Methods for producing high-density carbon films for hardmasks and other patterning applications

Patent metadata

Field	Value
Publication number	US-11664226-B2
Application number	US-202017035265-A
Country	US
Kind code	B2
Filing date	Sep 28, 2020
Priority date	Jun 29, 2020
Publication date	May 30, 2023
Grant date	May 30, 2023

Abstract

Embodiments of the present disclosure generally relate to the fabrication of integrated circuits. More particularly, the embodiments described herein provide methods for producing reduced-stress diamond-like carbon films for patterning applications. In one or more embodiments, a method includes flowing a deposition gas containing a hydrocarbon compound into a processing volume of a process chamber having a substrate positioned on an electrostatic chuck and generating a plasma above the substrate in the processing volume by applying a first RF bias to the electrostatic chuck to deposit a stressed diamond-like carbon film on the substrate. The stressed diamond-like carbon film has a compressive stress of −500 MPa or greater. The method further includes heating the stressed diamond-like carbon film to produce a reduced-stress diamond-like carbon film during a thermal annealing process. The reduced-stress diamond-like carbon film has a compressive stress of less than −500 MPa.

First claim

The invention claimed is:

1. A method of processing a substrate, comprising:
flowing a deposition gas comprising a hydrocarbon compound into a processing volume of a process chamber having a substrate positioned on an electrostatic chuck, wherein the processing volume is maintained at a pressure of about 0.5 mTorr to about 10 Torr;
generating a plasma above the substrate in the processing volume by applying a first RF bias to the electrostatic chuck to deposit a stressed diamond-like carbon film on the substrate, wherein the stressed diamond-like carbon film has a compressive stress of −500 MPa to about −1,000 MPa; and
heating the stressed diamond-like carbon film to a temperature of about 200° C. to about 600° C. for about 15 seconds to about 60 minutes to produce a reduced-stress diamond-like carbon film during a thermal annealing process, wherein the reduced-stress diamond-like carbon film has a compressive stress of about −100 MPa to less than −500 MPa and a density of greater than 1.5 g/cc.

2. The method of claim 1 , further comprising:
removing the substrate containing the stressed diamond-like carbon film from the process chamber;
positioning the substrate containing the stressed diamond-like carbon film in a thermal annealing chamber, wherein the stressed diamond-like carbon film is heated to produce the reduced-stress diamond-like carbon film during the thermal annealing process; and
removing the substrate containing the reduced-stress diamond-like carbon film from the thermal annealing chamber.

3. The method of claim 2 , wherein the stressed diamond-like carbon film is heated to produce the reduced-stress diamond-like carbon film at a temperature of about 300° C. to about 500° C. for about 2 minutes to about 15 minutes during the thermal annealing process.

4. The method of claim 2 , wherein the thermal annealing chamber is maintained at a pressure of about 10 mTorr to about 100 Torr during the thermal annealing process.

5. The method of claim 2 , wherein the stressed diamond-like carbon film is heated to produce the reduced-stress diamond-like carbon film under an environment comprising a gas during the thermal annealing process, wherein the gas comprises nitrogen (N 2 ), argon, helium, neon, or any combination thereof.

6. The method of claim 1 , wherein the compressive stress of reduced-stress diamond-like carbon film is about 40% to about 90% less than the compressive stress of the stressed diamond-like carbon film.

7. The method of claim 1 , wherein the stressed diamond-like carbon film has a compressive stress of about −600 MPa to about −1,000 MPa, and wherein the reduced-stress diamond-like carbon film has a compressive stress of about −150 MPa to about −400 MPa.

8. The method of claim 1 , wherein the reduced-stress diamond-like carbon film has an elastic modulus of greater than 60 GPa to about 200 GPa.

9. The method of claim 1 , wherein the reduced-stress diamond-like carbon film has a density of about 1.55 g/cc to less than 2 g/cc.

10. The method of claim 1 , wherein the processing volume is maintained at a pressure of about 5 mTorr to about 100 mTorr and the substrate is maintained at a temperature of about 0° C. to about 50° C. when generating the plasma and depositing the stressed diamond-like carbon film on the substrate.

11. The method of claim 1 , wherein the reduced-stress diamond-like carbon film comprises about 50 atomic percent to about 90 atomic percent of sp 3 hybridized carbon atoms.

