DC magnetron sputtering

Patent metadata

Field	Value
Publication number	US-11718908-B2
Application number	US-202117241237-A
Country	US
Kind code	B2
Filing date	Apr 27, 2021
Priority date	Apr 11, 2016
Publication date	Aug 8, 2023
Grant date	Aug 8, 2023

Abstract

A method of depositing a film on a substrate is provided. The method includes positioning the substrate on a substrate support in a chamber and depositing the film on the substrate using a DC magnetron sputtering process in which an electrical bias signal causes ions to bombard the substrate. The substrate support includes a central region surrounded by an edge region, the central region being raised with respect to the edge region, and the substrate is positioned on the central region so that a portion of the substrate overlays the edge region and is spaced apart therefrom.

First claim

What is claimed is:

1. A method of depositing a film on a substrate comprising the steps of:
positioning the substrate on an uppermost surface of a substrate support in a chamber; and
depositing the film on the substrate using a DC magnetron sputtering process in which an electrical bias causes ions from a target to bombard the substrate thereby providing improved stress uniformity across the film, wherein the film is a metal nitride film, and wherein the substrate is rotated during the deposition of the film; and
in which the substrate support comprises a central region surrounded by an edge region, the edge region having an upwardly facing surface, the central region being raised with respect to the edge region, wherein the central region comprises a plateau above the edge region, the plateau defining the uppermost surface, and the substrate is positioned on the central region so that a portion of the substrate overlays the edge region and is spaced apart therefrom, wherein the substrate positioned on the substrate support has (a) a central portion that is disposed in contact with the plateau of the central region of the substrate support, and (b) an outermost peripheral portion that overlays and extends beyond the edge region of the substrate support, wherein the substrate is a planar substrate and contacts the substrate support across an entire width of the plateau, wherein there is no direct contact between the outermost peripheral portion of the substrate and the edge region of the substrate support such that the outermost peripheral portion of the substrate is completely spaced apart from the substrate support, wherein a dark space is formed above the upwardly facing surface proximate the central region between the upwardly facing surface and the outermost peripheral portion of the substrate, wherein the target has a target diameter greater than a diameter of the edge region, wherein the substrate support comprises a step having a height in the range of 0.1 to 1.0 mm leading from the edge region to the central region, and wherein a ratio of a diameter of the plateau of the central region to the diameter of the edge region is from 60/194 to 114/194.

2. The method of claim 1 , wherein the film is an aluminium nitride film.

3. The method of claim 2 , wherein the film is a (002) oriented aluminium nitride film.

4. The method of claim 1 , wherein the film is a bimetallic nitride film.

5. The method of claim 1 , wherein the electrical bias produces a DC bias.

6. The method of claim 5 , wherein the electrical bias is an RF bias.

7. The method of claim 1 , wherein the chamber comprises a process space.

8. The method of claim 7 , wherein the DC magnetron sputtering process is performed by a DC magnetron comprising:
a cathode disposed within the chamber above the substrate, a DC power supply connected to the cathode and magnets adjacent to the cathode, wherein the cathode includes a backing plate and the target, wherein the target is disposed in the process space of the chamber on a first side of the backing plate and the magnets are disposed outside of the chamber on a second side of the backing plate opposite the target.

9. The method of claim 8 , wherein the DC magnetron is a pulsed DC magnetron.

10. The method of claim 1 , wherein the substrate support is configured for a temperature range from 100° C. to 400° C.

11. The method of claim 1 , wherein a diameter of the plateau is from 60 mm to 114 mm.

12. The method of claim 11 , wherein the height of the step is in the range of 0.2 to 0.5 mm.

13. The method of claim 1 , wherein the plateau of the central region defines the uppermost surface of the substrate support against which the substrate lies, and wherein the uppermost surface is substantially planar.

14. The method of claim 1 , wherein a chamber pressure during the depositing is from 1-20 mTorr.

Assignees

• Spts Technologies Ltd

Inventors

• Haymore Scott
• Rastogi Amit
• Hyndman Rhonda
• Burgess Steve
• Moncrieff Ian

Classifications

• C23C14/505 Primary

  for rotation of the substrates · CPC title

• C23C14/345

  using substrate bias · CPC title

• C23C14/3407

  Cathode assembly for sputtering apparatus, e.g. Target · CPC title

• C23C14/3485

  using pulsed power to the target · CPC title

• C23C14/35 Primary

  by application of a magnetic field, e.g. magnetron sputtering {(C23C14/3457 takes precedence)} · CPC title