Inspection device and substrate processing apparatus
US-2016314575-A1 · Oct 27, 2016 · US
US11648554B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-11648554-B2 |
| Application number | US-201916665559-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 28, 2019 |
| Priority date | Dec 7, 2018 |
| Publication date | May 16, 2023 |
| Grant date | May 16, 2023 |
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Provided herein are methods for processing and/or detecting a sample. A method can comprise providing a barrier between a first region and a second region, wherein the first region comprises the sample, wherein the barrier maintains the first region at a first atmosphere that is different than a second atmosphere of the second region, wherein a portion of the barrier comprises a fluid in coherent motion; and using a detector at least partially contained in the first region to detect one or more signals from the sample while the first region is maintained at the first atmosphere that is different than the second atmosphere of the second region. The portion of the barrier comprising fluid may have a pressure lower than the first atmosphere, the second atmosphere, or both.
Opening claim text (preview).
What is claimed is: 1. A system for processing or analyzing an analyte, comprising: a chamber and a lid, wherein said chamber comprises a first region configured to contain (1) a substrate comprising said analyte immobilized adjacent thereto, and (2) at least a portion of a detection unit, and wherein said lid is configured to be disposed adjacent to said chamber; and a fluid flow unit configured to direct fluid through a fluid channel to provide fluid in bulk motion at a location disposed between said chamber and said lid when said lid is disposed adjacent to said chamber, such that said first region is maintained at a first atmosphere that is different than a second atmosphere of a second region external to said first region. 2. The system of claim 1 , wherein said fluid in bulk motion is configured to provide a partial vacuum between said chamber and said lid. 3. The system of claim 1 , wherein said fluid flow unit is configured to use fluid from said first region, said second region, or both to provide said fluid in bulk motion. 4. The system of claim 1 , wherein said fluid comprises air. 5. The system of claim 1 , wherein said fluid flow unit is configured to maintain said first region at a first humidity or first humidity range, wherein said first humidity or first humidity range is different than a second humidity or second humidity range of said second region. 6. The system of claim 5 , wherein said first atmosphere has a relative humidity greater than 90%. 7. The system of claim 1 , wherein said fluid flow unit is configured to maintain said first region at a first temperature or first temperature range, wherein said first temperature or first temperature range is different than a second temperature or second temperature range of said second region. 8. The system of claim 1 , wherein said first region comprises a first part and a second part, wherein said fluid flow unit is configured to maintain said first part at a first local atmosphere and maintain said second part at a second local atmosphere different than said first local atmosphere. 9. The system of claim 8 , wherein said fluid flow unit is configured to maintain said first local atmosphere at a first local temperature or first local temperature range that is different than a second local temperature or second local temperature range of said second local atmosphere. 10. The system of claim 8 , wherein said fluid flow unit is configured to maintain said first local atmosphere at a first local humidity or first local humidity range that is different than a second local humidity or second local humidity range of said second local atmosphere. 11. The system of claim 1 , wherein said detection unit is at least partially contained in said first region. 12. The system of claim 11 , wherein said detection unit is an optical detection unit. 13. The system of claim 11 , wherein a first portion of said detection unit is in said first region and a second portion of said detection unit is in said second region. 14. The system of claim 13 , wherein said first portion of said detection unit comprises an optical imaging objective that is configured to be at least partially immersed in an immersion fluid in contact with said substrate in said first region. 15. The system of claim 11 , wherein said detection unit is configured to undergo motion while said substrate is stationary. 16. The system of claim 11 , wherein said substrate is configured to undergo motion while said detection unit is stationary. 17. The system of claim 15 or claim 16 , wherein said motion comprises one or more members selected from the group consisting of (i) substantially linear motion and (ii) substantially non-linear motion. 18. The system of claim 11 , wherein said detection unit is configured to be fixed relative to said lid. 19. The system of claim 11 , wherein said substrate is configured to be rotatable relative to said chamber. 20. The system of claim 1 , wherein said detection unit comprises one or more optics. 21. The system of claim 1 , wherein said detection unit comprises a sensor configured to capture a signal from said analyte. 22. The system of claim 1 , wherein said chamber is not in mechanical contact with said lid. 23. The system of claim 1 , wherein said lid is configured to move relative to said chamber, or vice versa. 24. The system of claim 1 , wherein said fluid flow unit is configured to maintain said first region at said first atmosphere while said detection unit and said substrate are undergoing motion relative to one another. 25. The system of claim 1 , wherein said fluid flow unit is configured to generate negative pressure in said location disposed between said chamber and said lid. 26. The system of claim 1 , wherein a first portion of said lid is provided between said first region and said second region, and wherein a second portion of said lid is provided between said second region and a third region, wherein a second fluid flow unit is configured to provide fluid in bulk motion to maintain said third region at a third atmosphere that is independent of said first atmosphere and said second atmosphere, and wherein said third region is movable relative to said lid independent of said first region. 27. The system of claim 1 , wherein said second atmosphere is a room atmosphere or an ambient atmosphere. 28. The system of claim 1 , further comprising a controller operatively coupled to said fluid flow unit, wherein said controller is configured to direct said fluid flow unit to cause said fluid to undergo said bulk motion.
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