising: a transceiver antenna configured to apply and receive a microwave, of which a frequency is varied, to and from plasma; and a frequency analyzer configured to analyze one frequency of the microwave received from the transceiver antenna and measure a cut-off frequency of mass center momentum of a plurality of types of ions, wherein the frequency of the microwave applied to the plasma is varied in a range of 100 kHz to 500 MHz. 2. The device of claim 1 , further comprising a converter configured to convert the cut-off frequency, which is measured by the frequency analyzer, into the plasma ion density. 3. The device of claim 1 , wherein the transceiver antenna includes a probe-type antenna. 4. The device of claim 1 , wherein the transceiver antenna includes a loop-type antenna. 5. The device of claim 1 , wherein the transceiver antenna includes a planar ring-type antenna. 6. The device of claim 1 , wherein the transceiver antenna includes a planar cone-type antenna. 7. The device of claim 1 , wherein the transceiver antenna includes a planar bar-type antenna. 8. A method of diagnosing plasma, comprising: generating plasma in a vacuum chamber; applying and receiving a microwave, of which a frequency is varied in the vacuum chamber, to and from the plasma; analyzing the frequency of the microwave received from a transceiver antenna and measuring a cut-off frequency; converting the cut-off frequency, which is measured by a frequency analyzer, into a plasma ion density and a plasma electron density; and comparing the plasma ion density with the plasma electron density, which are converted by a converter.
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