Image sensor and imaging apparatus having the same
US-2021066375-A1 · Mar 4, 2021 · US
US11705472B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11705472-B2 |
| Application number | US-201916598576-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 10, 2019 |
| Priority date | Oct 10, 2019 |
| Publication date | Jul 18, 2023 |
| Grant date | Jul 18, 2023 |
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A biosensor is provided. The biosensor includes a substrate, a first photodiode, a second photodiode, an angle-sensitive filter, and an immobilization layer. The first photodiode and the second photodiode are disposed in the substrate and define a first pixel and a second pixel, respectively. The first pixel and the second pixel receive a light. The angle-sensitive filter is disposed on the substrate. The immobilization layer is disposed on the angle-sensitive filter.
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What is claimed is: 1. A biosensor, comprising: a substrate; a first photodiode and a second photodiode disposed in the substrate and defining a first pixel and a second pixel, respectively, wherein the first pixel and the second pixel receive a light emitted from an analyte that is immobilized above and corresponds to the first pixel; an angle-sensitive filter disposed on the substrate and configured to cause spectrum shift in the light, wherein the biosensor is configured to distinguish different portions of the light emitted from the analyte by a property of the spectrum shift caused by the angle-sensitive filter; an excitation light rejection filter disposed on the angle-sensitive filter; and an immobilization layer disposed on the excitation light rejection filter and configured to receive the analyte, wherein the excitation light rejection filter is a dielectric interference filter with a metal layer, and a thickness of the excitation light rejection filter is 0.1 μm to 2 μm. 2. The biosensor as claimed in claim 1 , wherein the first pixel receives a first portion of the light and the second pixel receives a second portion of the light, wherein the first portion enters the angle-sensitive filter at a first incident angle, the second portion enters the angle-sensitive filter at a second incident angle, and the first incident angle is smaller than the second incident angle, and wherein the first incident angle and the second incident angle are angles between incident directions of the first portion and the second portion of the light and a normal line of the angle sensitive filter, respectively. 3. The biosensor as claimed in claim 2 , wherein the first incident angle is from 0 degrees to 60 degrees, and the second incident angle is equal to or smaller than 85 degrees. 4. The biosensor as claimed in claim 1 , further comprising a waveguide embedded in the immobilization layer. 5. The biosensor as claimed in claim 1 , further comprising an aperture structure embedded in the immobilization layer and configured to confine an optical path of the light. 6. The biosensor as claimed in claim 5 , further comprising a waveguide on the aperture structure. 7. The biosensor as claimed in claim 1 , wherein the angle-sensitive filter is a dielectric interference filter with alternating deposition of high and low refractive indices dielectric materials, a plasmonic filter, or a dielectric metasurface structure. 8. The biosensor as claimed in claim 2 , further comprising: a third photodiode disposed in the substrate and defining a third pixel; and a first color filter disposed adjacent to the angle-sensitive filter and corresponding to the third pixel. 9. The biosensor as claimed in claim 8 , further comprising: a fourth photodiode disposed in the substrate and defining a fourth pixel; and a second color filter disposed adjacent to the angle-sensitive filter and corresponding to the fourth pixel. 10. The biosensor as claimed in claim 2 , further comprising a shielding layer surrounding the angle-sensitive filter. 11. The biosensor as claimed in claim 10 , wherein the shielding layer comprises a material with high reflective index. 12. The biosensor as claimed in claim 1 , wherein the angle-sensitive filter is a shortpass filter, a bandpass filter, a longpass filter, or a multiple bandpass filter. 13. A method of distinguishing a light, comprising: placing the analyte on the biosensor according to claim 2 ; making the analyte emit the light; obtaining a first signal intensity of the first portion of the light and a second signal intensity of the second portion of the light; and distinguishing the light according to the first signal intensity and the second signal intensity. 14. The method as claimed in claim 13 , wherein the step of distinguishing the light according to the first signal intensity and the second signal intensity comprises: defining the first signal intensity as Pass or No Pass depending on whether the first signal intensity is higher or lower than a first threshold; defining the second signal intensity as Pass or No Pass depending on whether the second signal intensity is higher or lower than a second threshold; and distinguishing the light according to a combination of the definitions of the first signal intensity and the second signal intensity. 15. The method as claimed in claim 13 , wherein the step of distinguishing the light according to the first signal intensity and the second signal intensity comprises: calculating a first signal intensity ratio of the second signal intensity to the first signal intensity; defining the first signal intensity ratio as H or L depending on whether the ratio is higher than a predetermined ratio or lower than the predetermined ratio; and distinguishing the light according to the definition of the first signal intensity ratio. 16. A method of distinguishing a light, comprising: placing the analyte on the biosensor according to claim 8 , wherein the first color filter is irradiated by a third portion of the light, wherein the third pixel receives the third portion of the light, and the third portion of the light enters the first color filter at a third incident angle that is different from the first incident angle, and wherein the third incident angle is an angle between an incident direction of the third portion of the light and the normal line of the first color filter; making the analyte emit the light; obtaining a first signal intensity of the first portion of the light, a second signal intensity of the second portion of the light, and a third signal intensity of the third portion of the light; and distinguishing the light according to the first signal intensity, the second signal intensity and the third signal intensity. 17. The method as claimed in claim 16 , wherein the step of distinguishing the light according to the first signal intensity, the second signal intensity and the third signal intensity comprises: defining the signal intensities as Pass or No Pass depending on whether the signal intensities are higher or lower than thresholds; distinguishing the light according to a combination of the definitions of the first signal intensity, the second signal intensity and the third signal intensity. 18. The method as claimed in claim 16 , wherein the step of distinguishing the light according to the first signal intensity, the second signal intensity and the third signal intensity comprises: calculating a first signal intensity ratio of the first signal intensity to the third signal intensity and a second signal intensity ratio of the second signal intensity to the third signal intensity; plotting a cluster distribution graph of the first signal intensity ratio and the second signal intensity ratio; and distinguishing the light according to the cluster distribution graph.
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