Substrate processing system, gas supply unit, method of substrate processing, computer program, and storage medium
US-9466506-B2 · Oct 11, 2016 · US
US11650019B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11650019-B2 |
| Application number | US-202016736869-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 8, 2020 |
| Priority date | Jul 11, 2017 |
| Publication date | May 16, 2023 |
| Grant date | May 16, 2023 |
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A fluid disperser includes a plate body installed in a channel, having a first wall portion in a middle region of a first surface facing the upstream side, and provided with a plurality of holes allowing a fluid to flow in from the upstream side to the downstream side, and a second wall portion provided on the first surface and having an inner surface intersecting with a line extending from the middle region to a circumferential edge of the first surface.
Opening claim text (preview).
What is claimed is: 1. A fluid dispersing device comprising: a tubular-shaped portion having an inner curved surface with a channel having a greater diameter on a downstream side than on an upstream side; an opening portion provided in the tubular-shaped portion and allowing a fluid to flow into the channel; and a fluid disperser installed in the channel, the fluid disperser comprising: a plate body having a first wall portion in a middle region of a first surface of the plate body, the plate body facing the upstream side of the channel and including the middle region as one main plane surface, and the plate body provided with a plurality of holes around the first wall portion allowing a fluid to flow in from the upstream side to the downstream side of the channel; and a second wall portion provided on and protruding from the first surface and having an inner surface intersecting with a line extending from the middle region to a circumferential edge of the first surface; wherein the first wall portion of the fluid disperser is opposed to an opening of the opening portion, the second wall portion of the fluid disperser protrudes toward the inner curved surface, and a height of the second wall portion of the fluid disperser is smaller than an opening diameter of the respective holes provided in the plate body. 2. The fluid dispersing device according to claim 1 , further comprising a perforated plate provided with a plurality of holes allowing the fluid to flow in from the upstream side to the downstream side, the perforated plate being installed parallel to the plate body of the fluid disperser on the downstream side of the fluid disperser in the channel.
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