Thin gas transportation device

Patent metadata

Field	Value
Publication number	US-11668294-B2
Application number	US-202117168340-A
Country	US
Kind code	B2
Filing date	Feb 5, 2021
Priority date	Feb 18, 2020
Publication date	Jun 6, 2023
Grant date	Jun 6, 2023

Abstract

A thin gas transportation device includes an inlet plate, a resonance sheet, an actuating element, a first insulation frame attached to the actuating element, a conductive frame, and a second insulation frame attached to the conductive frame. The conductive frame has a conductive outer frame attached to the first insulation frame, an elastic conductive pin, and a conductive piece connected to an outer edge portion of the conductive outer frame. One end of the elastic conductive pin is connected to an inner edge portion of the conductive outer frame, and the other end of the elastic conductive pin extends obliquely toward the actuating element and forms a bent portion. The bent portion presses against the actuating element and is electrically connected to the actuating element, and the bent portion is strip-shaped.

First claim

What is claimed is:

1. A thin gas transportation device, comprising:
an inlet plate having:
a first surface;
a second surface opposite to the first surface;
a plurality of inlet holes respectively penetrating from the first surface to the second surface;
a convergence chamber recessed from the second surface, wherein the convergence chamber is located at a center portion of the second surface; and
a plurality of inlet channels recessed from the second surface, wherein one end of each of the plurality of inlet channels is connected to a corresponding inlet hole of the plurality of inlet holes, and the other end of each of the plurality of inlet channels is connected to the convergence chamber;

a resonance sheet attached to the second surface, wherein the resonance sheet has:
a central perforation disposed at a center portion of the resonance sheet;
a vibration portion disposed around the central perforation and corresponds to the convergence chamber; and
a fixed portion disposed around a periphery of the vibration portion, wherein the resonance sheet is attached to the inlet plate through the fixed portion;

an actuating element attached to the fixed portion of the resonance sheet;
a first insulation frame attached to the actuating element;
a conductive frame, having:
a conductive outer frame attached to the first insulation frame;
an elastic conductive pin, wherein one end of the elastic conductive pin is connected to an inner edge portion of the conductive outer frame, and the other end of the elastic conductive pin extends obliquely toward the actuating element and forms a bent portion, wherein the bent portion presses against the actuating element and is electrically connected to the actuating element, and wherein the bent portion is strip-shaped; and
a conductive piece connected to an outer edge portion of the conductive outer frame; and

a second insulation frame attached to the conductive frame;
and wherein the thin gas transportation device further comprises a thin valve structure attached to the second insulation frame, wherein the thin valve structure has:
a first thin plate having a hollowed-out area;
a valve frame having a valve sheet accommodation area;
a valve sheet disposed in the valve sheet accommodation area, wherein the valve sheet has a valve hole, and the valve hole is misaligned with the hollowed-out area; and
a second thin plate, having:
a ventilation surface;
a pressure relief surface opposite to the ventilation surface;
a ventilation groove recessed from the ventilation surface, wherein the ventilation groove is misaligned with the hollowed-out area of the first thin plate;
a ventilation hole disposed in the ventilation groove and hollowed out from the ventilation groove to the pressure relief surface, wherein the ventilation hole locates correspondingly to the valve hole;
a pressure relief hole, wherein the pressure relief hole and the ventilation groove are spaced apart with each other; and
a pressure relief channel recessed from the pressure relief surface, wherein one end of the pressure relief channel extends to an edge of the second thin plate, and the other end of the pressure relief channel is in communication with the pressure relief hole.

2. The thin gas transportation device according to claim 1 , wherein a width of the elastic conductive pin gradually shrinks from the inner edge portion of the conductive outer frame where the elastic conductive pin is connected to the bent portion.

3. The thin gas transportation device according to claim 1 , wherein the bent portion is higher than the conductive outer frame by an abutting distance.

4. The thin gas transportation device according to claim 3 , wherein the abutting distance is between 0.05 mm and 0.5 mm.

5. The thin gas transportation device according to claim 1 , wherein a conductive coating material is disposed between the elastic conductive pin and the actuating element.

6. The thin gas transportation device according to claim 1 , wherein the actuating element comprises:
a vibration plate having a square shape;
a frame disposed around the vibration plate;
a plurality of connection portions respectively connected between the vibration plate and the frame to provide a flexible support for the vibration plate; and
a piezoelectric sheet, wherein a shape and an area of the piezoelectric sheet are corresponding to a shape and an area of the vibration plate, the piezoelectric sheet is attached to the vibration plate, and the piezoelectric sheet presses against the bent portion so as to form an electrical connection between the piezoelectric sheet and the bent portion.

7. The thin gas transportation device according to claim 1 , wherein the first thin plate, the valve frame, and the second thin plate are sequentially stacked and assembled with each other.

8. The thin gas transportation device according to claim 1 , wherein a diameter of the ventilation hole is greater than a diameter of the valve hole.

9. The thin gas transportation device according to claim 1 , wherein the first thin plate, the valve frame, and the second thin plate are all made of a metal.

10. The thin gas transportation device according to claim 9 , wherein the metal material is stainless steel.

11. The thin gas transportation device according to claim 1 , wherein the shape of the hollowed-out area is the same as the shape of the ventilation groove.

12. The thin gas transportation device according to claim 1 , wherein the thickness of the first thin plate, the thickness of the valve frame, and the thickness of the second thin plate are the same.

13. The thin gas transportation device according to claim 12 , wherein the thickness of the first thin plate, the thickness of the valve frame, and the thickness of the second thin plate are all 2 mm.

14. The thin gas transportation device according to claim 7 , wherein the thickness of the first thin plate, the thickness of the valve frame, and the thickness of the second thin plate are the same.

15. The thin gas transportation device according to claim 14 , wherein the thickness of the first thin plate, the thickness of the valve frame, and the thickness of the second thin plate are all 2 mm.

16. The thin gas transportation device according to claim 8 , wherein the thickness of the first thin plate, the thickness of the valve frame, and the thickness of the second thin plate are the same.

17. The thin gas transportation device according to claim 16 , wherein the thickness of the first thin plate, the thickness of the valve frame, and the thickness of the second thin plate are all 2 mm.

18. The thin gas transportation device according to claim 9 , wherein the thickness of the first thin plate, the thickness of the valve frame, and the thickness of the second thin plate are the same.

19. The thin gas transportation device according to claim 18 , wherein the thickness of the first thin plate, the thickness of the valve frame, and the thickness of the second thin plate are all 2 mm.

20. The thin gas transportation device according to claim 10 , wherein the thickness of the first thin plate, the thickness of the valve frame, and the thickness of the second thin plate are the same.

21. The thin gas transportation device according to claim 20 , wherein the thickness of the first thin plate, the thickness of the valve frame, and the thickness of the second thin plate are all 2 mm.

Assignees

• Microjet Technology Co Ltd

Inventors

• Mou Hao-Jan
• Kao Chung-Wei
• Chen Shih-Chang
• Liao Hung-Hsin
• Han Yung-Lung
• Huang Chi-Feng
• Kuo Chun-Yi

Classifications

• F16K99/0015

  Diaphragm or membrane valves · CPC title

• F04B43/046 Primary

  with piezoelectric drive · CPC title

• H10N30/2047

  Membrane type · CPC title

• F04B45/047

  Pumps having electric drive · CPC title

• H10N30/875

  Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins · CPC title