Anodic aluminum oxide structure, probe head having same, and probe card having same

Patent metadata

Field	Value
Publication number	US-11696398-B2
Application number	US-202117209203-A
Country	US
Kind code	B2
Filing date	Mar 22, 2021
Priority date	Mar 27, 2020
Publication date	Jul 4, 2023
Grant date	Jul 4, 2023

Abstract

Proposed are an anodic aluminum oxide structure made of anodic aluminum oxide, a probe head having the same, and a probe card having the same. More particularly, proposed are an anodic aluminum oxide structure that has a fine size and pitch guide hole and facilitates insertion of a probe, a probe head having the same, and a probe card having the same.

First claim

What is claimed is:

1. A probe head, comprising:
an upper guide plate having an upper guide hole; and
a lower guide plate having a lower guide hole,
wherein at least one of the upper guide plate and the lower guide plate is composed of an anodic aluminum oxide sheet,
wherein the anodic aluminum oxide sheet comprises:
a porous layer having pores,
a barrier layer provided on at least one surface of the porous layer and having no pores, and
a plurality of through-holes provided through the porous layer and the barrier layer,
wherein a thickness of the barrier layer is larger than that of a partition wall between adjacent pores of the porous layer, and
wherein each of a plurality of probes passes through each of the plurality of through-holes as at least one of the upper guide hole and the lower guide hole.

2. The probe head of claim 1 , wherein the at least one of the upper guide plate and the lower guide plate is formed by stacking a plurality of anodic aluminum oxide sheets.

3. The probe head of claim 2 , wherein the anodic aluminum oxide sheets are joined to each other by a junction part.

4. The probe head of claim 3 , wherein the junction part is a photosensitive film capable of lithography.

5. A probe card, comprising:
a space transformer having a probe connection pad electrically connected to each of a plurality of probes; and
a probe head provided below the space transformer,
wherein the probe head comprises:
an upper guide plate having an upper guide hole; and
a lower guide plate having a lower guide hole,
wherein at least one of the upper guide plate and the lower guide plate is composed of an anodic aluminum oxide sheet, and
wherein the anodic aluminum oxide sheet comprises:
a porous layer having pores,
a barrier layer provided on at least one surface of the porous layer and having no pores, and
a plurality of through-holes provided through the porous layer and the barrier layer,
wherein a thickness of the barrier layer is larger than that of a partition wall between adjacent pores of the porous layer, and
wherein each of a plurality of probes passes through each of the plurality of through-holes as at least one of the upper guide hole and the lower guide hole.

6. An anodic aluminum oxide structure, comprising:
an anodic aluminum oxide sheet including:
a porous layer having pores,
a barrier layer provided on at least one surface of the porous layer and having no pores, and
a plurality of through-holes provided through the porous layer and the barrier layer,
wherein a thickness of the barrier layer is larger than that of a partition wall between adjacent pores of the porous layer.

Assignees

• Point Engineering Co Ltd

Inventors

• Ahn Bum Mo
• Park Seung Ho
• Lee Dong Eun

Classifications

• H05K1/115

  Via connections; Lands around holes or via connections (H05K1/112 takes precedence) · CPC title

• H05K2201/09618

  Via fence, i.e. one-dimensional array of vias · CPC title

• H05K1/0306 Primary

  Inorganic insulating substrates, e.g. ceramic, glass · CPC title

• G01R1/07378 Primary

  using an intermediate adapter, e.g. space transformers (G01R1/07371 takes precedence) · CPC title

• G01R1/0735 Primary

  arranged on a flexible frame or film · CPC title