12. The method of claim 1 , wherein the hydrocarbon compound comprises ethyne, propene, methane, butene, 1,3-dimethyladamantane, bicyclo[2.2.1]hepta-2,5-diene, adamantine, norbornene, or any combination thereof.

13. The method of claim 1 , wherein the deposition gas further comprises helium, argon, xenon, neon, hydrogen (H 2 ), or any combination thereof.

14. The method of claim 1 , wherein generating the plasma at the substrate further comprises applying a second RF bias to the electrostatic chuck, wherein the electrostatic chuck has a chucking electrode and an RF electrode separate from the chucking electrode, and wherein the first RF bias is applied to the RF electrode and the second RF bias is applied to the chucking electrode.

15. The method of claim 1 , wherein generating the plasma at the substrate further comprises applying a second RF bias to the electrostatic chuck, wherein the first RF bias is provided at a power of about 10 watts to about 3,000 watts at a frequency of about 350 KHz to about 100 MHz, and wherein the second RF bias is provided at a power of about 10 watts to about 3,000 watts at a frequency of about 350 KHz to about 100 MHz.

16. A method of processing a substrate, comprising:
flowing a deposition gas comprising a hydrocarbon compound into a processing volume of a plasma process chamber having a substrate positioned on an electrostatic chuck, wherein the processing volume is maintained at a pressure of about 0.5 mTorr to about 10 Torr;
generating a plasma above the substrate in the processing volume by applying a first RF bias to the electrostatic chuck to deposit a stressed diamond-like carbon film on the substrate, wherein the stressed diamond-like carbon film comprises about 50 atomic percent to about 90 atomic percent of sp 3 hybridized carbon atoms and has a compressive stress of −500 MPa to about −1,000 MPa and a density of greater than 1.5 g/cc;
transferring the substrate containing the stressed diamond-like carbon film from the plasma process chamber to a thermal annealing chamber; and
heating the stressed diamond-like carbon film to a temperature of about 200° C. to about 600° C. for about 15 seconds to about 60 minutes to produce a reduced-stress diamond-like carbon film during a thermal annealing process, wherein the reduced-stress diamond-like carbon film comprises about 50 atomic percent to about 90 atomic percent of sp 3 hybridized carbon atoms and has a compressive stress of about −100 MPa to less than −500 MPa and a density of greater than 1.5 g/cc.

17. The method of claim 16 , wherein the compressive stress of reduced-stress diamond-like carbon film is about 40% to about 90% less than the compressive stress of the stressed diamond-like carbon film.

18. The method of claim 16 , wherein the stressed diamond-like carbon film has a compressive stress of about −600 MPa to about −1,000 MPa and a density of about 1.55 g/cc to less than 2 g/cc, and wherein the reduced-stress diamond-like carbon film has a compressive stress of about −150 MPa to about −400 MPa and a density of about 1.55 g/cc to less than 2 g/cc.

19. The method of claim 16 , wherein the reduced-stress diamond-like carbon film has an elastic modulus of greater than 60 GPa to about 200 GPa.

20. A method of processing a substrate, comprising:
flowing a deposition gas comprising a hydrocarbon compound into a processing volume of a process chamber having a substrate positioned on an electrostatic chuck;
generating a plasma above the substrate in the processing volume by applying a first RF bias to the electrostatic chuck to deposit a stressed diamond-like carbon film on the substrate, wherein the stressed diamond-like carbon film has a compressive stress of −500 MPa to about −1,000 MPa; and
heating the stressed diamond-like carbon film to a temperature of about 200° C. to about 600° C. for about 15 seconds to about 60 minutes to produce a reduced-stress diamond-like carbon film during a thermal annealing process, wherein the reduced-stress diamond-like carbon film has a compressive stress of about −100 MPa to l

Assignees

• Applied Materials Inc

Inventors

• Hsu Jui-Yuan
• Manna Pramit
• Janakiraman Karthik

Classifications

• H10P76/405

  characterised by their composition, e.g. multilayer masks · CPC title

• H10P76/4085 Primary

  characterised by the processes involved to create the masks · CPC title

• H10P14/6902

  composed of carbon, e.g. alpha-C, diamond or hydrogen doped carbon · CPC title

• C23C16/50

  using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title

• C23C16/56

  After-treatment · CPC title