Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam

Patent metadata

Field	Value
Publication number	US-11699563-B2
Application number	US-202117339085-A
Country	US
Kind code	B2
Filing date	Jun 4, 2021
Priority date	Oct 30, 2020
Publication date	Jul 11, 2023
Grant date	Jul 11, 2023

Abstract

An ion implantation system, ion source, and method are provided, where an ion source is configured to ionize an aluminum-based ion source material and to form an ion beam and a by-product including a non-conducting material. An etchant gas mixture has a predetermined concentration of fluorine and a noble gas that is in fluid communication with the ion source. The predetermined concentration of fluorine is associated with a predetermined health safety level, such as approximately a 20% maximum concentration of fluorine. The etchant gas mixture can have a co-gas with a concentration less than approximately 5% of argon. The aluminum-based ion source material can be a ceramic member, such as a repeller shaft, a shield, or other member within the ion source.

First claim

The invention claimed is:

1. An ion implantation system, comprising:
a ceramic member comprising an aluminum-based ion source material;
an ion source configured to ionize the aluminum-based ion source material and form an ion beam therefrom, and whereby the ionization of the aluminum-based ion source material further forms a by-product comprising a non-conducting material, and wherein the ceramic member comprises a shield within the ion source, wherein the shield does not comprise an electrode;
a pressurized gas source in fluid communication with the ion source, wherein the pressurized gas source contains no dopant material and comprises an etchant gas mixture comprising a predetermined concentration of fluorine gas and a noble gas, wherein the predetermined concentration of fluorine gas comprises less than approximately 20% fluorine gas;
a beamline assembly configured to selectively transport the ion beam; and
an end station configured to accept the ion beam for implantation of ions into a workpiece.

2. The ion implantation system of claim 1 , wherein the noble gas comprises one or more of helium and argon.

3. The ion implantation system of claim 1 , wherein the pressurized gas source further comprises a co-gas.

4. The ion implantation system of claim 3 , wherein the co-gas comprises argon in a concentration of less than approximately 5%.

5. The ion implantation system of claim 1 , wherein the etchant gas mixture is in a pre-mixed form within a pressurized bottle and comprises a mixture of the fluorine gas and one or more of argon and helium gases.

6. The ion implantation system of claim 5 , wherein the pressurized bottle comprises less than approximately 5% argon.

7. The ion implantation system of claim 1 , wherein the noble gas comprises a mixture of helium and argon.

8. An ion implantation system, comprising:
a ceramic member comprising an aluminum-based source material;
an ion source configured to ionize the aluminum-based source material and form an ion beam therefrom, and whereby the ionization of the aluminum-based source material further forms a by-product comprising a non-conducting material, wherein the ceramic member comprises a shield within the ion source, wherein the shield does not comprise an electrode;
an etchant gas supply containing no dopant material and comprising a pressurized bottle containing an etchant gas mixture of fluorine gas mixed with a noble gas, wherein the etchant gas supply is configured to introduce the etchant gas mixture to the ion source, wherein the fluorine gas is mixed with the noble gas at a health safety concentration;
a beamline assembly configured to selectively transport the ion beam; and
an end station configured to accept the ion beam for implantation of ions into a workpiece.

9. The ion implantation system of claim 8 , wherein the etchant gas mixture further comprises a co-gas.

10. The ion implantation system of claim 9 , wherein the co-gas comprises argon.

11. The ion implantation system of claim 10 , wherein the argon is at a concentration of less than approximately 5%.

12. The ion implantation system of claim 8 , wherein the noble gas comprises one or more of argon and helium gases.

13. The ion implantation system of claim 8 , wherein the etchant gas mixture comprises approximately 20% fluorine gas.

14. An ion implantation system, comprising:
an ion source comprising a ceramic member comprising an aluminum-based ceramic dopant material, wherein the ceramic member comprises a shield within the ion source and does not comprise an electrode, and wherein the ion source is configured to ionize the aluminum-based ceramic dopant material and form an ion beam therefrom, and whereby the ionization of the aluminum-based ceramic dopant material further forms a by-product comprising an insulating material;
a pressurized gas bottle in fluid communication with the ion source, wherein the pressurized gas bottle contains no dopant material and comprises an etchant gas mixture comprising a non-reacted mixture of less than approximately 20% fluorine and approximately 75% to 80% helium;
a beamline assembly configured to selectively transport the ion beam; and
an end station configured to accept the ion beam for implantation of ions into a workpiece.

Assignees

• Axcelis Tech Inc

Inventors

• Colvin Neil K
• Bassom Neil
• Xu Xiao

Classifications

• H01J27/22 Primary

  Metal ion sources · CPC title

• H01J37/08

  Ion sources; Ion guns · CPC title

• H01J2237/31701

  Ion implantation · CPC title

• H01J2237/08

  Ion sources · CPC title

• H01J37/3171 Primary

  for ion implantation · CPC title