Optical filter

Patent metadata

Field	Value
Publication number	US-11650361-B2
Application number	US-201916722325-A
Country	US
Kind code	B2
Filing date	Dec 20, 2019
Priority date	Dec 27, 2018
Publication date	May 16, 2023
Grant date	May 16, 2023

Abstract

An optical filter may include a set of optical filter layers disposed onto a substrate. The set of optical filter layers may include a first subset of optical filter layers comprising a first material with a first refractive index. The first material may comprise at least silicon and hydrogen. The set of optical filter layers may include a second subset of optical filter layers comprising a second material with a second refractive index. The second material is different from the first material and the second refractive index is less than the first refractive index. The set of optical filter layers may include a third subset of optical filter layers comprising a third material different from the first material and the second material.

First claim

What is claimed is:

1. An optical filter, comprising:
a set of optical filter layers,
the set of optical filter layers including:
a first subset of optical filter layers comprising a first material with a first refractive index,
the first material comprising at least silicon and hydrogen, and
the first refractive index being at or greater than 3.6 at a particular wavelength;

a second subset of optical filter layers comprising a second material with a second refractive index,
the second material being different from the first material and the second refractive index being less than the first refractive index, and
the second material including a tantalum pentoxide (Ta 2 O 5 ) material; and

a third subset of optical filter layers comprising a third material different from the first material and the second material,
a first layer of the third subset of optical filter layers being deposited on and adjacent to a layer of the second subset of optical filter layers, and
the layer of the second subset of optical filter layers being deposited on and adjacent to a second layer of the third subset of optical filter layers.

2. The optical filter of claim 1 , where the first material includes at least one of:
a hydrogenated silicon (Si:H) material,
a silicon-germanium (SiGe) material, or
a hydrogenated silicon-germanium (SiGe:H) material.

3. The optical filter of claim 1 , further comprising:
a fourth subset of optical filter layers,
the fourth subset of optical filter layers comprising a fourth material different from at least the first material and the second material.

4. The optical filter of claim 1 , further comprising:
a substrate onto which the set of optical filter layers are disposed.

5. The optical filter of claim 4 , where the set of optical filter layers is disposed onto a first side of the substrate, and
where a coating is disposed onto a second side of the substrate.

6. The optical filter of claim 1 , where the optical filter is a bandpass filter.

7. The optical filter of claim 1 , where the optical filter is annealed.

8. The optical filter of claim 1 , wherein the first refractive index is greater than 3.64 at the particular wavelength.

9. The optical filter of claim 1 ,
wherein the first material includes a hydrogenated silicon (Si:H) material,
wherein the first refractive index is at or greater than 3.8 at the particular wavelength, and
wherein the particular wavelength is a wavelength of approximately 800 nm or 830 nm.

10. The optical filter of claim 1 , wherein the first subset of optical filter layers further comprises one or more of phosphorous, boron, or carbide.

11. The optical filter of claim 1 ,
wherein the first material includes a hydrogenated silicon (Si:H) material or a hydrogenated silicon-germanium (SiGe:H) material,
wherein the first refractive index is greater than 3.7 at the particular wavelength, and
wherein the particular wavelength is a wavelength of approximately 950 nm.

12. The optical filter of claim 1 , wherein the particular wavelength is a wavelength of approximately 800 nm or 830 nm.

13. An optical system, comprising:
an optical transmitter to emit near-infrared (NIR) light;
an optical filter to filter an input optical signal and provide a filtered input optical signal,
the input optical signal including the NIR light from the optical transmitter and ambient light from an optical source,
the optical filter including a set of dielectric thin film layers,
the set of dielectric thin film layers including:
a first subset of layers formed from a first material having a first refractive index,
a second subset of layers formed from a second material having a second refractive index less than the first refractive index,
the second material including at least one of a tantalum pentoxide (Ta 2 O 5 ) material, a magnesium fluoride (MgF 2 ) material, a zirconium oxide (ZrO 2 ) material, or a yttrium oxide (Y 2 O 3 ) material,
a third subset of layers formed from a third material different from the first material and the second material, and
a fourth subset of layers formed from a fourth material different from the first material, the second material, and the third material;

the first refractive index being at or greater than 3.6 at a particular wavelength,
the filtered input optical signal including a reduced intensity of ambient light relative to the input optical signal,
a first layer of the third subset of optical filter layers being on and adjacent to a layer of the second subset of optical filter layers, and
the layer of the second subset of optical filter layers being on and adjacent to a second layer of the third subset of optical filter layers; and

an optical receiver to receive the filtered input optical signal and provide an output electrical signal.

14. The optical system of claim 13 , where the optical filter is associated with greater than 80% transmissivity at approximately 950 nanometers.

15. The optical system of claim 13 , where the optical filter is associated with greater than 90% transmissivity at approximately 950 nanometers.

16. The optical system of claim 13 , where the optical filter is associated with greater than 80% transmissivity at approximately 1550 nanometers.

17. The optical system of claim 13 , where the optical filter is associated with greater than 90% transmissivity at approximately 1550 nanometers.

18. The optical system of claim 13 , where the first subset of layers are hydrogenated.

19. The optical system of claim 13 , wherein the particular wavelength is a wavelength of approximately 800 nm or 830 nm.

20. A method of making an optical filter comprising:
depositing a first subset of optical filter layers of the optical filter,
the first subset of optical filter layers comprising a first material with a first refractive index, and
the first refractive index being at or greater than 3.6 at a particular wavelength;

depositing a second subset of optical filter layers of the optical filter,
the second subset of optical filter layers comprising a second material with a second refractive index that is less than the first refractive index, and
the second material including at least one of a tantalum pentoxide (Ta 2 O 5 ) material, a magnesium fluoride (MgF 2 ) material, a zirconium oxide (ZrO 2 ) material, or a yttrium oxide (Y 2 O 3 ) material; and
depositing a third subset of optical filter layers comprising a third material different from the first material and the second material,
a first layer of the third subset of optical filter layers being deposited on and adjacent to a layer of the second subset of optical filter layers, and
the layer of the second subset of optical filter layers being deposited on and adjacent to a second layer of the third subset of optical filter layers.

21. The method of claim 20 , where one or more of the first subset of optical filter layers, the second subset of optical filter layers, or the third subset of optical filter layers are deposited via direct current sputtering.

22. The method of claim 20 , wherein the particular wavelength is a wavelength of approximately 800 nm or 830 nm.

23. The method of claim 20 , wherein the second material includes the Ta 2 O 5 material.

Assignees

• Viavi Solutions Inc

Inventors

• Rowlands Scott
• Ockenfuss Georg J
• Gustafson Tim
• Grigonis Marius

Classifications

• G06V40/28

  Recognition of hand or arm movements, e.g. recognition of deaf sign language (static hand signs G06V40/113) · CPC title

• C23C14/0652

  Silicon nitride · CPC title

• C23C14/0694

  Halides · CPC title

• C23C14/083

  of refractory metals or yttrium · CPC title

• C23C14/081

  of aluminium, magnesium or beryllium · CPC title