Sputtering target and manufacturing method therefor

Patent metadata

Field	Value
Publication number	US-11718907-B2
Application number	US-201816491151-A
Country	US
Kind code	B2
Filing date	Mar 16, 2018
Priority date	Mar 30, 2017
Publication date	Aug 8, 2023
Grant date	Aug 8, 2023

Abstract

A sputtering target according to one embodiment is an integrated sputtering target comprising a target portion and a backing plate portion, both of them being made of copper and unavoidable impurities, wherein a Vickers hardness Hv is 90 or more, and wherein a flat ratio of crystal grains in a cross section orthogonal to a sputtering surface is 0.35 or more and 0.65 or less.

First claim

What is claimed is:

1. An integrated sputtering target comprising a target portion forming a front surface layer of the sputtering target and a backing plate portion, which is integral with the target portion, forming a back surface layer of the sputtering target, both of the target portion and the backing plate portion being made of copper and unavoidable impurities, wherein an entirety of the integrated sputtering target has a Vickers hardness Hv of 90 or more, and wherein a flat ratio of crystal grains in a cross section orthogonal to a sputtering surface to be used for sputtering is 0.35 or more and 0.65 or less.

2. The sputtering target according to claim 1 , wherein the target portion and the backing plate portion further contain one or more elements selected from the group consisting of Fe, Cr, Ni, Si, Ag, S, and P in a total nonzero amount up to 0.01% by mass.

3. A method for manufacturing the integrated sputtering target according to claim 1 , the method comprising:
melting a raw material to cast an ingot comprising copper and unavoidable impurities; and subjecting the ingot to hot forging, first cold rolling or first cold forging, a heat treatment, and second cold rolling or second cold forging in this order,
wherein the second cold rolling or the second cold forging is carried out at a change rate of from 20% to 40%,
and wherein in the second cold rolling or the second cold forging, crystal grains are crushed in a thickness direction to change a flat ratio of the crystal grains in a cross section orthogonal to a sputtering surface to be used for sputtering.

4. The method according to claim 3 , wherein the heat treatment is carried out at a temperature of from 200° C. to 500° C. for 0.5 hours to 3 hours.

5. The method according to claim 3 , wherein the first cold rolling or the first cold forging is carried out at a change rate of 70% or more.

6. The method according to claim 3 , wherein the hot forging is carried out at a temperature of from 300° C. to 900° C.

7. The method according to claim 3 , wherein the ingot further contains one or more elements selected from the group consisting of Fe, Cr, Ni, Si, Ag, S, and P in a total amount of 0.01% mass or less.

8. The sputtering target according to claim 1 , wherein the sputtering target has an average crystal grain size of 10 μm or more and 60 μm or less.

Assignees

• Jx Nippon Mining & Metals Corp

Inventors

• Otsuki Tomio
• Morii Yasushi

Classifications

• C23C14/3414 Primary

  Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy · CPC title

• C22C9/01

  with aluminium as the next major constituent · CPC title

• C22C9/05

  with manganese as the next major constituent · CPC title

• C22C9/06

  with nickel or cobalt as the next major constituent · CPC title

• C22F1/08

  of copper or alloys based thereon · CPC title