Sheet and composite sheet

Patent metadata

Field	Value
Publication number	US-11634611-B2
Application number	US-201615763408-A
Country	US
Kind code	B2
Filing date	Sep 28, 2016
Priority date	Sep 30, 2015
Publication date	Apr 25, 2023
Grant date	Apr 25, 2023

Abstract

A problem is to provide a sheet having a pre-sintering layer, the thickness of which following sintering is such as to be capable of relieving stresses. Solution means relate to a sheet comprising a pre-sintering layer. Viscosity at 90° C. of the pre-sintering layer is not less than 0.27 MPa·s. Thickness of the pre-sintering layer is 30 μm to 200 μm.

First claim

The invention claimed is:

1. A sheet comprising:
a pre-sintering layer;
a first release liner arranged over a first face of the pre-sintering layer; and
a second release liner arranged over a second face of the pre-sintering layer,
wherein the second face is provided opposite the first face;
wherein thickness of the pre-sintering layer is 30 μm to 200 μm;
wherein a viscosity at 90° C. of the pre-sintering layer is not less than 0.27 MPa·s;
wherein the pre-sintering layer comprises metal particles;
wherein the metal particles comprise at least one species selected from the group consisting of silver particles, copper particles, silver oxide particles, and copper oxide particles;
wherein the metal particles are present in an amount that is 50 wt % to 98 wt % per 100 wt % of the pre-sintering layer;
wherein the metal particles become a sintered body when temperature is increased from 80° C. to 300° C. at a temperature rise rate of 1.5° C./second and is held at 300° C. for 2.5 minutes;
wherein the pre-sintering layer further comprises a binder which is solid at 23° C., wherein the binder comprises acrylic polymer and/or polycarbonate;
wherein the binder is present in an amount that is 0.5 wt % to 20 wt % per 100 wt % of the pre-sintering layer; and
wherein the pre-sintering layer further comprises at least one low-boiling-point binder which has a boiling point between 100° C. and 350° C. selected from the group consisting of monohydric alcohols, polyhydric alcohols, and ethers.

2. The sheet according to claim 1 ,
wherein, when a pre-sintering laminated body having a substrate, a chip, and the pre-sintering layer sandwiched between the substrate and the chip is heated under Condition 1, below, to cause the pre-sintering layer to become the sintered body, a thickness of the sintered body is 40% to 80% where a thickness of the pre-sintering layer is taken to be 100%;
wherein Condition 1 is that a flat press is used to apply a pressure of 10 MPa to the pre-sintering laminated body as temperature is increased 1.5° C./second from 80° C. to 300° C., and to apply the pressure as 300° C. is maintained for 2.5 minutes.

3. The sheet according to claim 1 ,
wherein the pre-sintering layer is used to form a joint between a first object and a second object.

4. The sheet according to claim 1 ,
wherein the binder has a property such that a carbon concentration of the binder is not greater than 15 wt % following an increase in temperature from 23° C. to 400° C. at a temperature rise rate of 10° C./min in air.

5. The sheet according to claim 1 , wherein an average particle diameter of the metal particles is not greater than 1000 nm.

6. The sheet according to claim 1 , wherein an average particle diameter of the metal particles is not greater than 100 nm.

7. The sheet according to claim 1 wherein the binder comprises polycarbonate, and wherein the polycarbonate is aliphatic polycarbonate.

8. The sheet according to claim 1 wherein the binder comprises polycarbonate, and wherein the polycarbonate is polypropylene carbonate.

9. The sheet according to claim 1 wherein the binder comprises polycarbonate, and wherein the polycarbonate has a property such that carbon concentration is not greater than 15 wt % following an increase in temperature from 23° C. to 400° C. at a temperature rise rate of 10° C./min in air.

10. The sheet according to claim 1 wherein the low-boiling-point binder is at least one compound selected from the group consisting of: pentanol, hexanol, heptanol, octanol, 1-decanol, ethylene glycol, diethylene glycol, propylene glycol, butylene glycol, alpha-terpineol, 1,6-hexanediol, isobornyl cyclohexanol (MTPH), and the ethers.

11. The sheet according to claim 1 wherein the low-boiling-point binder is isobornyl cyclohexanol (MTPH).

12. A sheet comprising a pre-sintering layer; and
a dicing sheet arranged over the pre-sintering layer;
wherein thickness of the pre-sintering layer is 30 μm to 200 μm;
wherein a viscosity at 90° C. of the pre-sintering layer is not less than 0.27 MPa·s;
wherein the pre-sintering layer comprises metal particles;
wherein the metal particles comprise at least one species selected from the group consisting of silver particles, copper particles, silver oxide particles, and copper oxide particles;
wherein the metal particles are present in an amount that is 50 wt % to 98 wt % per 100 wt % of the pre-sintering layer;
wherein the metal particles become a sintered body when temperature is increased from 80° C. to 300° C. at a temperature rise rate of 1.5° C./second and is held at 300° C. for 2.5 minutes;
wherein the pre-sintering layer further comprises a binder which is solid at 23° C., wherein the binder comprises acrylic polymer and/or polycarbonate;
wherein the binder is present in an amount that is 0.5 wt % to 20 wt % per 100 wt % of the pre-sintering layer; and
wherein the pre-sintering layer further comprises at least one low-boiling-point binder which has a boiling point between 100° C. and 350° C. selected from the group consisting of monohydric alcohols, polyhydric alcohols, and ethers.

13. A composite sheet comprising:
a release liner; and
the sheet according to claim 12 arranged over the release liner.

14. The sheet according to claim 12 ,
wherein the binder comprises the polycarbonate; and
wherein the polycarbonate is polypropylene carbonate.

15. The sheet according to claim 12 ,
wherein the binder comprises the polycarbonate; and
wherein the polycarbonate has a property such that carbon concentration is not greater than 15 wt % following an increase in temperature from 23° C. to 400° C. at a temperature rise rate of 10° C./min in air.

16. The sheet according to claim 12 , wherein the low-boiling-point binder is at least one compound selected from the group consisting of: pentanol, hexanol, heptanol, octanol, 1-decanol, ethylene glycol, diethylene glycol, propylene glycol, butylene glycol, alpha-terpineol, 1,6-hexanediol, isobornyl cyclohexanol (MTPH), and the ethers.

17. The sheet according to claim 12 , wherein the low-boiling-point binder is isobornyl cyclohexanol (MTPH).

18. The sheet according to claim 12 , wherein the viscosity at 90° C. of the pre-sintering layer is not less than 0.3 MPa·s.

19. The sheet according to claim 12 , wherein the viscosity at 90° C. of the pre-sintering layer is not less than 0.5 MPa·s.

20. The sheet according to claim 1 , wherein the viscosity at 90° C. of the pre-sintering layer is not less than 0.3 MPa·s.

21. The sheet according to claim 1 , wherein the viscosity at 90° C. of the pre-sintering layer is not less than 0.5 MPa·s.

Assignees

• Nitto Denko Corp

Inventors

• Kamakura Nao
• Sugo Yuki

Classifications

• H10P72/7416

  used during dicing or grinding · CPC title

• H10P72/7402

  Wafer tapes, e.g. grinding or dicing support tapes · CPC title

• H10W90/754

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• H10W74/00

  Encapsulations, e.g. protective coatings · CPC title

• H10W72/07331

  Connecting techniques · CPC title