Liquid metal thermal interface material application

Patent metadata

Field	Value
Publication number	US-11679407-B2
Application number	US-202016913986-A
Country	US
Kind code	B2
Filing date	Jun 26, 2020
Priority date	Jun 26, 2020
Publication date	Jun 20, 2023
Grant date	Jun 20, 2023

Abstract

To address technical problems facing silicon transient thermal management, a thermal interface material (TIM) may be used to provide improved thermal conduction. The TIM may include a liquid metal (LM) TIM, which may provide a significant reduction in thermal resistance, such as a thermal resistance RTIM≈0.01-0.025° C.-cm2/W. The LM TIM may be applied using a presoaked applicator, such as an open-cell polyurethane foam applicator that has been presoaked in a controlled amount of LM TIM. This LM presoaked applicator is then used to apply the LM TIM to one or more target thermal surfaces, thereby providing thermal and mechanical coupling between the LM TIM and the thermal surface. The resulting thermal surface and thermally conductive LM TIM may be used to improve thermal conduction for various silicon-based devices, including various high-power, high-performance system-on-chip (SoC) packages, such as may be used in portable consumer products.

First claim

What is claimed is:

1. A liquid metal thermal interface material application system comprising
a tapered liquid metal (LM) applicator presoaked with an LM thermal interface material (TIM), the tapered LM applicator including a mounting portion and an LM application region, the tapered LM applicator including a tapered geometry in which the LM application region is smaller than the mounting portion;
an applicator mount to retain the mounting portion of the tapered LM applicator; and
an actuator attached to the applicator mount, the actuator to:
compress the LM application region against a thermal surface;
swipe the LM application region across the thermal surface in a first direction deposit a first LM layer onto the thermal surface;
swipe the LM application region across the thermal surface in a second direction to deposit a second LM layer onto the first LM layer;

a measurement device to:
measure a first dispense weight of LM prior to the deposition of the LM first layer; and
measure a second dispense weight of LM subsequent to the deposition of the second layer of the LM;

wherein:
the actuator is further to swipe the LM application region across the thermal surface to deposit a third LM layer onto the second LM layer in response to a determination that an insufficient amount of LM TIM has been applied based on the first dispense weight and the second dispense weight;
the LM application region contacts only a portion of the thermal surface to reduce an adhesion between the LM application region and the thermal surface; and
the tapered LM applicator includes an open-cell foam applicator with an associated foam porosity configured to promote absorption and diffusion of the LM TIM into the open-cell foam applicator.

2. The system of claim 1 , the system further including:
a memory; and
processing circuitry to control the actuator to:
compress the LM application region against the thermal surface;
swipe the LM application region across the thermal surface in the first direction; and
swipe the LM application region across the thermal surface in the second direction.

3. The system of claim 2 , wherein the actuator includes:
a first single axis actuator to compress the LM application region in a first axis; and
a second single axis actuator to swipe the LM application region in a second axis perpendicular to the first axis, the second axis including the first direction and the second direction.

4. The system of claim 2 , wherein:
the actuator includes a third single axis actuator to reposition the LM application region in a third axis from a first position above the thermal surface to a second position above a second thermal surface; and
the third axis is orthogonal to the first axis and to the second axis.

5. The system of claim 2 , wherein the LM application region is smaller than the thermal surface to reduce surface tension between the thermal surface and the LM TIM in the LM application region, the reduced surface tension to improve an ability of the LM application region to be lifted from the thermal surface.

6. The system of claim 5 , wherein the open-cell foam applicator includes an open-cell polyurethane foam applicator.

7. The system of claim 2 , wherein:
the LM TIM includes an oxide;
the deposition of the first LM layer onto the thermal surface includes forming an oxide layer on the thermal surface to anchor the LM TIM to the thermal surface; and the second LM layer bonds to the oxide layer.

8. The system of claim 7 , wherein:
the LM TIM includes a gallium based LM; and
the oxide layer includes gallium oxide.

9. The system of claim 2 , wherein the foam porosity of the open-cell foam applicator is configured to:
absorb the TIM into the LM application region when the LM application region is submerged in the LM TIM; and
diffuse the LM TIM through the LM application region into the mounting portion.

Assignees

• Intel Corp

Inventors

• Arrington Kyle Jordan
• Petrini Joseph Blaine
• Mccann Aaron
• Devasenathipathy Shankar
• Matayabas Jr James Christopher
• Aghazadeh Mostafa
• Peterson Jerrod

Classifications

• H10W40/70

  Fillings or auxiliary members in containers or in encapsulations for thermal protection or control · CPC title

• H10W70/02

  of conductive package substrates serving as an interconnection, e.g. of metal plates (manufacture or treatment of leadframes H10W70/04) · CPC title

• C23C28/00 Primary

  Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D · CPC title

• H05K7/2039

  characterised by the heat transfer by conduction from the heat generating element to a dissipating body (arrangements for increasing/decreasing heat-transfer, e.g. fins details, F28F13/00) · CPC title

• B05D1/28

  performed by transfer from the surfaces of elements carrying the liquid or other fluent material, e.g. brushes, pads, rollers · CPC title