Rotating light source utilized to modify substrates

Patent metadata

Field	Value
Publication number	US-11633805-B2
Application number	US-201916583733-A
Country	US
Kind code	B2
Filing date	Sep 26, 2019
Priority date	Sep 28, 2018
Publication date	Apr 25, 2023
Grant date	Apr 25, 2023

Abstract

A system comprising a beam source (110) and an optical system (304) comprising first and second portions. The system further comprises first and second torque motors integrated into respective ones of the first and second portions, The first torque motor (420) is configured to rotate first portion (416) around a first axis (434). The second torque motor (426) is configured to rotate second portion (418) around a second axis (436). The first axis is perpendicular to the second axis.

First claim

What is claimed is:

1. A system comprising:
a light source that produces a pulsed laser beam with pulse bursts comprising two sub-pulses per pulse burst or more;
an optical system comprising first and second portions; and
first and second torque motors integrated with respective ones of the first and second portions,
wherein the first torque motor is configured to rotate the first portion around a first axis;
wherein the second torque motor is configured to rotate the second portion around a second axis; and
wherein the first axis is perpendicular to the second axis.

2. The system of claim 1 , wherein the optical system comprises:
an aspheric optical element;
a first reflecting optical device;
a first lens, configured to collimate the light;
a second reflecting optical device; and
a second lens, configured to focus the light.

3. The system of claim 1 , wherein the optical system further comprises an aspheric optical element comprising a refractive axicon, a reflective axicon, a negative axicon, a spatial light modulator, a diffractive optic, or a cubically shaped optical element.

4. The system of claim 1 , wherein the optical system comprises first and second reflecting optical devices comprising mirrors.

5. The system of claim 1 , wherein the first portion comprises an aspheric optical element and a reflecting optical device.

6. The system of claim 5 , wherein the first portion further comprises a lens.

7. The system of claim 1 , wherein the first portion comprises a reflecting optical device and a lens.

8. The system of claim 1 , wherein the second portion comprises a reflecting optical device and a lens.

9. The system of claim 8 , wherein the second portion further comprises another lens.

10. The system of claim 1 , wherein the optical system is configured to generate a quasi-non-diffracting beam.

11. The system of claim 10 , wherein the quasi-non-diffracting beam comprises:
a wavelength λ;
a spot size w o ; and
a cross section that comprises a Rayleigh range Z R that is greater than

F
D

⁢

π
⁢

⁢

w

0
,

2

λ

,

where F D is a dimensionless divergence factor comprising a value of 10 or greater.

12. The system of claim 11 wherein the dimensionless divergence factor F D comprises a value of from 10 to 2000.

13. The system of claim 11 , wherein the dimensionless divergence factor comprises a value of from 50 to 1500.

14. The system of claim 11 , wherein the dimensionless divergence factor E D comprises a value of from 100 to 1000.

15. The system of claim 1 , further comprising an encoder configured to track the torque motor.

16. The system of claim 1 , wherein the first axis is vertical Z axis and the second axis is X or Y axis in a Cartesian coordinate system.

17. The system of claim 1 , wherein the system is configured for laser processing a transparent workpiece.

18. The system of claim 17 , wherein the transparent workpiece comprises an alkali aluminosilicate glass material.

19. A method comprising:
generating, by a system, a quasi-non-diffracting beam;
directing the quasi-non-diffracting beam onto a transparent workpiece, generating an induced absorption and producing a defect within the transparent workpiece; and
moving, by the system, the quasi-non-diffracting beam relative to the transparent workpiece along a contour line, forming a contour with a plurality of defects in the transparent workpiece,
wherein the quasi-non-diffracting beam is oriented orthogonal to an impingement surface of the transparent workpiece at an impingement location, and
wherein an orthogonal orientation between the quasi-non-diffracting beam and the impingement surface is maintained as the quasi-non-diffracting beam moves along the contour line to different locations on the curved surface of the transparent workpiece that have different surface orientations.

20. The method of claim 19 , wherein the impingement surface of the transparent workpiece is a curved surface.

21. The method of claim 19 , wherein the system comprises:
a light source;
an optical system comprising first and second portions; and
first and second torque motors integrated with respective ones of the first and second portions,
wherein the first torque motor is configured to rotate the first portion around a first axis;
wherein the second torque motor is configured to rotate the second portion around a second axis; and
wherein the first axis is perpendicular to the second axis.

22. The method of claim 21 , wherein the optical system comprises:
an aspheric optical element;
a first reflecting optical device;
a first lens, configured to collimate the light;
a second reflecting optical device; and
a second lens, configured to focus the light.

23. A system comprising:
a light source;
an optical system comprising first and second portions; and
first and second torque motors integrated with respective ones of the first and second portions,
wherein the first torque motor is configured to rotate the first portion around a first axis;
wherein the second torque motor is configured to rotate the second portion around a second axis; and
wherein the first axis is perpendicular to the second axis, the first axis is vertical Z axis, and the second axis is X or Y axis in a Cartesian coordinate system.

Assignees

• Corning Inc

Inventors

• Kiessling Heiko
• Spaeth Florian
• Terbrueggen Ralf Joachim

Classifications

• B23K26/0006 Primary

  taking account of the properties of the material involved (B23K26/32, B23K26/40 take precedence) · CPC title

• C03B33/102

  involving a focussed radiation beam, e.g. lasers · CPC title

• B23K26/53

  for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks · CPC title

• B23K26/38

  by boring or cutting · CPC title

• B23K26/0643

  comprising mirrors · CPC title