Biosensors for biological or chemical analysis and methods of manufacturing the same

Patent metadata

Field	Value
Publication number	US-2016356715-A1
Application number	US-201415175489-A
Country	US
Kind code	A1
Filing date	Dec 9, 2014
Priority date	Dec 10, 2013
Publication date	Dec 8, 2016
Grant date	—

Abstract

Biosensor including a device base having a sensor array of light sensors and a guide array of light guides. The light guides have input regions that are configured to receive excitation light and light emissions generated by biological or chemical substances. The light guides extend into the device base toward corresponding light sensors and have a filter material. The device base includes device circuitry electrically coupled to the light sensors and configured to transmit data signals. The biosensor also includes a shield layer having apertures that are positioned relative to the input regions of corresponding light guides such that the light emissions propagate through the apertures into the corresponding input regions. The shield layer extends between adjacent apertures and is configured to block the excitation light and the light emissions incident on the shield layer between the adjacent apertures.

First claim

1 . A biosensor comprising:
a flow cell; and a detection device having the flow cell coupled thereto, the flow cell and the detection device forming a flow channel that is configured to have biological or chemical substances therein that generate light emissions in response to an excitation light, the detection device including:
a device base having a sensor array of light sensors and a guide array of light guides, the light guides having input regions that are configured to receive the excitation light and the light emissions from the flow channel, the light guides extending into the device base from the input regions toward corresponding light sensors and having a filter material that is configured to filter the excitation light and permit the light emissions to propagate toward the corresponding light sensors, the device base including device circuitry electrically coupled to the light sensors and configured to transmit data signals based on photons detected by the light sensors; and
a shield layer extending between the flow channel and the device base, the shield layer having apertures that are positioned relative to the input regions of corresponding light guides such that the light emissions propagate through the apertures into the corresponding input regions, the shield layer extending between adjacent apertures and configured to block the excitation light and the light emissions incident on the shield layer between the adjacent apertures.

2 . The biosensor of claim 1 , wherein the input regions of the light guides are located within the corresponding apertures of the shield layer or are located a depth into the device base.

3 . The biosensor of claim 1 , further comprising a passivation layer that extends along the shield layer such that the shield layer is between the passivation layer and the device base, the passivation layer extending across the apertures.

4 . The biosensor of claim 3 , wherein the filter material of the light guides is an organic filter material, the passivation layer extending directly along the input regions of the light guides and isolating the organic filter material from the shield layer.

5 . The biosensor of claim 3 , wherein the passivation layer extends directly along the input regions of the light guides at corresponding material interfaces, the material interfaces being located within the corresponding apertures of the shield layer or located a depth into the device base.

6 . The biosensor of claim 3 , wherein the passivation layer extends into the apertures and forms an array of reaction recesses, the reaction recesses extending toward or being located within corresponding apertures.

7 . (canceled)

8 . The biosensor of claim 6 , wherein the reaction recesses have corresponding base surfaces, the base surfaces being located within the aperture or located a depth into the device base.

9 . The biosensor of claim 1 , wherein the device base includes peripheral crosstalk shields, each of the crosstalk shields surrounding one of the corresponding light guides, the crosstalk shields configured to reduce optical crosstalk between adjacent light sensors.

10 . (canceled)

11 . A biosensor comprising:
a flow cell; and a detection device having the flow cell coupled thereto, the flow cell and the detection device forming a flow channel that is configured to have biological or chemical substances therein that generate light emissions in response to an excitation light, the detection device including:
a device base having a sensor array of light sensors and a guide array of light guides, the light guides configured to receive the excitation light and the light emissions from the flow channel, each of the light guides extending into the device base along a central longitudinal axis from an input region of the light guide toward a corresponding light sensor of the sensor array, the light guides including a filter material that is configured to filter the excitation light and permit the light emissions to propagate therethrough toward the corresponding light sensors, the device base including device circuitry that is electrically coupled to the light sensors and configured to transmit data signals based on photons detected by the light sensors;
wherein the device base includes peripheral crosstalk shields located therein that at least partially surround corresponding light guides of the guide array, the crosstalk shields at least partially surrounding the corresponding light guides about the respective longitudinal axis to reduce optical crosstalk between adjacent light sensors.

12 . The biosensor of claim 11 , wherein the crosstalk shields surround the input regions of the corresponding light guides.

13 . The biosensor of claim 11 , wherein the crosstalk shields include crosstalk rings that circumferentially surround the corresponding light guide.

14 . The biosensor of claim 11 , wherein the device base includes a complementary-metal-oxide semiconductor (CMOS) and the device circuitry and the crosstalk shields include metallic elements located within dielectric layers of the device base, the crosstalk shields being electrically separate from the device circuitry.

15 . The biosensor of claim 11 , further comprising a shield layer extending between the flow channel and the device base, the shield layer having apertures that are positioned relative to the input regions of corresponding light guides of the guide array, the apertures permitting the light emissions to propagate therethrough into the input regions, the shield layer extending between adjacent apertures and configured to block the excitation light and the light emissions incident on the shield layer between the adjacent apertures.

16 - 17 . (canceled)

18 . The biosensor of claim 15 , wherein the crosstalk shield abuts or is immediately adjacent to the shield layer.

19 . The biosensor of claim 11 , wherein the crosstalk shields are first crosstalk shields, the device base including second crosstalk shields, wherein each of the light guides of the guide array is at least partially surrounded by corresponding first and second crosstalk shields.

20 . The biosensor of claim 19 , wherein the first and second crosstalk shields are spaced apart from each other along the corresponding longitudinal axis.

21 . The biosensor of claim 19 , wherein the first and second crosstalk shields have different dimensions.

22 . A method of manufacturing a biosensor, the method comprising:
providing a device base having a sensor array of light sensors and device circuitry that is electrically coupled to the light sensors and configured to transmit data signals based on photons detected by the light sensors, the device base having an outer surface; applying a shield layer to the outer surface of the device base; forming apertures through the shield layer; forming guide cavities that extend from corresponding apertures toward a corresponding light sensor of the sensor array; depositing filter material within the guide cavities, wherein a portion of the filter material extends along the shield layer; curing the filter material; removing the filter material from the shield layer, the filter material within the guide cavities forming light guides; and applying a passivation layer to the shield layer such that the passivation layer extends directly along the shield layer and across the apertures.

23 - 36 . (canceled)

37 . The biosensor of claim 3 , wherein the passivatio

Assignees

• Illumina Inc

Inventors

• Zhong Cheng Frank
• Finkelstein Hod
• Boyanov Boyan
• Dehlinger Dietrich
• Segale Darren

Classifications

• G01N2021/6441

  with two or more labels · CPC title

• G01N21/05

  Flow-through cuvettes (G01N21/09 takes precedence; handling fluid samples G01N1/10) · CPC title

• G01N21/6428 Primary

  Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes" (in vivo A61B5/00; immunoassay G01N33/53) · CPC title

• G01N21/645 Primary

  Specially adapted constructive features of fluorimeters · CPC title

• G01N2201/061

  Sources · CPC title