Micro-gas pressure driving device

Patent metadata

Field	Value
Publication number	US-9989047-B2
Application number	US-201514823060-A
Country	US
Kind code	B2
Filing date	Aug 11, 2015
Priority date	Sep 15, 2014
Publication date	Jun 5, 2018
Grant date	Jun 5, 2018

Abstract

A micro-gas pressure driving device includes a miniature gas transportation module, a covering plate and a tube plate. The miniature gas transportation module includes a convergence plate, a resonance membrane and a piezoelectric actuator. When the piezoelectric actuator is activated to feed a gas into an input tube of the tube plate, the gas is sequentially transferred through a first input chamber, a second input chamber, an inlet, a convergence channel and a central opening of the convergence plate, a central aperture of the resonance membrane, and transferred downwardly through the piezoelectric actuator and an output chamber, and outputted from an output tube of the tube plate. The first input chamber is arranged between the covering plate and the input tube. The second input chamber is defined between the covering plate and the convergence plate. The output chamber is defined between the tube plate and the piezoelectric actuator.

First claim

What is claimed is:

1. A micro-gas pressure driving device, comprising:
a gas transportation module comprising a convergence plate, a resonance membrane and a piezoelectric actuator, wherein at least one inlet is formed in a first surface of the convergence plate, at least one convergence channel and a central opening are formed in a second surface of the convergence plate, and the at least one convergence channel is in communication with the at least one inlet, wherein the resonance membrane has a central aperture corresponding to the central opening of the convergence plate, wherein the convergence plate, the resonance membrane and the piezoelectric actuator are stacked on each other sequentially;
a covering plate disposed over the convergence plate of the gas transportation module; and
a tube plate disposed under the piezoelectric actuator of the gas transportation module, and comprising an input tube and an output tube,
wherein a first input chamber is located at a junction between the covering plate and the tube plate, a second input chamber is defined between the covering plate and the convergence plate of the gas transportation module, and an output chamber is defined between the tube plate and the piezoelectric actuator of the gas transportation module, wherein when the gas transportation module is activated to feed a gas into the input tube of the tube plate, the gas is sequentially transferred through the first input chamber, the second input chamber, the at least one inlet of the convergence plate, the at least one convergence channel of the convergence plate, the central opening of the convergence plate and the central aperture of the resonance membrane, and transferred through a vacant space of the piezoelectric actuator and the output chamber, and outputted from the output tube of the tube plate.

2. The micro-gas pressure driving device according to claim 1 , wherein the piezoelectric actuator comprises a suspension plate, an outer frame and a piezoelectric ceramic plate, wherein the suspension plate and the outer frame are connected with each other through at least one bracket, and the piezoelectric ceramic plate is attached on a surface of the suspension plate.

3. The micro-gas pressure driving device according to claim 2 , wherein the suspension plate of the piezoelectric actuator is a stepped structure including a lower portion and an upper portion, wherein a top surface of the upper portion is coplanar with a top surface of the outer frame, wherein the upper portion of the suspension plate or the top surface of the outer frame has a specified height with respect to the lower portion of the suspension plate or a surface of the at least one bracket.

4. The micro-gas pressure driving device according to claim 2 , wherein the piezoelectric ceramic plate of the piezoelectric actuator of the gas transportation module is attached on a bottom surface of the suspension plate, wherein the bottom surface of the suspension plate, a bottom surface of the outer frame and a bottom surface of the at least one bracket are coplanar with each other.

5. The micro-gas pressure driving device according to claim 2 , wherein the suspension plate, the outer frame and the at least one bracket are integrally formed with each other, and made of a metallic material.

6. The micro-gas pressure driving device according to claim 1 , wherein the gas transportation module further comprises at least one insulating plate and at least one conducting plate, wherein the at least one insulating plate and the at least one conducting plate are disposed under the piezoelectric actuator.

7. The micro-gas pressure driving device according to claim 1 , wherein the resonance membrane is made of a flexible material, wherein the resonance membrane and the piezoelectric actuator cooperatively generate a resonance effect.

8. The micro-gas pressure driving device according to claim 1 , wherein the resonance membrane and the piezoelectric actuator of the gas transportation module are separated from each other by a gap, so that a first chamber is defined between the resonance membrane and the piezoelectric actuator, wherein after the gas is transferred through the at least one inlet of the convergence plate, the gas is sequentially transferred through the at least one convergence channel of the convergence plate, the central opening of the convergence plate, the central aperture of the resonance membrane and the first chamber, and transferred through the vacant space of the piezoelectric actuator.

9. The micro-gas pressure driving device according to claim 1 , wherein the convergence plate comprises a first surface and a second surface, wherein the at least one inlet is formed in the first surface, and the at least one convergence channel and the central opening are formed in the second surface, wherein the at least one convergence channel of second surface is in communication with the corresponding inlet of the first surface.

Assignees

• Microjet Technology Co Ltd

Inventors

• Chen Shih-Chang
• Liao jia-yu
• Kuo Cheng-Tse

Classifications

• F04B53/16

  Casings; Cylinders; Cylinder liners or heads; Fluid connections · CPC title

• F04B45/047 Primary

  Pumps having electric drive · CPC title

• F04B43/046 Primary

  with piezoelectric drive · CPC title