Offcut angle determination using electron channeling patterns

Patent metadata

Field	Value
Publication number	US-11650171-B2
Application number	US-202117357409-A
Country	US
Kind code	B2
Filing date	Jun 24, 2021
Priority date	Jun 24, 2021
Publication date	May 16, 2023
Grant date	May 16, 2023

Abstract

Methods and apparatus determine offcut angle of a crystalline sample using electron channeling patterns (ECPs), wherein backscattered electron intensity exhibits angular variation dependent on crystal orientation. A zone axis normal to a given crystal plane follows a circle as the sample is azimuthally rotated. On an ECP image presented with tilt angles as axes, the radius of the circle is the offcut angle of the sample. Large offcut angles are determined by a tilt technique that brings the zone axis into the ECP field of view. ECPs are produced with a scanning electron beam and a monolithic backscattered electron detector; or alternatively with a stationary electron beam and a pixelated electron backscatter diffraction detector. Applications include strain engineering, process monitoring, detecting spatial variations, and incoming wafer inspection. Methods are 40× faster than X-ray diffraction. 0.01-0.1° accuracy enables semiconductor applications.

First claim

We claim:

1. A method, comprising:
directing an electron beam to a substrate at a plurality of azimuthal setpoints and detecting portions of the electron beam returned from the substrate;
producing, based on the detected portions of the electron beam, respective electron backscatter patterns for each of the azimuthal setpoints; and
determining an offcut angle of the substrate as a radius of a locus of a zone axis among the electron backscatter patterns.

2. The method of claim 1 , wherein the plurality of azimuthal setpoints comprises at least three azimuthal setpoints.

3. The method of claim 1 , wherein the zone axis has a <100>, <110>, or <111> orientation.

4. The method of claim 1 , further comprising determining an azimuthal orientation of the offcut angle.

5. The method of claim 1 , wherein the azimuthal setpoints have azimuthal coordinates relative to a reference plane normal to a surface of the substrate, and the plurality of azimuthal setpoints is traversed by rotating the substrate.

6. The method of claim 1 , wherein the azimuthal setpoints have azimuthal coordinates relative to a reference plane normal to a surface of the substrate, and the plurality of azimuthal setpoints is traversed by rotating a centroid of the electron beam relative to the reference plane while the substrate remains stationary.

7. The method of claim 1 , wherein the electron beam is a scanning electron beam of a scanning electron microscope and a given pattern of the electron backscatter patterns is produced by scanning the electron beam across a surface region of the substrate.

8. The method of claim 1 , wherein the detecting is performed by a pixelated electron backscattering detector.

9. The method of claim 1 , wherein the directing and detecting are performed with the electron beam directed to a first location on the substrate, and the method further comprises repeating the directing, detecting, producing, and determining operations for a second location on the substrate distinct from the first location.

10. The method of claim 1 , wherein the directing and detecting are performed at a first time, prior to a manufacturing operation being performed on the substrate, and the method further comprises:
repeating the directing, detecting, producing, and determining operations after the manufacturing operation.

11. The method of claim 1 , further comprising, prior to the directing:
directing the electron beam to the substrate and detecting amounts of the electron beam returned from the substrate;
producing, based on the detected amounts of the electron beam, a first electron backscatter pattern having a field of view; and
responsive to determining that the zone axis is absent from the field of view, reducing a magnification of the electron beam.

12. An apparatus, comprising:
a rotation stage situated to secure a sample having a crystal lattice;
an electron beam source situated to direct an electron beam to the sample;
an electron detector situated to receive portions of the electron beam backscattered from the sample; and
a controller coupled to at least one of the rotation stage or the electron beam source and configured to:
vary an azimuthal setpoint at which the electron beam is incident, the azimuthal setpoint having an azimuthal coordinate defined relative to a reference plane containing a rotation axis of the rotation stage;
process the received portions of the electron beam to produce electron channeling patterns; and
determine an offcut angle based on a radius of a locus of a zone axis among a plurality of the electron channeling patterns.

13. An analytic instrument comprising a scanning electron microscope and comprising the apparatus of claim 12 , wherein the scanning electron microscope comprises the electron beam source.

14. The apparatus of claim 12 , wherein the electron detector is a backscatter electron detector having 1 to 16 segments.

15. The apparatus of claim 12 , wherein the electron detector is a pixelated electron backscatter diffraction detector having at least 100 pixels.

16. One or more computer-readable media having defined therein executable instructions which, when executed by one or more processors, actuate the one or more processors to:
(a) cause an electron beam to be directed to a sample so as to be incident on the sample at a plurality of azimuthal setpoints, the azimuthal setpoints having azimuthal coordinates defined relative to a crystal lattice of the sample;
(b) obtain associated backscattered electron intensities;
(c) process the backscattered electron intensities to produce respective electron channeling patterns for the plurality of azimuthal setpoints; and
(d) determine an offcut angle of the sample by:
fitting a circle to positions of a given zone axis in the respective electron channeling patterns; and
determining the offcut angle of the sample from a radius of the circle.

17. The computer-readable media of claim 16 , wherein the electron channeling patterns are first electron channeling patterns, and the computer-readable media has defined therein further instructions which, when executed by the one or more processors, actuate the one or more processors to:
(e) determine, at least in part from an initial electron channeling pattern, that a given zone axis of the crystal lattice is not in a field of view of the initial electron channeling pattern;
(f) cause a first relative tilt to be applied between the sample and the electron beam;
(g) produce a second electron channeling pattern at the first relative tilt, wherein the given zone axis is in a field of view of the second electron channeling pattern; and
(h) determine the offcut angle of the sample based at least in part on the first relative tilt.

18. The computer-readable media of claim 17 , wherein execution of the further instructions further actuates the one or more processors to:
(i) extract one or more features from the initial channeling pattern; and
(j) using the one or more features and a library of electron channeling data for the crystal lattice, determine the first relative tilt.

19. The computer-readable media of claim 17 , wherein execution of the further instructions further actuates the one or more processors to:
(k) cause a second relative tilt to be applied between the sample and the electron beam; and
(1) produce a third electron channeling pattern at the second relative tilt;
wherein act (h) comprises interpolation between, or extrapolation from, the first relative tilt and the second relative tilt, using positions of the given zone axis in the second electron channeling pattern and the third electron channeling pattern.

Assignees

• Fei Co

Inventors

• Han Han
• Strakos Libor
• Hantschel Thomas
• Vystavel Tomas
• Porret Clement

Classifications

• H01J2237/24475

  Scattered electron detectors · CPC title

• G01N2223/3306

  object rotates · CPC title

• G01N23/203 Primary

  Measuring back scattering · CPC title

• H01J37/244

  Detectors; Associated components or circuits therefor · CPC title

• G01N2223/606

  texture · CPC title