Coupling for connecting analytical systems with vibrational isolation

Patent metadata

Field	Value
Publication number	US-11699582-B2
Application number	US-202117468478-A
Country	US
Kind code	B2
Filing date	Sep 7, 2021
Priority date	Sep 11, 2020
Publication date	Jul 11, 2023
Grant date	Jul 11, 2023

Abstract

A coupling for connecting together vacuum-based analytical systems requiring to be vibrationally isolated, comprising: a tubular connector having a longitudinal axis, the connector comprising a first end for connection to a first analytical system and a flexible portion reducing transmission of vibrations and permitting displacement of the first analytical system in a direction transverse to the longitudinal axis of the connector; and a seal longitudinally separated from the flexible portion, for vacuum sealing between the connector and a second analytical system; wherein the connector contains ion optics for transmitting ions between the first and second analytical systems.

First claim

The invention claimed is:

1. A coupling for connecting together vacuum-based analytical systems requiring to be vibrationally isolated, comprising:
a tubular connector having a longitudinal axis, the connector comprising a first end for connection to a first analytical system and a flexible portion for reducing transmission of vibrations and permitting displacement of the first analytical system in a direction transverse to the longitudinal axis of the connector; and
a seal longitudinally separated from the flexible portion, for vacuum sealing between the connector and a second analytical system;
wherein the connector contains ion optics for transmitting ions between the first and second analytical systems.

2. A coupling according to claim 1 , wherein the flexible portion is located at or near the first end of the connector.

3. A coupling according to claim 1 , wherein the flexible portion is a bellows.

4. A coupling according claim 1 , wherein the seal is located at or near a second end of the connector opposite from the first end.

5. A coupling according to claim 1 , wherein the seal is for sealing between atmospheric pressure outside the analytical systems and a high or ultra-high vacuum inside the analytical systems.

6. A coupling according to claim 5 , wherein the seal comprises a first seal and a second seal, the second seal being further from the flexible portion than the first seal, wherein the first seal is for sealing against atmospheric pressure and the second seal is for sealing against the high or ultra-high vacuum.

7. A coupling according to claim 6 , wherein a space between the first and second seals is configured to be differentially pumped to a pressure that is intermediate between atmospheric pressure and the vacuum inside the analytical systems.

8. A coupling according to claim 6 , wherein the flexible portion is a first flexible portion and the connector further comprises a second flexible portion, which is located between the first seal and the second seal.

9. A coupling according to claim 8 , wherein the second flexible portion is a bellows.

10. A coupling according to claim 6 , wherein the first and second seals do not create metal-to-metal contact and/or the first and second seals are both not electrically conductive and/or the first and second seals are O-rings.

11. A coupling according to claim 6 , wherein the first seal has a higher stiffness than the second seal.

12. A coupling according to claim 6 , wherein the first seal is an elastomer seal, preferably Viton and/or the second seal is a polymer seal, preferably PTFE.

13. A coupling according to claim 1 , wherein the ion optics comprise a multipole for guiding ions.

14. A coupling according to claim 13 , wherein one end of the multipole is rotatably supported inside the connector and the other end of the multipole is supported inside the first analytical system.

15. A coupling according to claim 14 , wherein a centre of rotation of the multipole lies on the longitudinal axis of the connector at a position near to or in the same plane as the first seal.

16. A coupling according to claim 14 , wherein the one end of the multipole is connected to a further multipole by a Cardan joint.

17. A coupling according to claim 13 , wherein the end of the multipole supported inside one of the analytical systems is located with a sliding fit within a housing of that analytical system.

18. A coupling according to claim 1 , wherein relative movement between the analytical systems in the longitudinal direction is controlled by means of one or more stops and/or one or more proximity sensors.

19. A coupling according to claim 13 , wherein a distance, L, between the centre of the flexible portion of the connector and the first seal is such that any radial energy spread of ions caused by displacement of the multipole in a direction transverse to the longitudinal axis is less than the radial energy spread of the ions entering the multipole.

20. A coupling according to claim 19 , wherein any added radial energy spread of ions caused by displacement of the multipole in a direction transverse to the longitudinal axis is <50%, <40%, <30%, <20%, <10%, or <5%, of the radial energy spread of the ions entering the multipole.

21. A coupling according to claim 1 , wherein one of the analytical systems is a mass spectrometer and the other analytical system is an imaging system utilizing charged particles.

22. A coupling according to claim 21 , wherein the imaging system is selected from: a TEM, an SEM, an electron holography (EH) microscope, an imaging mass spectrometer (MSI) using secondary ion mass spectrometry (SIMS), and an imaging mass spectrometer (MSI) using lasers, preferably MALDI or MALDI-2.

Assignees

• Thermo Fisher Scient Bremen Gmbh
• Fei Co
• Thermo Fisher Scient Breman Gmbh

Inventors

• Makarov Alexander
• Balschun Wilko
• Fort Kyle
• Liu Kun

Classifications

• H01J49/063 Primary

  Multipole ion guides, e.g. quadrupoles, hexapoles · CPC title

• H01J2237/0216

  Means for avoiding or correcting vibration effects · CPC title

• H01J37/02

  Details · CPC title

• H01J2237/182

  Obtaining or maintaining desired pressure · CPC title

• F16L51/03 Primary

  comprising two or more bellows · CPC title